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公开(公告)号:US20220223651A1
公开(公告)日:2022-07-14
申请号:US17709845
申请日:2022-03-31
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Chieh-Fei CHIU , Yong-Shiuan TSAIR , Wen-Ting CHU , Yu-Wen LIAO , Chin-Yu MEI , Po-Hao TSENG
Abstract: A memory device includes a first bottom electrode, a first memory stack, and a second memory stack. The first bottom electrode has a first portion and a second portion connected to the first portion. The first memory stack is over the first portion of the first bottom electrode. The first memory stack includes a first resistive switching element and a first top electrode over the first resistive switching element. The second memory stack is over the second portion of the first bottom electrode. The second memory stack comprises a second resistive switching element and a second top electrode over the second resistive switching element.
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公开(公告)号:US20210408373A1
公开(公告)日:2021-12-30
申请号:US16912341
申请日:2020-06-25
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Hsia-Wei CHEN , Chih-Hung PAN , Chih-Hsiang CHANG , Yu-Wen LIAO , Wen-Ting CHU
IPC: H01L45/00
Abstract: A method for fabricating a memory device is provided. The method includes forming a bottom electrode layer over a substrate; forming a buffer layer over the bottom electrode layer; performing a surface treatment to a top surface of the buffer layer; depositing a resistance switch layer over the top surface of the buffer layer after performing the surface treatment; forming a top electrode over the resistance switch layer; and patterning the resistance switch layer into a resistance switch element below the top electrode.
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公开(公告)号:US20180358409A1
公开(公告)日:2018-12-13
申请号:US15617019
申请日:2017-06-08
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Ching-Pei HSIEH , Hsia-Wei CHEN , Yu-Wen LIAO
IPC: H01L27/24 , H01L23/528 , H01L23/522 , H01L45/00
Abstract: A memory device includes a first inter-layer dielectric layer, plural conductive features, plural memory structures, a filler, and a second inter-layer dielectric layer. The conductive features are embedded in the first inter-layer dielectric layer. The memory structures are respectively over the conductive features. The filler is in between the memory structures. The second inter-layer dielectric layer is over the filler and the memory structures, and the second inter-layer dielectric layer and the filler form an interface, in which the interface extends from one of the memory structures to another of the memory structures.
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公开(公告)号:US20220102428A1
公开(公告)日:2022-03-31
申请号:US17032155
申请日:2020-09-25
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Chieh-Fei CHIU , Wen-Ting CHU , Yong-Shiuan TSAIR , Yu-Wen LIAO , Chih-Yang CHANG , Chin-Chieh YANG
IPC: H01L27/24 , H01L27/1159 , H01L27/11592 , H01L27/22 , H01L43/02 , H01L43/12 , H01L45/00
Abstract: A method for fabricating an integrated circuit is provided. The method includes depositing a dielectric layer over a conductive feature; etching an opening in the dielectric layer to expose the conductive feature, such that the dielectric layer has a tapered sidewall surrounding the opening; depositing a bottom electrode layer into the opening in the dielectric layer; depositing a resistance switch layer over the bottom electrode layer; patterning the resistance switch layer and the bottom electrode layer respectively into a resistance switch element and a bottom electrode, in which a sidewall of the bottom electrode is landing on the tapered sidewall of the dielectric layer.
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公开(公告)号:US20150092471A1
公开(公告)日:2015-04-02
申请号:US14041916
申请日:2013-09-30
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Wen-Chun YOU , Kuo-Chi TU , Chih-Yang CHANG , Hsia-Wei CHEN , Yu-Wen LIAO , Chin-Chieh YANG , Sheng-Hung SHIH , Wen-Ting CHU
IPC: G11C13/00
CPC classification number: G11C13/003 , G11C13/0002 , G11C13/0059 , G11C13/0069 , G11C13/0097 , G11C2013/0071 , G11C2213/79
Abstract: A method is disclosed that includes the operations outlined below. A first voltage is applied to a gate of an access transistor of each of a row of memory cells during a reset operation, wherein a first source/drain of the access transistor is electrically connected to a first electrode of a resistive random access memory (RRAM) device in the same memory cell. An inhibition voltage is applied to a second electrode of the RRAM device or to a second source/drain of the access transistor of each of a plurality of unselected memory cells when the first voltage is applied to the gate of the access transistor.
