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公开(公告)号：US12078547B2
公开(公告)日：2024-09-03
申请号：US17487993
申请日：2021-09-28
发明人： Bruce E. Adams , Samuel C. Howells , Alvaro Garcia , Barry P. Craver , Tony Jefferson Gnanaprakasa , Lei Lian
CPC分类号： G01J5/58 , H01J37/32522 , H01L22/12 , G01J2005/583 , H01J2237/24585 , H01J2237/334
摘要： A method and apparatus for determining the temperature of a substrate within a processing chamber are described herein. The methods and apparatus described herein utilize an etalon assembly and a heterodyning effect to determine a first temperature of a substrate. The first temperature of the substrate is determined without physically contacting the substrate. A separate temperature sensor also measures a second temperature of the substrate and/or the substrate support at a similar location. The first temperature and the second temperature are utilized to calibrate one of the temperature sensors disposed within the substrate support, a model of the processes performed within the processing chamber, or to adjust a process parameter of the process performed within the processing chamber.
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公开(公告)号：US11953380B2
公开(公告)日：2024-04-09
申请号：US17613222
申请日：2020-05-21
申请人： NEXTINPUT, INC.
CPC分类号： G01J5/20 , G01J5/0007 , G01J5/024 , G01J5/58
摘要： Described herein is a sensor in chip scale package form factor. For example, a non-vacuum packaged sensor chip described herein includes a substrate, and a sensing element arranged on the substrate. The sensing element is configured to change resistance with temperature. Additionally, the non-vacuum packaged sensor chip includes an absorbing layer configured to absorb middle infrared (“MIR”) radiation.
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公开(公告)号：US09835885B2
公开(公告)日：2017-12-05
申请号：US14845941
申请日：2015-09-04
IPC分类号： G02F1/13 , H04N5/33 , G01J5/58 , G02F1/1337 , G02F1/13363
CPC分类号： G02F1/132 , G01J5/58 , G02F1/1337 , G02F2001/133638 , G02F2203/11 , H04N5/33
摘要： The high-pixel-count uncooled thermal imaging arrays disclosed herein have liquid crystal (LC) microcavity transducers separate from the read-out integrated circuit (ROIC). The transducer converts incident infrared (IR) radiation in birefringence changes that can be measured with visible light. In other words, the system uses the temperature sensitivity of the LC birefringence to convert the IR scene to a visible image. Measurements on sample arrays indicate that the LC material quality is similar to that of bulk samples and has good noise performance. Additionally, high-fill-factor arrays on fused-silica substrates may be processed to enable optimization of conditions for greatly improved temperature sensitivity. An additional IR absorber layer may be integrated into the process to tune the structure for the infrared.
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公开(公告)号：US20170170803A1
公开(公告)日：2017-06-15
申请号：US15238221
申请日：2016-08-16
发明人： Matteo RINALDI , Cristian CASSELLA , Zhenyun QIAN , Yu HUI
CPC分类号： H03H9/02244 , G01J3/42 , G01J5/046 , G01J5/20 , G01J5/44 , G01J5/58 , H01L41/18 , H03H3/02 , H03H9/13 , H03H9/15 , H03H9/17 , H03H9/2463 , H03H2003/027 , H03H2009/02503 , H03H2009/155 , H03H2009/241
摘要： A resonator includes a piezoelectric plate and interdigitated electrode(s). The interdigitated electrode includes a plurality of conductive strips disposed over a top surface of the piezoelectric plate. A two-dimensional mode of mechanical vibration is excited in a cross sectional plane of the piezoelectric plate in response to an alternating voltage applied through the interdigitated electrode. The two-dimensional mode of mechanical vibration is a cross-sectional Lamé mode resonance (CLMR) or a degenerate cross-sectional Lamé mode resonance (dCLMR).
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公开(公告)号：US09671290B2
公开(公告)日：2017-06-06
申请号：US15191871
申请日：2016-06-24
申请人： NIKON CORPORATION
发明人： Masafumi Mizuguchi
CPC分类号： G01J5/0003 , G01J5/10 , G01J5/58 , G01K11/12
摘要： There is provided a temperature measurement method for measuring a temperature of an ultraviolet light transmittance member transmitting ultraviolet light. The method includes: detecting ultraviolet light transmitted through the ultraviolet light transmittance member using a spectroscopic measurement unit, and obtaining an absorption edge wavelength of the ultraviolet light transmittance member; and deriving a temperature of the ultraviolet light transmittance member on the basis of the obtained absorption edge wavelength.
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公开(公告)号：US20160182835A1
公开(公告)日：2016-06-23
申请号：US15040580
申请日：2016-02-10
发明人： Peter Marandos , Grady Patterson , Kenneth Leeson
CPC分类号： H04N5/33 , G01J5/0003 , G01J5/58 , G01J2005/0077 , G01J2005/0085 , Y10T29/49002
摘要： An apparatus and method for characterization of a directed beam of electromagnetic radiation is provided. An exemplary embodiment of the invention can include an apparatus and measuring technique method which uses a model for blackbody radiation that includes consideration all the degrees of freedom due to translation, vibration, and rotation of molecules or atoms that make up the absorber and a heat transfer term which averages the behavior of all the atoms of the material as a function of temperature. This apparatus and method provides an advantage of increased accuracy, substantial reductions of time required for processing, simplification of measuring processes, and reduction required equipment.
