公开(公告)号：US20180201497A1

公开(公告)日：2018-07-19

申请号：US15744575

申请日：2016-07-13

申请人： INTREPID VISIONS INC.

发明人： Carlo MENON ,  Mojtaba KOMEILI

IPC分类号： B81B3/00 ,  B81B7/02 ,  F03G7/06

CPC分类号： B81B3/0024 ,  B81B7/02 ,  B81B2201/031 ,  B81B2203/053 ,  F03G7/065 ,  G02B26/103 ,  H01H2061/006

摘要： A system and methods for base excitation of moderately high vibration of micro-cantilevers are disclosed. A micro-cantilever may be coupled to one or more actuators adjacent its base. The actuators may comprise bulk materials, bridges, or formed wires that expand and contract by application of electric currents, due to, for example, the effect of electro-thermal heating or piezoelectric effects. Single actuators or an array of actuators may be placed around the micro-cantilever to oscillate it and apply actuation pulses. The system and methods, and adjustments of the geometrical parameters, may be performed to yield a nominal natural frequency in the system. The excitation of actuators with signals corresponding to the natural frequency may induce resonance in the system and may result in high amplitude vibrations and displacement of the cantilever tip of the micro-cantilever. Various architectures of the actuators may be implemented to stimulate different frequencies of the beam and induce displacement in different direction and amplitudes.

公开(公告)号：US20170268931A1

公开(公告)日：2017-09-21

申请号：US15462238

申请日：2017-03-17

申请人： The Board of Trustees of the University of Illinois

发明人： Songbin Gong ,  Daniel M. Wasserman

IPC分类号： G01J5/08 ,  G01J3/28 ,  B81B3/00 ,  B82Y15/00 ,  H03H9/205 ,  H03H9/02

CPC分类号： G01J5/0853 ,  B81B3/0024 ,  B82Y15/00 ,  G01J3/2803 ,  G01J5/046 ,  G01J5/0825 ,  G01J5/44

摘要： An infrared (IR) detector comprises a radio frequency (RF) resonator including a bottom electrode to provide acoustic excitation, a piezoelectric layer connected to the bottom electrode and suspended over a cavity defined within a semiconductor substrate, and a top layer comprising a mid-IR metamaterial and which is connected to the piezoelectric layer of the RF resonator. The top layer and the piezoelectric layer are sized to impedance match with a particular IR wavelength, to minimize reflection and maximize absorption of a particular IR wavelength, and thus make the top layer polarization sensitive to the particular IR wavelength.

公开(公告)号：US20170203955A1

公开(公告)日：2017-07-20

申请号：US15324892

申请日：2015-07-09

申请人： EMX, INTERNATIONAL LLC.

发明人： Daniel GRAYBEAL

IPC分类号： B81B3/00 ,  G01J5/40

CPC分类号： B81B3/0024 ,  G01J5/40

摘要： In some aspects the present invention embodies both the method and apparatus for converting a pattern of irradiation to a visible image. An embodiment of the present invention provides an array of micro-electro-mechanical sensors with each sensor includes a deflectable micro-cantilever, responsive to absorbed incident radiation and to an applied repulsive electrostatic field. Associated circuitry senses a change in an output signal of the sensor as it responds to incident radiation incident upon the cantilever and provides a biasing force to deflect the cantilever and maintain the detector output signal at a desirable level. The biasing element may be a piezoelectric element, a heater or a pair of electrodes and the corresponding biasing stimulus may be stress (expansion), heat, or electrostatic change. The stimulus compensates for the effect of the infrared radiation and maintains the chosen detector output level at the same level.

公开(公告)号：US20170183217A1

公开(公告)日：2017-06-29

申请号：US15300212

申请日：2015-03-24

申请人： Agiltron, Inc.

发明人： Luzhong Yin ,  Jing Zhao ,  Guanghai Jin

IPC分类号： B81B3/00 ,  G02B26/02 ,  H02N10/00

CPC分类号： B81B3/0037 ,  B81B3/0024 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2203/0384 ,  B81B2203/051 ,  G02B26/02 ,  G02B26/023 ,  G02B26/04 ,  H02N2/043 ,  H02N10/00

摘要： The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, and an end of the second beam coupled to a motion actuator; and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.

公开(公告)号：US20170117825A1

公开(公告)日：2017-04-27

申请号：US15297243

申请日：2016-10-19

申请人： Commissariat A L'Energie Atomique et aux Energies Alternatives ,  SAFRAN ELECTRONICS & DEFENSE

发明人： Guillaume JOURDAN ,  Guillaume LEHEE

IPC分类号： H02N10/00 ,  B81B3/00

CPC分类号： H02N10/00 ,  B81B3/0024 ,  B81B2201/031

摘要： A microelectromechanical structure with electrothermal actuation including a fixed part, a moveable part, a first electrothermal actuating beam enabling an electric current to flow from the fixed part to the moveable part and a second electrothermal actuating beam enabling an electric current to flow from the fixed part to the moveable part, the beams being mechanically connected to the moveable part enabling a displacement of the moveable part by electrothermal actuation, an electrically conductive connecting element connecting the moveable part to the fixed part, a first connector for connecting the first actuating beam to a first polarisation source and a second connector for connecting the second actuating beam to a second polarisation source, such that the first and the second can be polarised differently and separately.

