公开(公告)号：US20170268931A1

公开(公告)日：2017-09-21

申请号：US15462238

申请日：2017-03-17

申请人： The Board of Trustees of the University of Illinois

发明人： Songbin Gong ,  Daniel M. Wasserman

IPC分类号： G01J5/08 ,  G01J3/28 ,  B81B3/00 ,  B82Y15/00 ,  H03H9/205 ,  H03H9/02

CPC分类号： G01J5/0853 ,  B81B3/0024 ,  B82Y15/00 ,  G01J3/2803 ,  G01J5/046 ,  G01J5/0825 ,  G01J5/44

摘要： An infrared (IR) detector comprises a radio frequency (RF) resonator including a bottom electrode to provide acoustic excitation, a piezoelectric layer connected to the bottom electrode and suspended over a cavity defined within a semiconductor substrate, and a top layer comprising a mid-IR metamaterial and which is connected to the piezoelectric layer of the RF resonator. The top layer and the piezoelectric layer are sized to impedance match with a particular IR wavelength, to minimize reflection and maximize absorption of a particular IR wavelength, and thus make the top layer polarization sensitive to the particular IR wavelength.

公开(公告)号：US09423301B2

公开(公告)日：2016-08-23

申请号：US14718166

申请日：2015-05-21

申请人： Nanohmics, Inc.

发明人： Steve M. Savoy ,  Byron G. Zollars ,  Gennady Shvets

IPC分类号： G01J3/12 ,  H01L31/18 ,  G01J1/04 ,  G01J5/08 ,  G01J1/42 ,  G01J3/02 ,  G01J3/26 ,  G01J3/28 ,  G01J3/51 ,  G01J5/02 ,  G01J5/20

CPC分类号： G01J3/12 ,  G01J1/0414 ,  G01J1/0429 ,  G01J1/0488 ,  G01J1/42 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/51 ,  G01J5/024 ,  G01J5/0809 ,  G01J5/0825 ,  G01J5/0862 ,  G01J5/20 ,  H01L31/18

摘要： Embodiments of the invention are directed to integrated resonance detectors and arrays of integrated resonance detectors and to methods for making and using the integrated resonance detectors and arrays. Integrated resonance detectors comprise a substrate, a conducting mirror layer, an active layer, and a patterned conducting layer. Electromagnetic radiation is detected by transducing a specific resonance-induced field enhancement in the active layer to a detection current that is proportional to the incident irradiance.

摘要翻译： 本发明的实施例涉及集成谐振检测器和集成谐振检测器的阵列以及用于制造和使用集成谐振检测器和阵列的方法。 集成谐振检测器包括基板，导电镜层，有源层和图案化导电层。 通过将有源层中的特定共振诱导场增强转换成与入射辐照度成比例的检测电流来检测电磁辐射。

公开(公告)号：US09040913B2

公开(公告)日：2015-05-26

申请号：US13329503

申请日：2011-12-19

申请人： Steve M. Savoy ,  Byron G. Zollars ,  Andrew J. Milder ,  Gennady Shvets

发明人： Steve M. Savoy ,  Byron G. Zollars ,  Andrew J. Milder ,  Gennady Shvets

IPC分类号： G01J3/50 ,  G01J1/04 ,  G01J5/08 ,  G01J1/42 ,  G01J3/02 ,  G01J3/26 ,  G01J3/28 ,  G01J3/51 ,  G01J5/02 ,  G01J5/20

CPC分类号： G01J3/12 ,  G01J1/0414 ,  G01J1/0429 ,  G01J1/0488 ,  G01J1/42 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/51 ,  G01J5/024 ,  G01J5/0809 ,  G01J5/0825 ,  G01J5/0862 ,  G01J5/20 ,  H01L31/18

摘要： Embodiments of the invention are directed to integrated resonance detectors and arrays of integrated resonance detectors and to methods for making and using the integrated resonance detectors and arrays. Integrated resonance detectors comprise a substrate, a conducting mirror layer, an active layer, and a patterned conducting layer. Electromagnetic radiation is detected by transducing a specific resonance-induced field enhancement in the active layer to a detection current that is proportional to the incident irradiance.

