公开(公告)号：US09287494B1

公开(公告)日：2016-03-15

申请号：US13954766

申请日：2013-07-30

Applicant: Western Digital (Fremont), LLC

Inventor： MingLang Yan ,  Xiaobo Huang ,  Jian X. Shen

IPC: H01L43/12 ,  H01L43/02 ,  H01L27/22 ,  H01L43/00 ,  G01R33/09

CPC classification number: H01L43/12 ,  G01R33/09 ,  G01R33/098 ,  H01L27/22 ,  H01L27/222 ,  H01L43/00 ,  H01L43/02

Abstract: A method for fabricating a magnetic tunnel junction (MTJ) is disclosed. The process involves annealing a stack that includes a tunnel barrier layer and cooling the stack under vacuum immediately after annealing. At least one overlayer is deposited on the tunnel barrier layer to form the MTJ.

Abstract translation: 公开了一种用于制造磁性隧道结（MTJ）的方法。 该方法包括退火包括隧道势垒层的堆叠，并且在退火之后立即在真空下冷却堆叠。 至少一层覆盖层沉积在隧道势垒层上以形成MTJ。

公开(公告)号：US09368134B1

公开(公告)日：2016-06-14

申请号：US13769951

申请日：2013-02-19

Applicant: Western Digital (Fremont), LLC

Inventor： Ming Sun ,  Dehua Han ,  Jose A. Medina ,  Ming Jiang ,  Ying Hong ,  Feng Liu ,  Jian X. Shen

IPC: G11B5/187

CPC classification number: G11B5/187 ,  G11B5/3116 ,  G11B5/3163

Abstract: A method and system for fabricating a magnetic transducer are described. The magnetic transducer includes a pole and a nonmagnetic intermediate layer adjacent to the pole. The pole has a paddle and a pole tip including a plurality of sidewalls. The pole includes a first magnetic pole layer, at least one antiferromagnetic coupling (AFC) structure on the first magnetic pole layer, and a second magnetic pole layer on the AFC structure(s). At least a portion of the first magnetic pole layer resides on the sidewalls of the pole tip. The paddle has a paddle width in a track width direction. The pole tip has a pole tip width in a track width direction that is less than the paddle width.