公开(公告)号：US09053735B1

公开(公告)日：2015-06-09

申请号：US14310360

申请日：2014-06-20

申请人： Western Digital (Fremont), LLC

发明人： Ronghui Zhou ,  Lily Yao ,  Masahiro Osugi ,  Degang Cheng ,  Ming Jiang

IPC分类号： B44C1/22 ,  G11B5/84 ,  G11B5/31

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/8404

摘要： A method fabricates a magnetic transducer having air-bearing surface (ABS) location and an intermediate layer having a trench therein. The trench has a shape and location corresponding to a main pole. The method includes depositing at least one main pole layer. A portion of the main pole layer(s) is in the trench. A refill layer is provided on the main pole layer(s). The main pole layer(s) may not be patterned after being provided and before the refill layer is provided. At least the refill layer is planarized. A full-film metal planarization is performed for at least one of the refill layer and the at least one main pole layer. The full-film metal planarization may include a bulk ion mill and/or ion beam scan.

摘要翻译： 一种制造具有空气轴承表面（ABS）位置的磁换能器和在其中具有沟槽的中间层的方法。 沟槽具有对应于主极的形状和位置。 该方法包括沉积至少一个主极层。 主极层的一部分在沟槽中。 在主极层上设置补充层。 主极层在提供之后并且在提供补充层之前可能不被图案化。 至少填充层被平坦化。 对补充层和至少一个主极层中的至少一个进行全膜金属平坦化。 全膜金属平面化可以包括体离子磨和/或离子束扫描。

公开(公告)号：US09318130B1

公开(公告)日：2016-04-19

申请号：US13963328

申请日：2013-08-09

申请人： Western Digital (Fremont), LLC

发明人： Wei Gao ,  Guanghong Luo ,  Lily Yao ,  Ming Mao ,  Ming Jiang

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/3909 ,  G11B5/398 ,  Y10T29/49032 ,  Y10T29/49046 ,  Y10T29/49052

摘要： A method of fabricating a magnetic device includes forming a sensor having a pinned layer and a free layer. A first reactive ion etch of a sensor stack patterns a hard mask layer with a photoresist image to form a first hard mask. Then a second reactive ion etch is performed to form an extended pinned layer. The method also includes depositing an insulating layer after the second reactive ion etch to protect exposed edges of the sensor stack, and then providing a chemical mechanical planarization (CMP) stop layer on the insulating layer. Subsequently, a CMP of the sensor stack is performed to remove a portion of the insulating layer. The resulting structure is substantially free of residue on the back edges of the sensor.

摘要翻译： 制造磁性器件的方法包括形成具有钉扎层和自由层的传感器。 传感器堆叠的第一反应离子蚀刻将具有光致抗蚀剂图像的硬掩模层图案化以形成第一硬掩模。 然后执行第二反应离子蚀刻以形成延伸的钉扎层。 该方法还包括在第二反应离子蚀刻之后沉积绝缘层以保护传感器堆叠的暴露边缘，然后在绝缘层上提供化学机械平坦化（CMP）停止层。 随后，执行传感器堆叠的CMP以去除绝缘层的一部分。 所得到的结构在传感器的后边缘上基本上没有残留物。

公开(公告)号：US09196283B1

公开(公告)日：2015-11-24

申请号：US13801408

申请日：2013-03-13

申请人： Western Digital (Fremont), LLC

发明人： Masahiro Osugi ,  Lily Yao ,  Ming Jiang ,  Guanghong Luo ,  Wai-Ming J. Kan

IPC分类号： G11B5/127 ,  H04R31/00 ,  G11B5/84

CPC分类号： G11B5/127 ,  G11B5/3163 ,  G11B5/3909 ,  G11B5/84 ,  G11B5/8404 ,  Y10T428/24149

摘要： A method for fabricating a magnetic recording transducer is described. The magnetic recording transducer has an underlayer and at least one layer on the underlayer. The layer(s) are capable of including an aperture that exposes a portion of the underlayer. The method includes providing a neutralized aqueous solution having a chemical buffer therein. The chemical buffer forms a nonionic full film corrosion inhibitor. The method also includes exposing a portion of the magnetic recording transducer including the layer(s) to the neutralized aqueous solution including the chemical buffer. In one aspect this exposure occurs through a chemical mechanical planarization.

