INTEGRATED MICROELECTROMECHANICAL SYSTEM DEVICES AND METHODS FOR MAKING THE SAME
    7.
    发明申请
    INTEGRATED MICROELECTROMECHANICAL SYSTEM DEVICES AND METHODS FOR MAKING THE SAME 有权
    集成微电子系统装置及其制造方法

    公开(公告)号:US20150048902A1

    公开(公告)日:2015-02-19

    申请号:US13970120

    申请日:2013-08-19

    Inventor: JOHN E. ROGERS

    Abstract: Integrated Microelectromechanical System (“MEMS”) devices and methods for making the same. The integrated MEMS device comprises a substrate (200) with first electronic circuitry (206) formed thereon, as well as a MEMS filter device (100). The MEMS filter device has a transition portion (118) configured to (a) electrically connect the MEMS filter device to second electronic circuitry and (b) suspend the MEMS filter device over the substrate such that a gas gap exists between the substrate and the MEMS filter device. The transition portion comprises a three dimensional hollow ground structure (120) in which an elongate center conductor (122) is suspended. The RF MEMS filter device also comprises at least two adjacent electronic elements (102/110) which are electrically isolated from each other via a ground structure of the transition portion, and placed in close proximity to each other.

    Abstract translation: 集成微机电系统(“MEMS”)器件及其制造方法。 集成MEMS装置包括其上形成有第一电子电路(206)的基板(200)以及MEMS滤波器装置(100)。 MEMS滤波器装置具有过渡部分(118),其被配置为(a)将MEMS滤波器装置电连接到第二电子电路,以及(b)将MEMS滤波器装置悬挂在衬底上,使得在衬底和MEMS之间存在气隙 过滤装置 过渡部分包括三维中空接地结构(120),其中细长的中心导体(122)悬挂在其中。 RF MEMS滤波器装置还包括至少两个相邻的电子元件(102/110),它们经由过渡部分的接地结构彼此电隔离并彼此靠近放置。

    Acoustic galvanic isolation device
    8.
    发明授权
    Acoustic galvanic isolation device 有权
    声电隔离装置

    公开(公告)号:US08791624B2

    公开(公告)日:2014-07-29

    申请号:US13237713

    申请日:2011-09-20

    CPC classification number: H03H9/02259 H03H9/24 H03H9/465 H04B11/00

    Abstract: An electroacoustic transducer including a first electrode formed on a substrate capable of transmitting ultrasounds, a membrane formed above the first electrode and separated therefrom by a cavity, a second electrode formed on the membrane, a first insulating layer on the second electrode, and a third electrode formed on the first insulating layer.

    Abstract translation: 一种电声换能器,包括形成在能够传输超声波的基板上的第一电极,形成在第一电极上方并通过空腔分离的膜,形成在膜上的第二电极,第二电极上的第一绝缘层,以及第三电极 电极,形成在第一绝缘层上。

    Microwave acoustic wave filters
    9.
    发明授权
    Microwave acoustic wave filters 有权
    微波声波滤波器

    公开(公告)号:US08701065B1

    公开(公告)日:2014-04-15

    申请号:US13939065

    申请日:2013-07-10

    Applicant: Resonant LLC

    Abstract: A method of designing an acoustic microwave filter comprises selecting a filter section based on frequency response requirements. The filter section includes an input, an output, and a plurality of circuit elements. The circuit elements have at least in-line acoustic resonators or in-shunt acoustic resonators. The method further comprises selecting a value for each circuit element, selecting a number of filter sections, and cascading the selected number of filter sections to create a cascaded filter circuit design, such that at least one pair of immediately adjacent filter sections are connected to each other via their inputs or their outputs. The method further comprises adding parasitic effects to the cascaded filter circuit design to create a pre-optimized filter circuit design, optimizing the pre-optimized filter circuit design to create a final filter circuit design, and constructing the acoustic microwave filter based on the final filter circuit design.

    Abstract translation: 设计声波微波滤波器的方法包括:基于频率响应要求选择滤波器部分。 滤波器部分包括输入,输出和多个电路元件。 电路元件至少具有在线声谐振器或分流声谐振器。 该方法还包括为每个电路元件选择一个值,选择多个滤波器部分,以及级联所选数量的滤波器部分以创建级联滤波器电路设计,使得至少一对直接相邻的滤波器部分连接到每个 其他通过其输入或其输出。 该方法还包括向级联滤波器电路设计增加寄生效应以创建预优化滤波器电路设计,优化预优化滤波器电路设计以创建最终滤波器电路设计,以及基于最终滤波器构建声波微波滤波器 电路设计。

    Resonant circuit, oscillation circuit, filter circuit, and electronic device
    10.
    发明授权
    Resonant circuit, oscillation circuit, filter circuit, and electronic device 有权
    谐振电路,振荡电路,滤波电路和电子器件

    公开(公告)号:US08106723B2

    公开(公告)日:2012-01-31

    申请号:US12486662

    申请日:2009-06-17

    Applicant: Toru Watanabe

    Inventor: Toru Watanabe

    Abstract: A resonant circuit includes a substrate; a MEMS resonator including a fixed electrode and a movable electrode formed above the substrate and having a first terminal and a second terminal, the movable electrode having a movable portion opposing at least a part of the fixed electrode; a first input-output terminal connected to the first terminal connected to one of the fixed electrode and the movable electrode of the MEMS resonator; a second input-output terminal connected to the second terminal connected to an other one of the fixed electrode and the movable electrode of the MEMS resonator; a voltage applying unit supplying a potential to at least the first terminal to apply a bias voltage between the first and the second terminals; and a variable capacitance connected between the first terminal and the first input-output terminal to allow a capacitance value to be changed by a change in a potential difference between opposite ends of the variable capacitance.

    Abstract translation: 谐振电路包括基板; MEMS谐振器,包括固定电极和可动电极,其形成在所述基板上并具有第一端子和第二端子,所述可动电极具有与所述固定电极的至少一部分相对的可动部分; 连接到连接到MEMS谐振器的固定电极和可移动​​电极之一的第一端子的第一输入 - 输出端子; 连接到与MEMS谐振器的固定电极和可动电极中的另一个连接的第二端子的第二输入 - 输出端子; 电压施加单元,向至少所述第一端子提供电位,以在所述第一端子和所述第二端子之间施加偏置电压; 以及连接在第一端子和第一输入 - 输出端子之间的可变电容器,以通过可变电容的相对端之间的电位差的变化来改变电容值。

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