公开(公告)号：US10115416B2

公开(公告)日：2018-10-30

申请号：US15652629

申请日：2017-07-18

Applicant: WESTERN DIGITAL (FREMONT), LLC

Inventor： Feng Liu ,  Zhigang Bai ,  Peng Luo ,  Jinqiu Zhang ,  Ming Sun ,  Xiaoyu Yang ,  Yifan Zhang ,  Xiaojun Zhang ,  Ming Jiang

IPC: G11B5/31 ,  G11B5/127 ,  G11B5/21 ,  G11B5/147

Abstract: A magnetic write apparatus has a media-facing surface (MFS) and includes an auxiliary pole, coil(s) and a main pole having a pole tip and a yoke. The pole tip occupies part of the MFS. The yoke has a yoke length measured from the MFS in a yoke direction perpendicular to the MFS. The yoke length is less than four microns. The main pole has a total length in the yoke direction and a width in a cross-track direction. The main pole is continuous along the total length. The aspect ratio of the main pole is the total length divided by the width and exceeds one. The main pole includes surface(s) having a nonzero acute flare angle from the MFS. The auxiliary pole is adjacent to the main pole and recessed from the MFS by not more than 1.05 micron. The coil(s) energizes the main pole and have not more than two turns.

公开(公告)号：US09940951B2

公开(公告)日：2018-04-10

申请号：US15053211

申请日：2016-02-25

Applicant: Western Digital (Fremont), LLC

Inventor： Jinqiu Zhang ,  Feng Liu ,  Xiaoyu Yang ,  Ming Jiang ,  Xiaotian Zhou ,  Zeyu Ma ,  Hai Sun

IPC: G11B5/235 ,  G11B5/11 ,  G11B5/127 ,  G11B5/23 ,  G11B5/187 ,  G11B5/10 ,  G11B5/60 ,  H01L21/027 ,  H01L21/3213 ,  G11B5/147 ,  G11B5/31

CPC classification number: G11B5/1278 ,  G11B5/10 ,  G11B5/11 ,  G11B5/112 ,  G11B5/147 ,  G11B5/187 ,  G11B5/1878 ,  G11B5/232 ,  G11B5/235 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/6082 ,  H01L21/0272 ,  H01L21/32134 ,  H01L21/32139 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49043

Abstract: A perpendicular magnetic recording (PMR) writer is configured to magnetically record data on a rotatable disk surface. The PMR writer including a pole tip, side shields, an air-bearing surface (ABS) region, a yoke region comprising Silicon Dioxide (SiO2), side gaps and a plurality of throat regions. The side gaps are arranged respectively between the pole tip and the side shields and include SiO2. A side gap width of the plurality of throat regions increases with a side shield throat height above the ABS region for each of the throat regions. The side gap width has a different width variation in each of the throat regions.

公开(公告)号：US09741366B1

公开(公告)日：2017-08-22

申请号：US14871553

申请日：2015-09-30

Applicant: Western Digital (Fremont), LLC

Inventor： Jinqiu Zhang ,  Feng Liu ,  Ming Sun ,  Yunfei Li ,  Ming Jiang ,  Xiaojun Zhang

IPC: G11B5/127 ,  G11B5/187 ,  G11B5/31

CPC classification number: G11B5/1272 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/187 ,  G11B5/23 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163

Abstract: A method provides a magnetic transducer having a media-facing surface (MFS). The method includes providing a pole, providing a side gap, providing coil(s) for energizing the pole and providing side shield(s). A portion of the pole resides at the MFS. The side gap is between the pole and the side shield(s). The side shield(s) have a gradient in a saturation magnetization such that the saturation magnetization increases in a yoke direction perpendicular to the MFS. The step of providing the side shield(s) further includes providing a nonmagnetic structure having a side surface parallel to the MFS and providing at least one side shield layer. A portion of the side shield layer(s) are on the side surface. The portion of the side shield layer(s) has the gradient in the saturation magnetization. At least part of the side shield being formed by the portion of the side shield layer(s).

公开(公告)号：US09711168B1

公开(公告)日：2017-07-18

申请号：US15156877

申请日：2016-05-17

Applicant: Western Digital (Fremont), LLC

Inventor： Xiaoyu Yang ,  Jinqiu Zhang ,  Feng Liu ,  Xiaotian Zhou ,  Hai Sun ,  Ming Jiang

IPC: G11B5/187 ,  G11B5/11

CPC classification number: G11B5/187 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315

Abstract: A method provides magnetic write apparatus. A side shield location layer having a location corresponding to the side shield(s) and back and side surfaces is provided. Part of the back surface corresponds to the back surface of the side shield. A nonmagnetic layer adjoining the back and side surface(s) of the side shield location layer is provided. A pole trench is formed in the layers using a first etch process. The nonmagnetic and side shield location layers have an etch selectivity of at least 0.9 and not more than 1.1 for the first etch. A pole is provided in the pole trench. A remaining portion of the side shield location layer is removed using a wet etch. The nonmagnetic layer is nonremovable by the wet etch. Side shield(s) having a back surface substantially the same as the back surface of the side shield location layer are provided.

