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1.发明授权Electron energy filter and transmission electron microscope provided with the same 失效电子能量滤波器和透射电子显微镜一样提供
公开(公告)号：US5585630A
公开(公告)日：1996-12-17
申请号：US502718
申请日：1995-07-14
申请人： Yoshifumi Taniguchi , Shunroku Taya
发明人： Yoshifumi Taniguchi , Shunroku Taya
CPC分类号： H01J49/46 , H01J37/05 , H01J2237/055 , H01J2237/057 , H01J2237/26
摘要： An electron energy filter is structured by superposing a pair of yokes having electron beam passage holes and pole pieces on each side facing each other so as that the pole pieces are positioned facing each other with a certain space in between, and the electron energy filter is mounted in a transmission electron microscope to obtain a stable elemental mapping image.
摘要翻译： 电子能量滤波器是通过在彼此面对的每一侧上叠加具有电子束通过孔和极片的一对轭来构成的，以使得极片彼此间隔一定的间隔相对定位，电子能量过滤器 安装在透射电子显微镜中以获得稳定的元素映射图像。
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公开(公告)号：US6150657A
公开(公告)日：2000-11-21
申请号：US138995
申请日：1998-08-25
申请人： Koji Kimoto , Yoshifumi Taniguchi , Shunroku Taya , Shigeto Isakozawa , Takashi Aoyama , Masakazu Saito , Tomoko Sekiguchi
发明人： Koji Kimoto , Yoshifumi Taniguchi , Shunroku Taya , Shigeto Isakozawa , Takashi Aoyama , Masakazu Saito , Tomoko Sekiguchi
CPC分类号： H01J49/44 , H01J37/05 , H01J2237/24485 , H01J2237/28
摘要： An energy filter has a plurality of deflection means and is constructed by using the plural deflection means so that an average track of an electron beam is symmetric and the normal line to a symmetric plane is inclined against an incident direction of the electron beam.
摘要翻译： 能量滤波器具有多个偏转装置，并且通过使用多个偏转装置来构造，使得电子束的平均轨迹对称，并且对称平面的法线相对于电子束的入射方向倾斜。
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公开(公告)号：US6066852A
公开(公告)日：2000-05-23
申请号：US765914
申请日：1997-01-14
申请人： Shunroku Taya , Yoshifumi Taniguchi
发明人： Shunroku Taya , Yoshifumi Taniguchi
CPC分类号： H01J37/05 , H01J49/44 , H01J49/46 , H01J49/48 , H01J2237/055 , H01J2237/057 , H01J2237/2802
摘要： An electron energy filter includes a first pair of magnetic poles for generating a first deflecting magnetic field and a second pair of magnetic poles for generating a second deflecting magnetic field in the same direction as the first deflecting magnetic field. The incident electrons are deflected about 90.degree. with a trace radius of AM1 through the effect of the first deflecting magnetic field, passed through a free space having a distance DL2 that is about a half of the trace radius AM1 and then are incident to the second deflecting magnetic field. The electrons are deflected about 180.degree. with a trace radius AM2 that is about a half of the curvature radius AM1 and are passed through the free space DL2. Then, the electrons are incident to the first deflecting magnetic field again where those electrons are deflected about 90.degree.. The deflected electrons are traveled like a gamma trace so that those electrons outgo in the same direction as the incident one. This filter so designed is made compact and to have a smaller aberration.
摘要翻译： PCT No.PCT / JP95 / 01401 Sec。 371日期1997年1月14日 102（e）日期1997年1月14日PCT提交1995年7月14日PCT公布。 出版物WO96 / 02935 日期1996年2月1日电子能量过滤器包括用于产生第一偏转磁场的第一对磁极和用于在与第一偏转磁场相同的方向上产生第二偏转磁场的第二对磁极。 入射的电子通过第一偏转磁场的作用，通过具有距离DL2的自由空间大约为轨迹半径AM1的一半的偏移约90°，轨迹半径为AM1，然后入射到第二偏转磁场 偏转磁场。 电子以约为曲率半径AM1的一半的轨迹半径AM2偏转180°左右，并通过自由空间DL2。 然后，电子再次入射到第一偏转磁场，这些电子偏转约90°。 偏转的电子像伽马射线一样行进，使得那些电子在与入射的电子方向相同的方向上排出。 这样设计的过滤器是紧凑的并且具有较小的像差。
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公开(公告)号：US08263936B2
公开(公告)日：2012-09-11
申请号：US12414883
申请日：2009-03-31
申请人： Shohei Terada , Yoshifumi Taniguchi
发明人： Shohei Terada , Yoshifumi Taniguchi
CPC分类号： G01N23/04 , G01N2223/102 , G01N2223/3037
摘要： A transmission electron microscope is capable of correcting, with high efficiency and high accuracy, an electron energy loss spectrum extracted from each of measured portions included in an electron energy loss spectral image with two axes representing the amount of an energy loss and positional information on a measured portion. The transmission electron microscope has an electron spectroscope and a spectrum correction system. The spectrum correction system corrects a spectrum extracted from each measured portion included in an electron energy loss spectral image acquired from a sample based on a difference between a spectrum extracted from a standard portion of a standard spectral image and a spectrum extracted from a portion different from the standard portion.
