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    RF-POWERED MICROMECHANICAL CLOCK GENERATOR
    2.
    发明申请
    RF-POWERED MICROMECHANICAL CLOCK GENERATOR 审中-公开

    公开(公告)号：US20190157015A1

    公开(公告)日：2019-05-23

    申请号：US16167799

    申请日：2018-10-23

    申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

    发明人： Clark T.-C. Nguyen ,  Ruonan Liu ,  Jalal Naghsh Nilchi

    IPC分类号： H01H1/00 ,  H04L27/152 ,  H03K5/135

    摘要： A microelectromechanical resonant switch (“resoswitch”) converts received radio frequency (RF) energy into a clock output. The resoswitch first accepts incoming amplitude- or frequency-shift keyed clock-modulated RF energy at a carrier frequency, filters it, provides power gain via resonant impact switching, and finally envelop detects impact impulses to demodulate and recover the carrier clock waveform. The resulting output derives from the clock signal that originally modulated the RF carrier, resulting in a local clock that shares its originator's accuracy. A bare push-pull 1-kHz RF-powered mechanical clock generator driving an on-chip inverter gate capacitance of 5 fF can potentially operate with only 5 pW of battery power, 200,000 times lower than a typical real-time clock. Using an off-chip inverter with 17.5 pF of effective capacitance, a 1-kHz push-pull resonator would consume 17.5 nW.

    HOLLOW SUPPORTS AND ANCHORS FOR MECHANICAL RESONATORS
    5.
    发明申请
    HOLLOW SUPPORTS AND ANCHORS FOR MECHANICAL RESONATORS 有权
    机身谐振器的支撑和支架

    公开(公告)号：US20160164458A1

    公开(公告)日：2016-06-09

    申请号：US14228645

    申请日：2014-03-28

    申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

    发明人： Clark T.-C. Nguyen ,  Lingqi Wu

    IPC分类号： H03B1/02

    CPC分类号： H03B1/02 ,  G01C19/5698 ,  G01C19/5712 ,  G01C19/5733 ,  H01P1/38 ,  H01P1/39 ,  H01P7/10 ,  H03B5/1835 ,  H03B5/30 ,  H03H3/007 ,  H03H9/2436 ,  H03H9/54 ,  H03H2009/02346 ,  H03H2009/0244

    摘要： A micromechanical resonator having one or more anchoring stems which are hollow to increase resonator Q factor. By way of example a micromechanical disk resonator embodiment is shown utilizing a resonant micromechanical disk anchored by a stem between at least one electrode used for input and output. To increase resonator Q, a hollow stem is utilized in which an outer thickness of stem material surrounds a hollow area interior of the stem, or that is fabricated with a plurality of vias and/or fabricated substructures containing hollow spaces in the stem material. Measurements have confirmed that Q values can be increased using the hollow core stems by a factor of 2.9 times in certain implementations and operating modes.

    摘要翻译： 具有一个或多个锚定杆的微机械谐振器，其中空以增加谐振器Q因子。 作为示例，微机械盘谐振器实施例被示出为利用由用于输入和输出的至少一个电极之间的杆固定的谐振微机械盘。 为了增加谐振器Q，使用中空杆，其中杆材料的外部厚度围绕杆的中空区域内部，或者由在杆材料中包含中空空间的多个通孔和/或制造的子结构制成。 测量已经证实，在某些实施方案和操作模式中，Q值可以使用中空芯杆增加2.9倍。

    ELECTRICAL STIFFNESS-BASED SENSOR
    6.
    发明申请
    ELECTRICAL STIFFNESS-BASED SENSOR 有权

    公开(公告)号：US20220163413A1

    公开(公告)日：2022-05-26

    申请号：US17537851

    申请日：2021-11-30

    申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

    发明人： Clark T.-C. Nguyen ,  Alper Ozgurluk

    IPC分类号： G01L1/14

    摘要： An on-chip strain measurement device that uses precision frequency measurements to precisely extract sub-nm displacements, allowing residual strain measurements in a given structural film. Strain-induced gap changes to resonance frequencies use differential strategies to remove bias uncertainty, allowing measurement of sub-nm displacements. Gap-dependent electrical stiffness is used to shift resonance frequencies as structural elements stretch or shrink to relieve strain. An output based on differential frequencies between two proximal structures with unequal stress arm lengths removes uncertainty on the initial gap spacing. The ability to precisely measure the frequency of the high-Q structures allows lifetime stress correction of micromechanical circuits, such as oscillators and filters.

    Micromechanical frequency divider
    8.
    发明授权
    Micromechanical frequency divider 有权

    公开(公告)号：US10224875B2

    公开(公告)日：2019-03-05

    申请号：US15170577

    申请日：2016-06-01

    申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

    发明人： Clark T.-C. Nguyen ,  Tristan O. Rocheleau

    IPC分类号： H03B19/14 ,  H03L7/18 ,  H03B19/00 ,  H03K25/02 ,  H03H9/02 ,  H03H9/17 ,  H03H9/24 ,  H03H9/25

    摘要： A micro-electromechanical system (MEMS) frequency divider apparatus having one or more MEMS resonators on a substrate is presented. A first oscillator frequency, as an approximate multiple of the parametric oscillation frequency, is capacitively coupled from a very closely-spaced electrode (e.g., 40 nm) to a resonant structure of the first oscillator, thus inducing mechanical oscillation. This mechanical oscillation can be coupled through additional MEMS resonators on the substrate. The mechanical resonance is then converted, in at least one of the MEMS resonators, by capacitive coupling back to an electrical signal which is a division of the first oscillation frequency. Output may be generated as a single ended output, or in response to a differential signal between two output electrodes.