公开(公告)号：US09396743B1

公开(公告)日：2016-07-19

申请号：US14308366

申请日：2014-06-18

Applicant: Western Digital (Fremont), LLC

Inventor： Yi Zheng ,  Ming Jiang ,  Anup G. Roy ,  Guanxiong Li ,  Ming Mao ,  Daniele Mauri

IPC: G11B5/39

CPC classification number: H01L43/12 ,  G01R33/098 ,  G11B5/3163 ,  G11B5/3906 ,  G11B5/3909 ,  G11B5/3932 ,  G11B5/398 ,  H01L43/02 ,  H01L43/08 ,  H01L43/10

Abstract: Systems and methods for controlling a thickness of a soft bias layer in a tunnel magnetoresistance (TMR) reader are provided. One such method involves providing a magnetoresistive sensor stack including a free layer and a bottom shield layer, performing contiguous junction milling on the sensor stack, depositing an insulating layer on the sensor stack, depositing a spacer layer on the insulating layer, performing an angled milling sub-process to remove preselected portions of the spacer layer, depositing a soft bias layer on the sensor stack, and depositing a top shield layer on the sensor stack and the soft bias layer. The method can further involve adjusting an alignment of a top surface of the spacer layer with respect to the free layer. In one such case, the top surface of the spacer layer is adjusted to be below the free layer.

Abstract translation: 提供了用于控制隧道磁阻（TMR）读取器中的软偏置层的厚度的系统和方法。 一种这样的方法包括提供包括自由层和底部屏蔽层的磁阻传感器堆叠，在传感器堆叠上执行连续接合铣削，在传感器堆叠上沉积绝缘层，在绝缘层上沉积间隔层，执行倾斜铣削 子过程以去除间隔层的预选部分，在传感器堆叠上沉积柔性偏置层，以及在传感器堆叠和柔性偏置层上沉积顶部屏蔽层。 该方法还可以包括相对于自由层调整间隔层的顶表面的对准。 在一种这样的情况下，间隔层的顶表面被调节到低于自由层。

公开(公告)号：US09349393B2

公开(公告)日：2016-05-24

申请号：US14847634

申请日：2015-09-08

Applicant: Western Digital (Fremont), LLC

Inventor： Yi Zheng ,  Ming Jiang

IPC: G11B5/127 ,  G11B5/23 ,  G11B5/115 ,  G11B5/60

CPC classification number: G11B5/23 ,  G11B5/115 ,  G11B5/1278 ,  G11B5/232 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/6082 ,  Y10T29/49044

Abstract: A method and system provide a magnetic transducer. An intermediate layer including multiple sublayers is provided. A trench is formed in the intermediate layer. A main pole having a bottom, a top wider than the bottom, a first side and a second side opposite to the first side is provided in the trench. An asymmetric gap is provided along the first and second sides of the main pole. The asymmetric gap terminates closer to the top of the main pole along the first side than on the second side. The asymmetric gap has a first thickness along the first side and a second thickness different from the first thickness along the second side. An asymmetric shield is provided on the asymmetric gap. The asymmetric shield includes a half side shield having a bottom between the top and the bottom of the main pole and terminating on the asymmetric gap.

Abstract translation: 一种方法和系统提供一种磁换能器。 提供包括多个子层的中间层。 在中间层中形成沟槽。 在沟槽中设置有具有底部，比底部宽的顶部，与第一侧相对的第一侧和第二侧的主极。 沿着主极的第一和第二侧设置非对称间隙。 非对称间隙沿着第一侧比在第二侧更靠近主极的顶部。 非对称间隙具有沿着第一侧的第一厚度和沿着第二侧不同于第一厚度的第二厚度。 在非对称间隙上提供非对称屏蔽。 不对称屏蔽包括半侧屏蔽，其具有在主极的顶部和底部之间的底部，并终止在不对称间隙上。

公开(公告)号：US09196283B1

公开(公告)日：2015-11-24

申请号：US13801408

申请日：2013-03-13

Applicant: Western Digital (Fremont), LLC

Inventor： Masahiro Osugi ,  Lily Yao ,  Ming Jiang ,  Guanghong Luo ,  Wai-Ming J. Kan

IPC: G11B5/127 ,  H04R31/00 ,  G11B5/84

CPC classification number: G11B5/127 ,  G11B5/3163 ,  G11B5/3909 ,  G11B5/84 ,  G11B5/8404 ,  Y10T428/24149

Abstract: A method for fabricating a magnetic recording transducer is described. The magnetic recording transducer has an underlayer and at least one layer on the underlayer. The layer(s) are capable of including an aperture that exposes a portion of the underlayer. The method includes providing a neutralized aqueous solution having a chemical buffer therein. The chemical buffer forms a nonionic full film corrosion inhibitor. The method also includes exposing a portion of the magnetic recording transducer including the layer(s) to the neutralized aqueous solution including the chemical buffer. In one aspect this exposure occurs through a chemical mechanical planarization.