摘要翻译： 透射电子显微镜能够以高效率和高精度校正从包含在电子能量损失光谱图像中的每个测量部分提取的电子能量损失谱，其中两个轴表示能量损失量和位置信息 测量部分。 透射电子显微镜具有电子分光镜和光谱校正系统。 频谱校正系统基于从标准光谱图像的标准部分提取的光谱与从不同于标准光谱图像的部分提取的光谱之间的差异，从包含在从样本获取的电子能量损失光谱图像中的每个测量部分中提取的光谱 标准部分。
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公开(公告)号：US07723682B2
公开(公告)日：2010-05-25
申请号：US12024357
申请日：2008-02-01
申请人： Shohei Terada , Yoshifumi Taniguchi
发明人： Shohei Terada , Yoshifumi Taniguchi
CPC分类号： H01J37/05 , H01J37/09 , H01J37/244 , H01J37/26 , H01J37/265 , H01J2237/0453 , H01J2237/057 , H01J2237/24455 , H01J2237/2446 , H01J2237/24485 , H01J2237/2802
摘要： In order to correct measurement magnification and measurement position of a spectral image with high efficiency and with high accuracy using an electronic spectroscope and a transmission electron microscope regarding the spectral image formed in two orthogonal axes which are an amount of energy loss axis and a measurement position information axis; a method for correcting magnification and position and a system for correcting magnification and position, both of which are capable of correcting measurement magnification and measurement position of a spectral image with high efficiency and with high accuracy using an electronic spectroscope and a transmission electron microscope regarding the spectral image formed in two orthogonal axes which are an amount of energy loss axis and a measurement position information axis, are provided.
摘要翻译： 为了使用电子分光镜和透射电子显微镜，以能量损失轴和测量位置的两个正交轴形成的光谱图像，以高效率和高精度校正光谱图像的测量倍率和测量位置 信息轴; 用于校正放大率和位置的方法以及用于校正倍率和位置的系统，它们都能够使用电子分光镜和透射电子显微镜来高效率和高精度地校正光谱图像的测量倍率和测量位置 提供了在作为能量损失轴的量和测量位置信息轴的两个正交轴上形成的光谱图像。
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公开(公告)号：US06855927B2
公开(公告)日：2005-02-15
申请号：US10435050
申请日：2003-05-12
CPC分类号： G01N23/02
摘要： There are provided an element distribution observing method and an element distribution observing apparatus under utilization of core-loss electrons capable of restricting artifact caused by either a thickness or density of a specimen, or an occurrence of the artifact caused by a diffraction contrast. Electron beam intensities in a total three different energy-loss areas of two energy-loss areas not containing any core-loss electrons and one energy-loss area are calculated to attain an element distribution on the basis of the corresponding three energy-loss areas and an electron beam intensity.
摘要翻译： 提供了一种利用能够限制由样本的厚度或密度引起的伪影的核心损耗电子的元素分布观察方法和元件分布观察装置，或由衍射对比度引起的伪影的发生。 计算两个能量损失区域的三个不同能量损失区域中不含任何铁损损失电子和一个能量损失面积的电子束强度，以根据相应的三个能量损失面积获得元素分布， 电子束强度。
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公开(公告)号：US20110240854A1
公开(公告)日：2011-10-06
申请号：US13133653
申请日：2009-11-11
IPC分类号： G01N23/00 , H01J37/153
CPC分类号： H01J37/05 , H01J37/153 , H01J37/244 , H01J2237/2446
摘要： In a spectral image formed by two orthogonal axes, one of which is an axis of the amount of energy loss and the other of which is an axis of positional information, by the use of an electron spectrometer and a transmission electron microscope, distortion in the spectral image of a sample to be analyzed is corrected with high efficiency and high accuracy by comparing electron beam positions calculated from a two-dimensional electron beam position image formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information) with reference electron beam positions, and calculating amounts of the distortion based on the differences of the electron beam positions. Method and apparatus are offered which correct distortion in a spectral image with high efficiency and high accuracy, the image being formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information).