摘要翻译： 本发明的实施例涉及集成谐振检测器和集成谐振检测器的阵列以及用于制造和使用集成谐振检测器和阵列的方法。 集成谐振检测器包括基板，导电镜层，有源层和图案化导电层。 通过将有源层中的特定共振诱导场增强转换成与入射辐照度成比例的检测电流来检测电磁辐射。

公开(公告)号：US08884227B2

公开(公告)日：2014-11-11

申请号：US14173174

申请日：2014-02-05

申请人： Seiko Epson Corporation

发明人： Yasuaki Hamada

IPC分类号： H01L37/00 ,  G01J5/34

CPC分类号： G01J5/34 ,  G01J5/026 ,  G01J5/0825 ,  G01J2005/0077 ,  G01J2005/345

摘要： A sensor includes a first electrode, a second electrode, a ferroelectric element that is disposed between the first electrode and the second electrode and that has a ferroelectric film formed of a ferroelectric substance, and a detector configured to read an electric charge generated in the ferroelectric element. The detector performs reading by applying a first voltage for aligning polarization directions of the ferroelectric film and a second voltage for reversing polarization of at least part of the ferroelectric film whose polarization directions have been aligned.

摘要翻译： 传感器包括：第一电极，第二电极，设置在第一电极和第二电极之间并具有由铁电体形成的铁电膜的铁电元件;以及检测器，被配置为读取在铁电体中产生的电荷 元件。 检测器通过施加用于对准铁电体膜的偏振方向的第一电压和用于反转偏振方向已对准的至少部分铁电体膜的极化的第二电压来执行读取。

公开(公告)号：US20120193521A1

公开(公告)日：2012-08-02

申请号：US13019853

申请日：2011-02-02

申请人： Jeffrey H. Hunt

发明人： Jeffrey H. Hunt

IPC分类号： G01J5/20 ,  B82Y99/00

CPC分类号： G01J1/42 ,  B82Y15/00 ,  B82Y30/00 ,  G01J1/0407 ,  G01J1/0488 ,  G01J5/023 ,  G01J5/046 ,  G01J5/0825 ,  G01J5/0862 ,  G01J5/12 ,  G01J9/00

摘要： An apparatus, system, and method are disclosed for a frequency selective electromagnetic detector. In particular, the frequency selective electromagnetic detector includes a nanowire array constructed from a plurality of nanowires of different compositions. At least one nanoparticle-sized diameter thermoelectric junction is formed between the nanowires of different compositions. When a nanoparticle-sized diameter thermoelectric junction senses a photon, the nanoparticle-sized diameter thermoelectric junction emits an electrical pulse voltage that is proportional to an energy level of the sensed photon. In one or more embodiments, the frequency selective electromagnetic detector is a frequency selective optical detector that is used to sense photons having optical frequencies. In at least one embodiment, at least one of the nanowires in the nanowire array is manufactured from a compound material including Bismuth (Bi) and Tellurium (Te).

摘要翻译： 公开了用于频率选择性电磁检测器的装置，系统和方法。 特别地，频率选择性电磁检测器包括由多个不同组成的纳米线构成的纳米线阵列。 在不同组成的纳米线之间形成至少一个纳米颗粒尺寸的直径的热电接头。 当纳米颗粒尺寸的直径的热电接头感测到光子时，纳米颗粒尺寸的直径热电结点发射与所感测光子的能级成比例的电脉冲电压。 在一个或多个实施例中，频率选择性电磁检测器是用于感测具有光学频率的光子的频率选择性光学检测器。 在至少一个实施例中，纳米线阵列中的纳米线中的至少一个由包括铋（Bi）和碲（Te）的复合材料制成。