摘要翻译： 提供了用于表征电磁辐射定向束的装置和方法。 本发明的示例性实施例可以包括使用黑体辐射模型的装置和测量技术方法，该方法包括考虑由构成吸收体的分子或原子的平移，振动和旋转引起的所有自由度和传热 将材料的所有原子的行为作为温度的函数进行平均的术语。 该装置和方法提供了提高精度，显着减少处理所需时间，简化测量过程以及减少所需设备的优点。
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公开(公告)号：US09325914B2
公开(公告)日：2016-04-26
申请号：US13967823
申请日：2013-08-15
申请人： Peter Marandos , Grady Patterson , Kenneth Leeson
发明人： Peter Marandos , Grady Patterson , Kenneth Leeson
CPC分类号： H04N5/33 , G01J5/0003 , G01J5/58 , G01J2005/0077 , G01J2005/0085 , Y10T29/49002
摘要： An apparatus and method for characterization of a directed beam of electromagnetic radiation is provided. An exemplary embodiment of the invention can include an apparatus and measuring technique method which uses a model for blackbody radiation that includes consideration all the degrees of freedom due to translation, vibration, and rotation of molecules or atoms that make up the absorber and a heat transfer term which averages the behavior of all the atoms of the material as a function of temperature. This apparatus and method provides an advantage of increased accuracy, substantial reductions of time required for processing, simplification of measuring processes, and reduction required equipment.
摘要翻译： 提供了用于表征电磁辐射定向束的装置和方法。 本发明的示例性实施例可以包括使用黑体辐射模型的装置和测量技术方法，该方法包括考虑由构成吸收体的分子或原子的平移，振动和旋转引起的所有自由度和传热 将材料的所有原子的行为作为温度的函数进行平均的术语。 该装置和方法提供了提高精度，显着减少处理所需时间，简化测量过程以及减少所需设备的优点。
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公开(公告)号：US08897609B1
公开(公告)日：2014-11-25
申请号：US13871676
申请日：2013-04-26
申请人： Sandia Corporation
发明人： Paul Davids , David W. Peters
CPC分类号： G01J5/58 , G01J1/0488 , G01J1/42 , G01J5/0853 , G01J5/0862 , H01L27/14652 , H01L31/1085
摘要： A frequency selective infrared (IR) photodetector having a predetermined frequency band. The exemplary frequency selective photodetector includes: a dielectric IR absorber having a first surface and a second surface substantially parallel to the first surface; an electrode electrically coupled to the first surface of the dielectric IR absorber; and a frequency selective surface plasmonic (FSSP) structure formed on the second surface of the dielectric IR absorber. The FSSP structure is designed to selectively transmit radiation in the predetermined frequency band that is incident on the FSSP structure substantially independent of the angle of incidence of the incident radiation on the FSSP structure.
摘要翻译： 具有预定频带的频率选择性红外（IR）光电探测器。 示例性频率选择性光电检测器包括：介电IR吸收体，其具有基本平行于第一表面的第一表面和第二表面; 电耦合到介电IR吸收体的第一表面的电极; 以及形成在介电IR吸收体的第二表面上的频率选择性表面等离子体（FSSP）结构。 FSSP结构被设计成选择性地发射入射在FSSP结构上的预定频带中的辐射，基本上与FSSP结构上的入射辐射的入射角无关。
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公开(公告)号：US20120064655A1
公开(公告)日：2012-03-15
申请号：US13134091
申请日：2011-05-27
申请人： Nathaniel R. Quick , Aravinda Kar
发明人： Nathaniel R. Quick , Aravinda Kar
CPC分类号： H01L21/268 , G01J5/08 , G01J5/0809 , G01J5/58 , G01K11/125 , H01L21/02678
摘要： An optical device and method is disclosed for forming the optical device within the wide-bandgap semiconductor substrate. The optical device is formed by directing a thermal energy beam onto a selected portion of the wide-bandgap semiconductor substrate for changing an optical property of the selected portion to form the optical device in the wide-bandgap semiconductor substrate. The thermal energy beam defines the optical and physical properties of the optical device. The optical device may take the form of an electro-optical device with the addition of electrodes located on the wide-bandgap semiconductor substrate in proximity to the optical device for changing the optical property of the optical device upon a change of a voltage applied to the optional electrodes. The invention is also incorporated into a method of using the optical device for remotely sensing temperature, pressure and/or chemical composition.
摘要翻译： 公开了用于在宽带隙半导体衬底内形成光学器件的光学器件和方法。 通过将热能束引导到宽带隙半导体衬底的选定部分上以改变所选部分的光学特性以形成宽带隙半导体衬底中的光学器件而形成光学器件。 热能束限定光学装置的光学和物理性质。 光学装置可以采用电光装置的形式，其中添加位于宽带隙半导体衬底上的电极附近的光学装置，用于在施加到所述光学装置的电压变化时改变光学装置的光学特性 可选电极 本发明还包括在使用该光学装置用于远程感测温度，压力和/或化学成分的方法中。
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10.发明申请公开(公告)号：US20110084199A1
公开(公告)日：2011-04-14
申请号：US12900030
申请日：2010-10-07
申请人： Hyeon Bong PYO
发明人： Hyeon Bong PYO
CPC分类号： G01J5/58 , G01J1/58 , G01J3/44 , G01N21/554 , G01N21/658 , G01N21/77 , G01N2021/6441
摘要： An optical sensor includes: a nano-spacer a length of which is reversibly varied depending on an external stimuli; a first material body coupled to one side of the nano-spacer; a second material body coupled to the other side of the nano-spacer; and a detection unit detecting light emitted by an interaction between the first material body and the second material body.
摘要翻译： 光学传感器包括：纳米间隔物，其长度根据外部刺激而可逆地变化; 耦合到所述纳米间隔物的一侧的第一材料体; 耦合到所述纳米间隔物的另一侧的第二材料体; 以及检测单元，其检测由所述第一材料体和所述第二材料体之间的相互作用发射的光。
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