STAMPER AND METHOD OF MANUFACTURING BIT PATTERNED MEDIUM USING STAMPER
    7.
    发明申请
    STAMPER AND METHOD OF MANUFACTURING BIT PATTERNED MEDIUM USING STAMPER 有权
    使用冲压器制造位图形图案的冲压器和方法

    公开(公告)号:US20140374380A1

    公开(公告)日:2014-12-25

    申请号:US14167464

    申请日:2014-01-29

    Abstract: A stamper of an embodiment includes: a base portion having a main surface; and a plurality of guides arranged on the main surface in mutually different first and second directions and serving as references of arrangement of a plurality of self-assembled dots. A distance between the guides in a third direction is within a range of an integer m1±0.05 times of a pitch of the plural self-assembled dots. The third direction corresponds to a third vector obtained by combining a first vector corresponding to the arrangement of the guides in the first direction and a second vector corresponding to the arrangement of the guides in the second direction. A distance between the plural guides in the first direction falls out of a range of an integer m2±0.15 times of the pitch of the plural self-assembled dots.

    Abstract translation: 实施例的压模包括:具有主表面的基部; 以及在相互不同的第一和第二方向上布置在主表面上的多个引导件,并且用作多个自组装点的布置的参考。 导向件之间的距离在第三方向上在多个自组装点的间距的整数m1±0.05倍的范围内。 第三方向对应于通过组合与第一方向上的引导件的布置相对应的第一矢量和对应于第二方向上的引导件的布置的第二矢量而获得的第三矢量。 第一方向上的多个引导件之间的距离落在多个自组装点的间距的整数m2±0.15倍的范围内。

    Stamper, method of forming a concave/convex pattern, and method of manufacturing an information recording medium
    9.
    发明授权
    Stamper, method of forming a concave/convex pattern, and method of manufacturing an information recording medium 失效
    压模,形成凹/凸图案的方法,以及信息记录介质的制造方法

    公开(公告)号:US07829267B2

    公开(公告)日:2010-11-09

    申请号:US11653918

    申请日:2007-01-17

    Abstract: A stamper is formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in a predetermined area of the stamper. The predetermined area corresponds to an area where pressure is likely to be concentrated when the concave/convex pattern of the stamper is used to form a concave/convex pattern on a substrate. A method of forming a concave/convex pattern uses such stamper, and a method of manufacturing an information recording medium uses a concave/convex pattern formed by such method.

    Abstract translation: 形成压模,使得在压模的预定区域中形成凹凸图案的凹凸图案形成表面与后表面之间的厚度逐渐减小。 当使用压模的凹凸图案在基板上形成凹凸图案时,预定区域对应于压力可能集中的区域。 形成凹凸图案的方法使用这种压模,并且制造信息记录介质的方法使用通过这种方法形成的凹凸图案。

Patent Agency Ranking