发明授权
US08679994B2 Method of inspecting synthetic silicia glass molded body 有权
检查合成石英玻璃成型体的方法

  • 专利标题: Method of inspecting synthetic silicia glass molded body
  • 专利标题(中): 检查合成石英玻璃成型体的方法
  • 申请号: US13961499
    申请日: 2013-08-07
  • 公开(公告)号: US08679994B2
    公开(公告)日: 2014-03-25
  • 发明人: Masafumi Mizuguchi
  • 申请人: Nikon Corporation
  • 申请人地址: JP Tokyo
  • 专利权人: Nikon Corporation
  • 当前专利权人: Nikon Corporation
  • 当前专利权人地址: JP Tokyo
  • 优先权: JP2005-056108 20050301
  • 主分类号: C03C3/06
  • IPC分类号: C03C3/06 G01N23/00
Method of inspecting synthetic silicia glass molded body
摘要:
A method of inspecting a synthetic silica glass molded body includes: irradiating the synthetic silica glass molded body with a spectrum line of an Hg lamp having a wavelength of 248 nm; measuring light emitted by the synthetic silica glass molded body; and a procedure which may include screening a portion which satisfies a condition that a ratio of the bright line intensity and the fluorescent light intensity is of a certain value or less, or which may include determining whether a condition that a ratio of a minimum value and a maximum value of a measured fluorescent light intensity is in a certain range is satisfied or not.
公开/授权文献
信息查询
0/0