摘要翻译： 在由两个正交轴形成的光谱图像中，其中一个是能量损失量的轴，另一个是位置信息的轴，通过使用电子光谱仪和透射电子显微镜，在 通过比较从由两个正交轴形成的二维电子束位置图像计算的电子束位置（能量损失量的轴和能量损失的轴线），以高效率和高精度来校正要分析的样本的光谱图像 位置信息），以及基于电子束位置的差异计算失真量。 提供了以高效率和高精度校正光谱图像失真的方法和装置，该图像由两个正交轴（能量损失量的轴和位置信息的轴）形成。
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公开(公告)号：US07381968B2
公开(公告)日：2008-06-03
申请号：US11105584
申请日：2005-04-14
CPC分类号： H01J37/20 , H01J2237/2001 , H01J2237/20292 , H01J2237/208
摘要： Information of a specimen holder or information of a specimen mounted on the specimen holder is stored in a memory inside the specimen holder mounted to an electron microscope. The memory is accessed to transmit the information of the specimen holder to the electron microscope, thereby ensuring that the user can use the specimen holder without mistaking characteristics of the specimen holder and danger of erroneous recording of the specimen information can be reduced.
摘要翻译： 样本架的信息或安装在样本架上的样本的信息被存储在安装到电子显微镜上的样本保持器内的存储器中。 访问存储器以将样本保持器的信息传送到电子显微镜，从而确保用户可以使用样本架而不会使样本架的特性错误，并且可以减少样本信息的错误记录的危险。
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9.发明授权公开(公告)号：US07235784B2
公开(公告)日：2007-06-26
申请号：US11245428
申请日：2005-10-07
CPC分类号： H01J37/26 , H01J37/224 , H01J37/265 , H01J2237/0216 , H01J2237/2025 , H01J2237/20292
摘要： Drift generated at the time of photographing a TEM image is corrected simultaneously with photographing, so that a TEM image free form influence of drift is photographed. While the TEM image is recorded, drift in the place out of the view field subjected to recording is measured from moment to moment by another TV camera or a position sensitive detector. Drift is corrected by the movement of the specimen due to a specimen holder or by the movement of the image due to an image shift coil.
摘要翻译： 在拍摄TEM图像时产生的漂移与拍摄同时被校正，从而拍摄TEM图像自由形成的漂移影响。 在记录TEM图像的同时，通过另一台电视摄像机或位置敏感探测器随时测量被记录的视场外的位置的漂移。 漂移由于样品夹持器的移动或由于图像移动线圈的图像的运动而被校正。
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公开(公告)号：US07022988B2
公开(公告)日：2006-04-04
申请号：US10467303
申请日：2001-02-28
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , G01L1/241 , G01L5/0047 , G01N23/20 , G01N23/20058 , G01N23/2251 , H01J37/2955 , H01J2237/24585 , H01J2237/2544 , H01J2237/2813 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A method and apparatus for measuring the physical properties of a micro region measures the two-dimensional distribution of stress/strain in real time at high resolution and sensitivity and with a high level of measuring position matching. A sample is scanned and irradiated with a finely focused electron beam (23, 26), and the displacement of position of a diffraction spot (32, 33) is measured by a two-dimensional position-sensitive electron detector (13). The displacement amount is outputted as a voltage value that is then converted into the magnitude of the stress/strain according to the principle of a nano diffraction method, and the magnitude is displayed in synchronism with a sample position signal.
摘要翻译： 用于测量微区物理特性的方法和装置以高分辨率和灵敏度实时测量应力/应变的二维分布以及高水平的测量位置匹配。 扫描样品并用精细聚焦的电子束（23,26）照射，并且通过二维位置敏感电子检测器（13）测量衍射光斑（32,33）的位置位移。 将位移量作为电压值输出，然后根据纳米衍射方法的原理将其转换为应力/应变的大小，并且与样本位置信号同步地显示幅度。
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