发明授权
- 专利标题: Method of inspecting synthetic silicia glass molded body
- 专利标题(中): 检查合成石英玻璃成型体的方法
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申请号: US13961499申请日: 2013-08-07
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公开(公告)号: US08679994B2公开(公告)日: 2014-03-25
- 发明人: Masafumi Mizuguchi
- 申请人: Nikon Corporation
- 申请人地址: JP Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2005-056108 20050301
- 主分类号: C03C3/06
- IPC分类号: C03C3/06 ; G01N23/00
摘要:
A method of inspecting a synthetic silica glass molded body includes: irradiating the synthetic silica glass molded body with a spectrum line of an Hg lamp having a wavelength of 248 nm; measuring light emitted by the synthetic silica glass molded body; and a procedure which may include screening a portion which satisfies a condition that a ratio of the bright line intensity and the fluorescent light intensity is of a certain value or less, or which may include determining whether a condition that a ratio of a minimum value and a maximum value of a measured fluorescent light intensity is in a certain range is satisfied or not.
公开/授权文献
- US20130320219A1 METHOD OF INSPECTING SYNTHETIC SILICIA GLASS MOLDED BODY 公开/授权日:2013-12-05
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