Invention Grant
US07381968B2 Charged particle beam apparatus and specimen holder 失效
带电粒子束装置和试样架

Charged particle beam apparatus and specimen holder
Abstract:
Information of a specimen holder or information of a specimen mounted on the specimen holder is stored in a memory inside the specimen holder mounted to an electron microscope. The memory is accessed to transmit the information of the specimen holder to the electron microscope, thereby ensuring that the user can use the specimen holder without mistaking characteristics of the specimen holder and danger of erroneous recording of the specimen information can be reduced.
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