公开(公告)号：US09721591B1

公开(公告)日：2017-08-01

申请号：US15097182

申请日：2016-04-12

Applicant: Western Digital (Fremont), LLC

Inventor： Feng Liu ,  Zhigang Bai ,  Peng Luo ,  Jinqiu Zhang ,  Ming Sun ,  Xiaoyu Yang ,  Yifan Zhang ,  Xiaojun Zhang ,  Ming Jiang

IPC: G11B5/127 ,  G11B5/31 ,  G11B5/21 ,  G11B5/147

CPC classification number: G11B5/3116 ,  G11B5/1278 ,  G11B5/1475 ,  G11B5/21 ,  G11B5/3146

Abstract: A magnetic write apparatus has a media-facing surface (MFS) and includes an auxiliary pole, coil(s) and a main pole having a pole tip and a yoke. The pole tip occupies part of the MFS. The yoke has a yoke length measured from the MFS in a yoke direction perpendicular to the MFS. The yoke length is less than four microns. The main pole has a total length in the yoke direction and a width in a cross-track direction. The main pole is continuous along the total length. The aspect ratio of the main pole is the total length divided by the width and exceeds one. The main pole includes surface(s) having a nonzero acute flare angle from the MFS. The auxiliary pole is adjacent to the main pole and recessed from the MFS by not more than 1.05 micron. The coil(s) energizes the main pole and have not more than two turns.

公开(公告)号：US09431038B1

公开(公告)日：2016-08-30

申请号：US14753630

申请日：2015-06-29

Applicant: Western Digital (Fremont), LLC

Inventor： Jinqiu Zhang ,  Xiaoyu Yang ,  Feng Liu ,  Xiaojun Zhang ,  Krishna Chetry ,  Masahiro Osugi ,  Ning Wu

IPC: G11B5/11 ,  B44C1/22 ,  G11B5/31 ,  G11B5/60

CPC classification number: G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

Abstract: A method provides a magnetic device having an air-bearing surface (ABS) location. A layer including first and second sublayers is provided. The first sublayer includes the ABS location. The second sublayer recessed from the ABS location such that part of the first sublayer is between the second sublayer and the ABS location. The first sublayer has a rear surface oriented at a nonzero, acute angle from a surface perpendicular to the ABS location. A trench is formed in the layer. The trench has a bottom, a top and sidewalls. The sidewalls form a first angle with a direction perpendicular to the bottom at the ABS location. The sidewalls form a second angle with the direction in part of the second sublayer. The second angle is smaller than the first angle. The sidewall angle varies along the rear surface of the first sublayer. A main pole is provided in the trench.

Abstract translation: 一种方法提供具有空气轴承表面（ABS）位置的磁性装置。 提供包括第一和第二子层的层。 第一子层包括ABS位置。 第二子层从ABS位置凹陷，使得第一子层的一部分位于第二子层和ABS位置之间。 第一子层具有从垂直于ABS位置的表面定向成非零锐角的后表面。 在该层中形成沟槽。 沟槽具有底部，顶部和侧壁。 在ABS位置处，侧壁与垂直于底部的方向形成第一角度。 侧壁与第二子层的一部分中的方向形成第二角度。 第二角度小于第一角度。 侧壁角沿第一子层的后表面变化。 沟槽中设有主极。

公开(公告)号：US08988825B1

公开(公告)日：2015-03-24

申请号：US14279608

申请日：2014-05-16

Applicant: Western Digital (Fremont), LLC

Inventor： Jinqiu Zhang ,  Lien-Chang Wang ,  Xiaoyu Yang ,  Feng Liu ,  Ming Jiang

IPC: G11B5/147 ,  G11B5/31 ,  G11B5/11

CPC classification number: G11B5/3163 ,  G11B5/3116

Abstract: A method and system provide a magnetic transducer having an air-bearing surface (ABS) location. An intermediate is provided. The intermediate layer includes a first sublayer and a second sublayer in at least a side shield region. The first sublayer has a first sublayer top. The second sublayer is on the first sublayer top in the shield region. A trench is formed in the intermediate layer using at least one etch. A main pole is provided in the trench. The main pole has a bottom and a top wider than the bottom. The first sublayer top is between the top and the bottom of the main pole. At least a portion of the second sublayer is removed in the shield region. At least one half side shield is provided. A bottom of the at least one half side shield being between the top and the bottom of the main pole.