摘要翻译： 描述了制造磁记录换能器的方法。 磁记录传感器具有底层和底层上的至少一层。 该层能够包括暴露底层的一部分的孔。 该方法包括提供其中具有化学缓冲液的中和的水溶液。 化学缓冲液形成非离子全膜腐蚀抑制剂。 该方法还包括将包括该层的磁记录换能器的一部分暴露于包含化学缓冲液的中和的水溶液中。 在一个方面，该曝光通过化学机械平面化发生。

公开(公告)号：US09082426B1

公开(公告)日：2015-07-14

申请号：US13719809

申请日：2012-12-19

申请人： Western Digital (Fremont), LLC

发明人： Yan Chen ,  Donghong Li ,  Ronghui Zhou ,  Lien-Chang Wang ,  Lily Yao ,  Ming Jiang

IPC分类号： H04R31/00 ,  G11B5/127 ,  G11B5/31 ,  B24B49/10 ,  G11B5/39 ,  B24B37/04

CPC分类号： G11B5/127 ,  B24B37/013 ,  B24B37/04 ,  B24B49/10 ,  G11B5/1278 ,  G11B5/31 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/3169 ,  G11B5/39 ,  H04R31/00 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： Methods for manufacturing electronic lapping guides (ELGs) for writer heads that closely track the pole formation of the writer heads are provided. Once such method includes forming an ELG adjacent to a writer head that is subjected to substantially all of the sub-processing actions associated with the pole formation of the writer head, lapping the pole material, measuring a resistance of the ELG during the lapping, comparing the measured resistance with a target resistance, and terminating the lapping based on the comparison of the measured resistance with the target resistance.

摘要翻译： 提供了用于制造紧密跟踪写入头的极点形成的写入头的电子研磨导轨（ELG）的方法。 一旦这样的方法包括形成与写入器头相邻的ELG，其经受与写入头的极点形成相关联的基本上所有的子处理动作，研磨极材料，在研磨期间测量ELG的电阻， 测量的电阻与目标电阻，并且基于测量的电阻与目标电阻的比较来终止研磨。

公开(公告)号：US08980109B1

公开(公告)日：2015-03-17

申请号：US13711160

申请日：2012-12-11

申请人： Western Digital (Fremont), LLC

发明人： Ronghui Zhou ,  Lily Yao ,  Ming Jiang ,  Lien-Chang Wang

IPC分类号： B44C1/22 ,  G11B5/84

CPC分类号： G11B5/84 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163

摘要： A method fabricates a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. A pole trench is provided in the nonmagnetic layer. The pole trench has a pole tip region and a yoke region. At least one pole material is provided. The pole material(s) have an external protrusion that is above and external to the pole trench. A hard mask that covers at least the external protrusion is provided. A portion of the nonmagnetic layer adjacent to the pole trench is removed to form a side shield trench. At least one side shield material is provided. A portion of the side shield material(s) are adjacent to the hard mask and fill at least a portion of the side shield trench. The side shield material(s) and the pole material(s) are planarized to form at least one side shield and a main pole.

摘要翻译： 一种制造具有对应于ABS的非磁性层和ABS位置的磁换能器的方法。 在非磁性层中设置极沟槽。 极沟具有极尖区域和轭区域。 提供至少一个极材料。 极材料具有在极沟槽的上方和外部的外部突起。 提供了至少覆盖外部突起的硬掩模。 去除与磁极沟相邻的非磁性层的一部分以形成侧屏蔽沟槽。 提供至少一个侧屏蔽材料。 侧屏蔽材料的一部分与硬掩模相邻并且填充侧屏蔽沟槽的至少一部分。 侧屏蔽材料和极材料被平坦化以形成至少一个侧屏蔽和主极。