公开(公告)号：US20160173003A1

公开(公告)日：2016-06-16

申请号：US14903994

申请日：2014-08-18

申请人： STMICROELECTRONICS (CROLLES 2) SAS ,  STMICROELECTRONICS SA ,  COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

发明人： Stephane Monfray ,  Christophe Maitre ,  Olga Kokshagina ,  Thomas Skotnicki ,  Ulrich Soupremanien

IPC分类号： H02N1/08

CPC分类号： H02N1/08 ,  B81B3/0021 ,  B81B3/0024 ,  B81B2203/053 ,  F01K5/02 ,  H02N1/006

摘要： A power conversion device includes an enclosure containing one or more drops of a liquid. A capacitive electret transducer is coupled to the enclosure. In response to applied heat at a heating surface, the liquid vaporizes and then condenses on a flexible membrane of the capacitive electret transducer. The flexible membrane is displaced in response to the vaporization-condensation and the capacitive electret transducer generates an output current.

摘要翻译： 电力转换装置包括包含一滴或多滴液体的外壳。 电容驻极体换能器耦合到外壳。 响应于加热表面处的加热，液体蒸发然后在电容驻极体换能器的柔性膜上冷凝。 柔性膜响应于汽化冷凝而移位，并且电容驻极体换能器产生输出电流。

公开(公告)号：US20160062076A1

公开(公告)日：2016-03-03

申请号：US14784802

申请日：2014-04-21

申请人： LG INNOTEK CO. LTD.

发明人： Yong Jun KO ,  Sang Won SEO ,  Jeong Gi SEO ,  Chul KIM ,  Don Han JUN ,  Wan Seop CHOI

IPC分类号： G02B7/09 ,  B81B7/02 ,  H02N1/00 ,  G02B7/02

CPC分类号： G02B7/09 ,  B81B3/0024 ,  B81B7/02 ,  B81B2201/032 ,  B81B2201/047 ,  B81B2203/0163 ,  B81B2203/053 ,  G02B7/028 ,  G02B7/08 ,  G03B3/10 ,  H02N1/006

摘要： The disclosure provides a MEMS device including: a fixed substrate having a cavity; a driving unit disposed in the cavity and floating above the fixed substrate; and an elastic unit for physically connecting the fixed substrate with the driving unit and varying the height of the driving unit according to a control current, wherein the elastic unit includes a bimorph driving unit connected to the fixed substrate and bent according to the control current, a spring connected to the driving unit, and a frame connecting the bimorph driving unit to the spring. Therefore, in order to overcome the limitations according to the power consumption and the size-reduction due to a coil and a magnet, the MEMS device drives one lens and thus can reduce the power consumption and the size thereof. Further, the MEMS device applies a thermal scheme which performs an automatic focusing function through vertical operation of a lens by a thermal expansion difference of different materials, thereby simplifying the structure thereof and reducing the cost.

摘要翻译： 本公开提供了一种MEMS器件，包括：具有空腔的固定衬底; 驱动单元，设置在所述空腔中，并且浮置在所述固定基板上; 以及用于将固定基板与驱动单元物理连接并根据控制电流改变驱动单元的高度的弹性单元，其中弹性单元包括连接到固定基板并根据控制电流弯曲的双压电晶片驱动单元， 连接到驱动单元的弹簧和将双压电晶片驱动单元连接到弹簧的框架。 因此，为了克服根据功率消耗和由于线圈和磁体引起的尺寸减小的限制，MEMS器件驱动一个透镜，从而可以降低功耗及其尺寸。 此外，MEMS器件通过不同材料的热膨胀差来应用通过透镜的垂直操作来执行自动聚焦功能的热方案，从而简化其结构并降低成本。

公开(公告)号：US20140295365A1

公开(公告)日：2014-10-02

申请号：US14362285

申请日：2012-11-29

申请人： Commissariat à I'énergie atomique et aux énergies alternatives

发明人： Fabrice Casset

IPC分类号： F24J3/00

CPC分类号： F24V99/00 ,  B81B3/0024 ,  B81B3/0081 ,  B81B2201/0271 ,  B81B2201/031 ,  B81B2201/032 ,  F03G7/06 ,  H01L41/1136 ,  H02N2/18

摘要： A device for generating a second temperature variation ΔT2 from a first use temperature variation ΔT1, includes an elastocaloric material layer, having an internal temperature which is able to vary by ΔT2 in response to a given mechanical stress variation Δσ applied to the elastocaloric material layer. The variation Δσ being induced by the first use temperature variation ΔT1 There is a suspended element in mechanical contact with the elastocaloric material layer so as to apply to this layer a mechanical stress that varies in response to the use temperature variation ΔT1. The suspended element is arranged so as to make the mechanical stress applied to the elastocaloric material layer vary by Δσ in response to the temperature variation ΔT1 to generate the second temperature variation ΔT2.