公开(公告)号：US5653537A

公开(公告)日：1997-08-05

申请号：US406324

申请日：1995-03-17

申请人： Steven A. Ignatowicz ,  Eugene F. Kalley ,  Daniel Scott Hampton ,  Sam Paris

发明人： Steven A. Ignatowicz ,  Eugene F. Kalley ,  Daniel Scott Hampton ,  Sam Paris

IPC分类号： G01J5/08 ,  G02B6/34

CPC分类号： G01J5/02 ,  G01J5/026 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0809 ,  G01J5/0821 ,  G01J5/0825 ,  G01J5/0834 ,  G01J5/0846 ,  G01J5/0859 ,  G01J5/0862

摘要： A light detector is disclosed for measuring the temperature of an object. The light detector includes a lens assembly for accepting light emitted from the object, an aperture, and a mirror for reflecting the infrared energy of the object into a fiber optic cable. The fiber optic cable is connected to a depolarizing element to which pressure is externally applied. The depolarization element relays the infrared energy into a detection portion and a signal processing portion for calculating temperature. Before the infrared light enters the fiber optic cable, a chopper, controlled by a driving circuit, chops the infrared energy reflected by the mirror.

摘要翻译： 公开了一种用于测量物体的温度的光检测器。 光检测器包括用于接收从物体发射的光的透镜组件，用于将物体的红外能量反射到光纤电缆中的孔和反射镜。 光纤电缆连接到外部施加压力的去极化元件。 去极化元件将红外能量中继到检测部分和用于计算温度的信号处理部分。 在红外光进入光纤电缆之前，由驱动电路控制的斩波器斩波由反射镜反射的红外能量。

公开(公告)号：US5011295A

公开(公告)日：1991-04-30

申请号：US422644

申请日：1989-10-17

申请人： Shankar Krishnan ,  George P. Hansen ,  Robert H. Hauge ,  John L. Margrave ,  Charles A. Rey

发明人： Shankar Krishnan ,  George P. Hansen ,  Robert H. Hauge ,  John L. Margrave ,  Charles A. Rey

IPC分类号： G01J4/00 ,  G01J5/00 ,  G01J5/58 ,  G01N21/21

CPC分类号： G01J5/58 ,  G01J4/04 ,  G01J5/0003 ,  G01J5/0096 ,  G01J5/04 ,  G01J5/047 ,  G01J5/08 ,  G01J5/0809 ,  G01J5/0825 ,  G01J5/0834 ,  G01J5/0846 ,  G01J5/0896 ,  G01J2005/0048 ,  G01J2005/0074 ,  G01J2005/0077 ,  G01N2021/1793 ,  G01N21/21 ,  G01N2201/0696

摘要： Method and apparatus for accurately and instantaneously determining the thermodynamic temperature of remote objects by continuous determination of the emissivity, the reflectivity, and optical constants, as well as the apparent or brightness temperature of the sample with a single instrument. The emissivity measurement is preferably made by a complex polarimeter including a laser that generates polarized light, which is reflected from the sample into a detector system. The detector system includes a beamsplitter, polarization analyzers, and four detectors to measure independently the four Stokes vectors of the reflected radiation. The same detectors, or a separate detector in the same instrument, is used to measure brightness temperature. Thus, the instrument is capable of measuring both the change in polarization upon reflection as well as the degree of depolarization and hence diffuseness. This enables correction for surface roughness of the sample and background radiation, which could otherwise introduce errors in temperature measurement.