Abstract translation: 一种方法和系统提供具有空气轴承表面（ABS）位置的磁换能器。 提供中间体。 中间层包括至少一个侧屏蔽区域中的第一子层和第二子层。 第一子层具有第一子层顶部。 第二子层位于屏蔽区域中的第一子层顶部。 使用至少一个蚀刻在中间层中形成沟槽。 沟槽中设有主极。 主杆的底部和顶部宽于底部。 第一子层顶部位于主极的顶部和底部之间。 第二子层的至少一部分在屏蔽区域中被去除。 提供至少一个半边屏蔽。 至少一个半侧护罩的底部位于主杆的顶部和底部之间。

公开(公告)号：US09275657B1

公开(公告)日：2016-03-01

申请号：US14046790

申请日：2013-10-04

Applicant: Western Digital (Fremont), LLC

Inventor： Jinqiu Zhang ,  Feng Liu ,  Xiaoyu Yang ,  Ming Jiang ,  Xiaotian Zhou ,  Zeyu Ma ,  Hai Sun

IPC: G11B5/187 ,  G11B5/127 ,  G11B5/23 ,  G11B5/10 ,  H01L21/027 ,  H01L21/3213 ,  G11B5/147 ,  G11B5/31

CPC classification number: G11B5/1278 ,  G11B5/10 ,  G11B5/11 ,  G11B5/112 ,  G11B5/147 ,  G11B5/187 ,  G11B5/1878 ,  G11B5/232 ,  G11B5/235 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/6082 ,  H01L21/0272 ,  H01L21/32134 ,  H01L21/32139 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49043

Abstract: A process for manufacturing a PMR writer main pole with non-conformal side gaps is provided. The process may include depositing a stitch layer comprising a magnetic material and a second stitch layer material over a substrate, forming an air-bearing surface (ABS) region in a first damascene material, and forming a yoke region in a second damascene material. The first damascene material may include Aluminum Oxide (Al2O3). The second damascene material may include Silicon Dioxide (SiO2). Side gap regions may include SiO2.

Abstract translation: 提供了一种用于制造具有非保形侧面间隙的PMR写入器主极的工艺。 该方法可以包括在衬底上沉积包括磁性材料和第二缝合层材料的缝合层，在第一镶嵌材料中形成空气轴承表面（ABS）区域，以及在第二镶嵌材料中形成轭铁区域。 第一镶嵌材料可以包括氧化铝（Al 2 O 3）。 第二镶嵌材料可以包括二氧化硅（SiO 2）。 侧隙区域可以包括SiO 2。

公开(公告)号：US10115416B2

公开(公告)日：2018-10-30

申请号：US15652629

申请日：2017-07-18

Applicant: WESTERN DIGITAL (FREMONT), LLC

Inventor： Feng Liu ,  Zhigang Bai ,  Peng Luo ,  Jinqiu Zhang ,  Ming Sun ,  Xiaoyu Yang ,  Yifan Zhang ,  Xiaojun Zhang ,  Ming Jiang

IPC: G11B5/31 ,  G11B5/127 ,  G11B5/21 ,  G11B5/147

Abstract: A magnetic write apparatus has a media-facing surface (MFS) and includes an auxiliary pole, coil(s) and a main pole having a pole tip and a yoke. The pole tip occupies part of the MFS. The yoke has a yoke length measured from the MFS in a yoke direction perpendicular to the MFS. The yoke length is less than four microns. The main pole has a total length in the yoke direction and a width in a cross-track direction. The main pole is continuous along the total length. The aspect ratio of the main pole is the total length divided by the width and exceeds one. The main pole includes surface(s) having a nonzero acute flare angle from the MFS. The auxiliary pole is adjacent to the main pole and recessed from the MFS by not more than 1.05 micron. The coil(s) energizes the main pole and have not more than two turns.

公开(公告)号：US09940951B2

公开(公告)日：2018-04-10

申请号：US15053211

申请日：2016-02-25

Applicant: Western Digital (Fremont), LLC

Inventor： Jinqiu Zhang ,  Feng Liu ,  Xiaoyu Yang ,  Ming Jiang ,  Xiaotian Zhou ,  Zeyu Ma ,  Hai Sun

IPC: G11B5/235 ,  G11B5/11 ,  G11B5/127 ,  G11B5/23 ,  G11B5/187 ,  G11B5/10 ,  G11B5/60 ,  H01L21/027 ,  H01L21/3213 ,  G11B5/147 ,  G11B5/31

CPC classification number: G11B5/1278 ,  G11B5/10 ,  G11B5/11 ,  G11B5/112 ,  G11B5/147 ,  G11B5/187 ,  G11B5/1878 ,  G11B5/232 ,  G11B5/235 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/6082 ,  H01L21/0272 ,  H01L21/32134 ,  H01L21/32139 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49043

Abstract: A perpendicular magnetic recording (PMR) writer is configured to magnetically record data on a rotatable disk surface. The PMR writer including a pole tip, side shields, an air-bearing surface (ABS) region, a yoke region comprising Silicon Dioxide (SiO2), side gaps and a plurality of throat regions. The side gaps are arranged respectively between the pole tip and the side shields and include SiO2. A side gap width of the plurality of throat regions increases with a side shield throat height above the ABS region for each of the throat regions. The side gap width has a different width variation in each of the throat regions.