摘要翻译： 用于从第一使用温度变化＆Dgr; T1产生第二温度变化＆gt; T2的装置包括弹性体材料层，其具有响应于给定的机械应力变化＆Dgr能够变化为＆Dgr; T2的内部温度; ＆sgr 应用于弹性材料层。 变化与变化 由第一使用温度变化引起的; Dgr; T1具有与弹性体材料层机械接触的悬浮元件，以便向该层施加响应于使用温度变化＆Dgr; T1变化的机械应力。 悬挂元件布置成使得施加到弹性材料层的机械应力变化为＆Dgr; 响应于温度变化＆Dgr; T1以产生第二温度变化＆Dgr; T2。

公开(公告)号：US20140167908A1

公开(公告)日：2014-06-19

申请号：US14185310

申请日：2014-02-20

申请人： STMicroelectronics (Rousset) SAS

发明人： Pascal Fornara ,  Christian Rivero ,  Antonio di-Giacomo

IPC分类号： H01H37/52

CPC分类号： H01H37/52 ,  B81B3/0024 ,  G01K3/005 ,  G01K5/486 ,  H01L23/58 ,  H01L2924/0002 ,  H01L2924/00

摘要： An integrated circuit comprising a mechanical device for electrical switching comprising a first assembly being thermally deformable and having a beam held at at least two different locations by at least two arms, the beam and the arms being metal and disposed within the same metallization level, and further comprising at least one electrically conducting body. The first assembly has a first configuration at a first temperature and a second configuration at a second temperature different from the first temperature. The beam is out of contact with the electrically conducting body in one configuration in contact with the body in the other configuration. The beam establishes or breaks an electrical link passing through the said at least one electrically conducting body and through the said beam in the different configurations.

摘要翻译： 一种集成电路，包括用于电开关的机械装置，包括可热变形的第一组件，并且具有通过至少两个臂保持在至少两个不同位置处的梁，所述梁和所述臂是金属并且设置在相同的金属化水平内，以及 还包括至少一个导电体。 第一组件具有在第一温度下的第一构型和在与第一温度不同的第二温度下的第二构型。 在与另一种结构中的身体接触的一种结构中，光束与导电体脱离接触。 光束建立或断开通过所述至少一个导电体并通过所述光束的不同构造的电连接。

公开(公告)号：US08420427B2

公开(公告)日：2013-04-16

申请号：US11492671

申请日：2006-07-25

申请人： Shawn Jay Cunningham ,  Dana Richard DeReus ,  Subham Sett ,  John Gilbert

发明人： Shawn Jay Cunningham ,  Dana Richard DeReus ,  Subham Sett ,  John Gilbert

IPC分类号： H01L21/00

CPC分类号： B81B3/0024 ,  B81B3/0051 ,  B81B2201/014 ,  B81B2201/018 ,  B81B2203/0118 ,  B81B2203/04 ,  B81B2207/07 ,  B81C1/0015 ,  B81C2201/0107 ,  B81C2201/0108 ,  B81C2201/0109 ,  H01H1/04 ,  H01H1/504 ,  H01H59/0009 ,  H01H61/04 ,  H01H2001/0042 ,  H01H2001/0063 ,  H01H2001/0089 ,  H01H2059/0072 ,  H01H2061/006 ,  H01L23/3735 ,  H01L23/522 ,  H01L27/1203 ,  H01L2924/0002 ,  H01L2924/09701 ,  H02N1/006 ,  H02N10/00 ,  Y10T29/49222 ,  H01L2924/00

摘要： Methods for Implementation of a Switching Function in a Microscale Device and for Fabrication of a Microscale Switch. According to one embodiment, a method is provided for implementing a switching function in a microscale device. The method can include providing a stationary electrode and a stationary contact formed on a substrate. Further, a movable microcomponent suspended above the substrate can be provided. A voltage can be applied between the between a movable electrode of the microcomponent and the stationary electrode to electrostatically couple the movable electrode with the stationary electrode, whereby the movable component is deflected toward the substrate and a movable contact moves into contact with the stationary contact to permit an electrical signal to pass through the movable and stationary contacts. A current can be applied through the first electrothermal component to produce heating for generating force for moving the microcomponent.

摘要翻译： 用于实现微尺度装置中的切换功能以及用于制造微型开关的方法。 根据一个实施例，提供了一种用于在微型设备中实现切换功能的方法。 该方法可以包括提供固定电极和形成在基板上的固定触点。 此外，可以提供悬浮在基板上方的可移动微型部件。 可以在微型组件的可动电极和固定电极之间施加电压，以使可动电极与固定电极静电耦合，由此可动部件朝向基板偏转，并且可动触点移动到与固定触点接触 允许电信号通过可移动和固定触点。 可以通过第一电热部件施加电流以产生用于产生用于移动微型部件的力的加热。