Invention Grant
- Patent Title: Charged particle beam apparatus and specimen holder
- Patent Title (中): 带电粒子束装置和试样架
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Application No.: US11105584Application Date: 2005-04-14
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Publication No.: US07381968B2Publication Date: 2008-06-03
- Inventor: Hiroyuki Tanaka , Mitsugu Sato , Masashi Sasaki , Yoshifumi Taniguchi
- Applicant: Hiroyuki Tanaka , Mitsugu Sato , Masashi Sasaki , Yoshifumi Taniguchi
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2004-122094 20040416
- Main IPC: G21K5/10
- IPC: G21K5/10 ; G21K5/08

Abstract:
Information of a specimen holder or information of a specimen mounted on the specimen holder is stored in a memory inside the specimen holder mounted to an electron microscope. The memory is accessed to transmit the information of the specimen holder to the electron microscope, thereby ensuring that the user can use the specimen holder without mistaking characteristics of the specimen holder and danger of erroneous recording of the specimen information can be reduced.
Public/Granted literature
- US20050230636A1 Charged particle beam apparatus and specimen holder Public/Granted day:2005-10-20
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