SUBSTRATE PROCESSING DEVICE AND METHOD FOR MEASURING PROCESS GAS TEMPERATURE AND CONCENTRATION

    公开(公告)号:US20240241042A1

    公开(公告)日:2024-07-18

    申请号:US18558822

    申请日:2022-04-28

    发明人: Yuji OBATA

    IPC分类号: G01N21/31 G01K11/12

    摘要: Provided is a technique for using laser light to measure a temperature and concentration of a processing gas supplied to a processing space where a substrate processing is performed. A processing gas supply provided in an apparatus for processing a substrate supplies the processing gas to the processing space, and a light emitter emits laser light, having wavelengths that change within different wavelength ranges, to the processing space where the processing gas is supplied. A light receiver receives the laser light that has passed through the processing space, a temperature calculator calculates the temperature of the processing gas based on an absorption spectrum of laser light within each wavelength range, and a concentration calculator calculates the concentration of the processing gas based on an absorbance of laser light having a specific wavelength within the wavelength ranges.

    Method and System for Providing a Thermochromatic Indication of a Temperature Condition in a Vessel through Convection

    公开(公告)号:US20240027283A1

    公开(公告)日:2024-01-25

    申请号:US18237808

    申请日:2023-08-24

    IPC分类号: G01K11/12 B65D43/02 B65D51/24

    摘要: A thermochromatic label system with a vessel, a lid with a lid surface, a thermochromatic label, and a protuberating, preconfigured label retention structure within the lid surface for retaining the thermochromatic label. When applied to the label retention structure, the thermochromatic label indicates a temperature condition of vessel contents through convective heat transfer. The label has a facestock with one or more thermochromatic images. Plural labels can be retained on a release liner, and a removable adhesive permit selective application and removal of the label. The thermochromatic label and the label retention structure can be contoured with corresponding three-dimensional shapes. The three-dimensional shapes could be liquid tight, conical shapes, each with a lower portion, a mid-portion, and a peak portion, and first, second, and third thermochromatic images can be disposed on the respective portions of the facestock.

    Thermo-physical property measurement instrument and thermo-physical property measurement method

    公开(公告)号:US11867567B2

    公开(公告)日:2024-01-09

    申请号:US17596800

    申请日:2019-12-04

    IPC分类号: G01K11/12 G01N25/18

    CPC分类号: G01K11/12 G01N25/18

    摘要: In a thermo-physical property measurement instrument, a light shield that shields from light except for an aperture is provided facing the front surface of a sample thin film of a sample. Heating light of repeated pulse that is output from a heating laser irradiates the sample thin film through the light shield. Temperature measurement light of continuous light that is output from a temperature measurement laser is applied to a measurement position a predetermined distance away from a heating light irradiation position on the sample thin film. A photodetector detects reflected light of the temperature measurement light off the sample thin film, and a computer acquires a thermo-reflectance signal that was digitally converted by an AD converter. The computer calculates a thermo-physical property value in the in-plane direction of the sample thin film of the sample on the basis of the acquired thermo-reflectance signal.

    UV cured indicating devices
    6.
    发明授权

    公开(公告)号:US11828660B2

    公开(公告)日:2023-11-28

    申请号:US15573831

    申请日:2016-05-10

    摘要: This invention relates to thin indicating devices, such as time-temperature indicators and a method of making by applying and UV curing one or more layers of indicating composition are disclosed. For example, an indicator layer is applied on substrate and cured with UV light, immediately followed by an application of an activator layer which is cured by UV light. The device can have other layers, such as a permeable barrier between the activator and indicator layer and a top protective layers which are also UV cured. This fast curing method prevents premature reactions, e.g., diffusion of activator into indicator layer and vice versa during manufacturing.

    Monitoring system
    7.
    发明授权

    公开(公告)号:US11821583B2

    公开(公告)日:2023-11-21

    申请号:US17069993

    申请日:2020-10-14

    发明人: Tsutomu Katsura

    摘要: A monitoring system is disclosed. The monitoring system comprises: a nozzle steam trap (3) including a supply portion (10) into which water vapor is supplied, and a discharge portion (11) which discharges liquid water contained in the water vapor; a temperature measurer (20) that measures a temperature of the discharge portion; a transmitter (24) that transmits temperature information containing the temperature measured by the temperature measurer; a receiver (7) that receives the temperature information; a determiner (8) that determines whether an abnormality is present in the nozzle steam trap based on the temperature information; and a notifier (9) that issues a notice when the determiner determines that the abnormality is present. A first discharge-side reference temperature lower than the boiling point of the water and a second discharge-side reference temperature higher than the boiling point of the water are set for the discharge portion. The determiner determines that the abnormality is present when the temperature of the discharge portion contained in the temperature information is lower than the first discharge-side reference temperature or higher than the second discharge-side reference temperature.

    TEMPERATURE INDICATOR
    8.
    发明公开

    公开(公告)号:US20230366751A1

    公开(公告)日:2023-11-16

    申请号:US18315624

    申请日:2023-05-11

    申请人: ShockWatch, Inc

    IPC分类号: G01K11/06 G01K11/12 G06K19/06

    摘要: A temperature indicator includes a transparent substrate with a first code and a second code disposed on a first side of the transparent substrate. The first code comprises a first color and the second code comprises a second color different than the first color. An absorbent medium is disposed on a second side of the transparent substrate opposite the first side and comprises a third color that contrasts with only the second color of the first and second colors. A substance is disposed between the absorbent medium and the transparent substrate. The substance comprises a fourth color that contrasts with only the first color of the first and second colors and is meltable and absorbed by the absorbent medium in response to a temperature exceeding a temperature threshold.