Method of inspecting synthetic silicia glass molded body
    3.
    发明授权
    Method of inspecting synthetic silicia glass molded body 有权
    检查合成石英玻璃成型体的方法

    公开(公告)号:US08679994B2

    公开(公告)日:2014-03-25

    申请号:US13961499

    申请日:2013-08-07

    申请人: Nikon Corporation

    IPC分类号: C03C3/06 G01N23/00

    摘要: A method of inspecting a synthetic silica glass molded body includes: irradiating the synthetic silica glass molded body with a spectrum line of an Hg lamp having a wavelength of 248 nm; measuring light emitted by the synthetic silica glass molded body; and a procedure which may include screening a portion which satisfies a condition that a ratio of the bright line intensity and the fluorescent light intensity is of a certain value or less, or which may include determining whether a condition that a ratio of a minimum value and a maximum value of a measured fluorescent light intensity is in a certain range is satisfied or not.

    摘要翻译: 合成石英玻璃成型体的检查方法包括:用波长248nm的Hg灯的光谱线照射合成石英玻璃成型体; 测量由合成石英玻璃成型体发出的光; 以及可以包括筛选满足亮线强度和荧光强度的比例为一定值以下的条件的部分的处理,或者可以包括确定最小值和 测量的荧光强度的最大值在一定范围内是否满足。