Abstract translation: 描述了制造磁记录换能器的方法。 磁记录传感器具有底层和底层上的至少一层。 该层能够包括暴露底层的一部分的孔。 该方法包括提供其中具有化学缓冲液的中和的水溶液。 化学缓冲液形成非离子全膜腐蚀抑制剂。 该方法还包括将包括该层的磁记录换能器的一部分暴露于包含化学缓冲液的中和的水溶液中。 在一个方面，该曝光通过化学机械平面化发生。

公开(公告)号：US09082426B1

公开(公告)日：2015-07-14

申请号：US13719809

申请日：2012-12-19

Applicant: Western Digital (Fremont), LLC

Inventor： Yan Chen ,  Donghong Li ,  Ronghui Zhou ,  Lien-Chang Wang ,  Lily Yao ,  Ming Jiang

IPC: H04R31/00 ,  G11B5/127 ,  G11B5/31 ,  B24B49/10 ,  G11B5/39 ,  B24B37/04

CPC classification number: G11B5/127 ,  B24B37/013 ,  B24B37/04 ,  B24B49/10 ,  G11B5/1278 ,  G11B5/31 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/3169 ,  G11B5/39 ,  H04R31/00 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

Abstract: Methods for manufacturing electronic lapping guides (ELGs) for writer heads that closely track the pole formation of the writer heads are provided. Once such method includes forming an ELG adjacent to a writer head that is subjected to substantially all of the sub-processing actions associated with the pole formation of the writer head, lapping the pole material, measuring a resistance of the ELG during the lapping, comparing the measured resistance with a target resistance, and terminating the lapping based on the comparison of the measured resistance with the target resistance.

Abstract translation: 提供了用于制造紧密跟踪写入头的极点形成的写入头的电子研磨导轨（ELG）的方法。 一旦这样的方法包括形成与写入器头相邻的ELG，其经受与写入头的极点形成相关联的基本上所有的子处理动作，研磨极材料，在研磨期间测量ELG的电阻， 测量的电阻与目标电阻，并且基于测量的电阻与目标电阻的比较来终止研磨。

公开(公告)号：US09934794B1

公开(公告)日：2018-04-03

申请号：US15019062

申请日：2016-02-09

Applicant: Western Digital (Fremont), LLC

Inventor： Ran Lin ,  Ming Sun ,  El-Amine Salhi ,  Donghong Li ,  Yunfei Li ,  Ming Jiang

IPC: G11B5/31 ,  G11B5/17 ,  G11B5/60

CPC classification number: G11B5/3116 ,  G11B5/17 ,  G11B5/6005

Abstract: A magnetic apparatus has a media-facing surface (MFS), a pole, a write gap at the MFS, a trailing shield, coil(s) and a nonmagnetic refill material. The pole includes a pole tip proximate to the MFS. The trailing shield includes a pedestal and a recessed portion. The pedestal occupies a portion of the MFS. The recessed portion has a front surface at an acute angle from the MFS and is recessed from the MFS by a distance of not more than 0.8 micrometers. The write gap is between the pedestal and the pole tip. The coil(s) energize the pole and have at least one turn. The coil(s) are between the recessed portion of the trailing shield and the pole. The trailing shield is between the nonmagnetic refill material and the pole. A portion of the nonmagnetic refill material is between the recessed portion and the MFS.

公开(公告)号：US09368134B1

公开(公告)日：2016-06-14

申请号：US13769951

申请日：2013-02-19

Applicant: Western Digital (Fremont), LLC

Inventor： Ming Sun ,  Dehua Han ,  Jose A. Medina ,  Ming Jiang ,  Ying Hong ,  Feng Liu ,  Jian X. Shen

IPC: G11B5/187

CPC classification number: G11B5/187 ,  G11B5/3116 ,  G11B5/3163

Abstract: A method and system for fabricating a magnetic transducer are described. The magnetic transducer includes a pole and a nonmagnetic intermediate layer adjacent to the pole. The pole has a paddle and a pole tip including a plurality of sidewalls. The pole includes a first magnetic pole layer, at least one antiferromagnetic coupling (AFC) structure on the first magnetic pole layer, and a second magnetic pole layer on the AFC structure(s). At least a portion of the first magnetic pole layer resides on the sidewalls of the pole tip. The paddle has a paddle width in a track width direction. The pole tip has a pole tip width in a track width direction that is less than the paddle width.