公开(公告)号：US09711168B1

公开(公告)日：2017-07-18

申请号：US15156877

申请日：2016-05-17

Applicant: Western Digital (Fremont), LLC

Inventor： Xiaoyu Yang ,  Jinqiu Zhang ,  Feng Liu ,  Xiaotian Zhou ,  Hai Sun ,  Ming Jiang

IPC: G11B5/187 ,  G11B5/11

CPC classification number: G11B5/187 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315

Abstract: A method provides magnetic write apparatus. A side shield location layer having a location corresponding to the side shield(s) and back and side surfaces is provided. Part of the back surface corresponds to the back surface of the side shield. A nonmagnetic layer adjoining the back and side surface(s) of the side shield location layer is provided. A pole trench is formed in the layers using a first etch process. The nonmagnetic and side shield location layers have an etch selectivity of at least 0.9 and not more than 1.1 for the first etch. A pole is provided in the pole trench. A remaining portion of the side shield location layer is removed using a wet etch. The nonmagnetic layer is nonremovable by the wet etch. Side shield(s) having a back surface substantially the same as the back surface of the side shield location layer are provided.

公开(公告)号：US09406331B1

公开(公告)日：2016-08-02

申请号：US13929633

申请日：2013-06-27

Applicant: Western Digital (Fremont), LLC

Inventor： Miao Wang ,  Wei Gao ,  Xiaoyu Yang ,  Anup G. Roy ,  Wei Zhang ,  Wencheng Su ,  Zhihong Zhang ,  James Yuan ,  Guanxiong Li ,  Ming Mao ,  Hai Sun ,  Lingyun Miao

IPC: B44C1/22 ,  G11B5/84 ,  G11B5/127

CPC classification number: G11B5/313 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/3169 ,  G11B5/855

Abstract: Disclosed are methods for making ultra-narrow track width (TW) read sensors, and read transducers incorporating such sensors. The methods utilize side-wall line patterning techniques to prepare ultra-narrow mill masks that can be used to prepare the ultra-narrow read sensors.

Abstract translation: 公开了用于制造超窄轨道宽度（TW）读取传感器的方法和包含这种传感器的读取传感器的方法。 该方法利用侧壁线图案化技术来制备可用于制备超窄读取传感器的超窄磨机掩模。

公开(公告)号：US09343087B1

公开(公告)日：2016-05-17

申请号：US14578449

申请日：2014-12-21

Applicant: Western Digital (Fremont), LLC

Inventor： Ronghui Zhou ,  Xiaoyu Yang ,  Ming Jiang ,  Jinqiu Zhang

IPC: B44C1/22 ,  G11B5/84 ,  G11B5/23 ,  G11B5/255 ,  G11B5/187

CPC classification number: G11B5/232 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163

Abstract: A method manufacturing a magnetic writer provides an intermediate layer including multiple sublayers is provided. The sublayers include first and second nonmagnetic layers and an etch stop layer being between the first and second nonmagnetic layers. A trench is formed in the intermediate layer using at least one etch, such as a reactive ion etch. The trench has a location and profile corresponding to the main pole. A main pole having a bottom and a top is provided in the trench. At least a portion of the second nonmagnetic layer is removed using at least a second etch, such as a wet etch process. The etch stop layer is resistant to the at least the second etch. A half side shield is provided on at least part of the first nonmagnetic layer. The half side shield bottom is between the top and the bottom of the main pole.

Abstract translation: 制造磁写入器的方法提供了包括多个子层的中间层。 子层包括第一和第二非磁性层以及位于第一和第二非磁性层之间的蚀刻停止层。 使用至少一种蚀刻（例如反应离子蚀刻）在中间层中形成沟槽。 沟槽具有对应于主极的位置和轮廓。 具有底部和顶部的主极设置在沟槽中。 使用至少第二蚀刻（例如湿蚀刻工艺）去除第二非磁性层的至少一部分。 蚀刻停止层耐受至少第二蚀刻。 在第一非磁性层的至少一部分上设置半侧屏蔽。 半侧屏蔽底部位于主极的顶部和底部之间。