Invention Grant
- Patent Title: Stamper, method of forming a concave/convex pattern, and method of manufacturing an information recording medium
- Patent Title (中): 压模，形成凹/凸图案的方法，以及信息记录介质的制造方法
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Application No.: US11653918Application Date: 2007-01-17
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Publication No.: US07829267B2Publication Date: 2010-11-09
- Inventor: Minoru Fujita , Mikiharu Hibi
- Applicant: Minoru Fujita , Mikiharu Hibi
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2006-009377 20060118
- Main IPC: B29D17/00
- IPC: B29D17/00 ; G03C5/00
Abstract:
A stamper is formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in a predetermined area of the stamper. The predetermined area corresponds to an area where pressure is likely to be concentrated when the concave/convex pattern of the stamper is used to form a concave/convex pattern on a substrate. A method of forming a concave/convex pattern uses such stamper, and a method of manufacturing an information recording medium uses a concave/convex pattern formed by such method.
Public/Granted literature
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