摘要翻译： 通过用单个仪器连续测定样品的发射率，反射率和光学常数以及样品的表观或亮度温度来准确和瞬时地确定远程物体的热力学温度的方法和设备。 发射率测量优选由包括产生偏振光的激光器的复合旋光计来进行，该偏振光从样品反射到检测器系统中。 检测器系统包括分束器，偏振分析器和四个检测器，以独立地测量反射辐射的四个斯托克斯矢量。 相同的检测器或相同仪器中的单独检测器用于测量亮度温度。 因此，该仪器能够测量反射时的极化的变化以及去极化的程度，从而测量扩散度。 这样可以校正样品的表面粗糙度和背景辐射，否则会导致温度测量误差。

公开(公告)号：US20180143078A1

公开(公告)日：2018-05-24

申请号：US15873795

申请日：2018-01-17

申请人： Apple Inc.

发明人： Miikka M. KANGAS ,  Michael J. BISHOP ,  Robert CHEN ,  David I. SIMON ,  Harold L. SONTAG III ,  George Dee SKIDMORE

IPC分类号： G01J5/08 ,  G01J5/20 ,  G01J4/04

CPC分类号： G01J5/0825 ,  G01J4/04 ,  G01J5/0225 ,  G01J5/0846 ,  G01J5/0853 ,  G01J5/20 ,  G01J2005/202

摘要： This relates to sensor systems, detectors, imagers, and readout integrated circuits (ROICs) configured to selectively detect one or more frequencies or polarizations of light, capable of operating with a wide dynamic range, or any combination thereof. In some examples, the detector can include one or more light absorbers; the patterns and/or properties of a light absorber can be configured based on the desired measurement wavelength range and/or polarization direction. In some examples, the detector can comprise a plurality of at least partially overlapping light absorbers for enhanced dynamic range detection. In some examples, the detector can be capable of electrostatic tuning for one or more flux levels by varying the response time or sensitivity to account for various flux levels. In some examples, the ROIC can be capable of dynamically adjusting at least one of the frame rate integrating capacitance, and power of the illumination source.

公开(公告)号：US20170372924A1

公开(公告)日：2017-12-28

申请号：US15193502

申请日：2016-06-27

申请人： GLOBALFOUNDRIES Inc.

发明人： Abner BELLO ,  Stephanie WAITE ,  William J. FOSNIGHT ,  Thomas BEEG

IPC分类号： H01L21/673 ,  G01N21/21 ,  G01J5/00 ,  H01L21/66 ,  G01N21/55 ,  G01J5/08

CPC分类号： G01J5/0096 ,  G01J5/0007 ,  G01J5/025 ,  G01J5/0825 ,  G01J5/0896 ,  G01N21/211 ,  G01N21/55 ,  G01N2201/06113 ,  G01N2201/0683 ,  G01N2201/12 ,  G01R27/00 ,  H01L21/67253 ,  H01L21/6732 ,  H01L21/67353 ,  H01L21/67386 ,  H01L22/12

摘要： A self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers are provided. A wafer carrier system includes, for instance, a housing configured for transport within the automated material handling system, the housing having a support configured to support a semiconductor wafer in the housing, and a metrology system disposed within the housing, the metrology system operable to measure at least one characteristic of the wafer, the metrology system comprising a sensing unit and a computing unit operably connected to the sensing unit. Also provided are methods of measuring one or more characteristics of a semiconductor wafer within the wafer carrier systems of the present disclosure.

公开(公告)号：US20170328778A1

公开(公告)日：2017-11-16

申请号：US15345946

申请日：2016-11-08

申请人： Mitsubishi Electric Corporation

发明人： Satoi KOBAYASHI ,  Takaki SUGINO ,  Takafumi HARA ,  Yuji KAWANO

IPC分类号： G01J5/10 ,  G01J5/08

CPC分类号： G01J5/10 ,  G01J5/024 ,  G01J5/06 ,  G01J5/0825 ,  G01J5/0853 ,  G01J5/20 ,  G01J2005/065

摘要： In a thermal infrared detector having trench structures, at least one sensor element is provided between the trench structures, an etching hole through which the sensor element is hollowed out and thereby thermally insulated is provided in a substrate rear surface or on the periphery of a pixel area, and an opening portion is provided below the pixel area.