Abstract translation: 公开了一种包括以下概述的操作的方法。 在复位操作期间,第一电压被施加到每行存储单元的存取晶体管的栅极,其中存取晶体管的第一源极/漏极电连接到电阻随机存取存储器(RRAM)的第一电极 )设备在同一个存储单元中。 当第一电压被施加到存取晶体管的栅极时,抑制电压被施加到RRAM器件的第二电极或多个未选择存储器单元中的每一个的存取晶体管的第二源极/漏极。
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公开(公告)号:US20230380190A1
公开(公告)日:2023-11-23
申请号:US18361483
申请日:2023-07-28
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Chieh-Fei CHIU , Wen-Ting CHU , Yong-Shiuan TSAIR , Yu-Wen LIAO , Chih-Yang CHANG , Chin-Chieh YANG
CPC classification number: H10B63/30 , H10B51/30 , H10B51/40 , H10B61/22 , H10N50/01 , H10N50/80 , H10N70/021 , H10N70/063 , H10N70/068 , H10N70/231 , H10N70/253 , H10N70/841
Abstract: A method for fabricating an integrated circuit is provided. The method includes depositing a dielectric layer over a conductive feature; etching an opening in the dielectric layer to expose the conductive feature, such that the dielectric layer has a tapered sidewall surrounding the opening; depositing a bottom electrode layer into the opening in the dielectric layer; depositing a resistance switch layer over the bottom electrode layer; patterning the resistance switch layer and the bottom electrode layer respectively into a resistance switch element and a bottom electrode, in which a sidewall of the bottom electrode is landing on the tapered sidewall of the dielectric layer.
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公开(公告)号:US20230329128A1
公开(公告)日:2023-10-12
申请号:US18333145
申请日:2023-06-12
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Hsia-Wei CHEN , Chih-Hung PAN , Chih-Hsiang CHANG , Yu-Wen LIAO , Wen-Ting CHU
IPC: H10N70/00
CPC classification number: H10N70/8416 , H10N70/023 , H10B63/30
Abstract: A memory device includes a bottom electrode, a buffer element, a metal-containing oxide portion, a resistance switch element, and a top electrode. The buffer element is over the bottom electrode. The metal-containing oxide portion is over the buffer element, in which the metal-containing oxide portion has a same metal material as that of the buffer element. The resistance switch element is over the metal-containing oxide portion. The top electrode is over the resistance switch element.
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公开(公告)号:US20180351099A1
公开(公告)日:2018-12-06
申请号:US15663671
申请日:2017-07-28
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Jen-Sheng YANG , Wen-Ting CHU , Chih-Yang CHANG , Chin-Chieh YANG , Kuo-Chi TU , Sheng-Hung SHIH , Yu-Wen LIAO , Hsia-Wei CHEN , I-Ching CHEN
CPC classification number: H01L45/1675 , H01L21/76802 , H01L21/76819 , H01L21/76832 , H01L21/76835 , H01L21/76837 , H01L23/5226 , H01L23/5283 , H01L27/2436 , H01L27/2463 , H01L45/08 , H01L45/1233 , H01L45/1253 , H01L45/145 , H01L45/1616
Abstract: A semiconductor device includes an inter-metal dielectric layer, a memory cell, a transistor and a dielectric layer. The memory cell includes a metal-insulator-metal (MIM) structure over a top surface of the inter-metal dielectric layer. The transistor underlies the inter-metal dielectric layer. The dielectric layer extends over the transistor and along the top surface of the inter-metal dielectric layer. The dielectric layer is separated from the MIM structure.
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