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公开(公告)号：US5753814A
公开(公告)日：1998-05-19
申请号：US722344
申请日：1996-09-27
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q30/14 , G01Q60/38 , Y10S977/865 , Y10S977/872
摘要： In accordance with a first aspect of the present invention, the sensitivity of a magnetically modulated AC-AFM is substantially improved by the use of a ferrite-core solenoid for modulating the magnetic cantilever of the ACAFM. In accordance with a second aspect of the present invention, the detection system for a magnetically modulated AC-AFM incorporates AC coupling of the signal from the position sensitive detector/beam deflection detector in order to remove the DC component of the signal, resulting in significantly improved dynamic range over systems utilizing DC coupling. High frequency modulation signals are detected through the use of fast analog multipliers which, after active filtering, give a low frequency signal which may be processed by digital electronics. In accordance with a third aspect of the present invention, operation of the microscope at small amplitudes of oscillation leaves small asperities on the tip intact and results in dramatic improvement in resolution.
摘要翻译： 根据本发明的第一方面，通过使用用于调制ACAFM的磁悬臂的铁氧体磁芯螺线管，实质上改进了磁调制的AC-AFM的灵敏度。 根据本发明的第二方面，用于磁调制AC-AFM的检测系统结合来自位置敏感检测器/光束偏转检测器的信号的AC耦合，以便去除信号的DC分量，导致明显的 改善使用直流耦合的系统的动态范围。 通过使用快速模拟乘法器来检测高频调制信号，其在有源滤波之后给出可由数字电子器件处理的低频信号。 根据本发明的第三方面，显微镜在小振幅振幅下的操作使尖端的粗糙度不变，导致分辨率的显着提高。
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2.发明授权Magnetic modulation of force sensor for AC detection in an atomic force microscope 有权在原子力显微镜中用于AC检测的力传感器的磁调制
公开(公告)号：US6134955A
公开(公告)日：2000-10-24
申请号：US228226
申请日：1999-01-11
申请人： Wenhai Han , Stuart M. Lindsay , Tianwei Jing
发明人： Wenhai Han , Stuart M. Lindsay , Tianwei Jing
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q30/14 , G01Q60/32 , G01Q60/38 , Y10S977/849 , Y10S977/86 , Y10S977/865 , Y10S977/871 , Y10S977/872 , Y10S977/873 , Y10S977/875
摘要： A scanning probe microscope for generating a signal corresponding to the surface characteristics of a scanned sample is provided and includes a force sensing probe tip disposed on a first side of a free end of a flexible cantilever which is adapted to be brought into close proximity to a sample surface; a magnetized material disposed on a second side opposite the first side of the flexible cantilever; an XY scanner for generating relative scanning movement between the force sensing probe tip and the sample surface; a Z control for adjusting the distance between the force sensing probe tip and the sample surface; and a deflection detector for generating a deflection signal indicative of deflection of the flexible cantilever. The scanning probe microscope also includes an ac signal source and a magnetic field generator for generating a magnetic field, with the magnetic field generator being coupled to the ac signal source so as to modulate the magnetic field with the ac signal. The force-sensing cantilever is magnetized with a moment along the soft axis of the cantilever.
摘要翻译： 提供了用于产生对应于扫描样品的表面特性的信号的扫描探针显微镜，并且包括设置在柔性悬臂的自由端的第一侧上的力感测探针尖端，该柔性悬臂适用于靠近 样品表面; 设置在与所述柔性悬臂的第一侧相对的第二侧的磁化材料; XY扫描器，用于在力感测探针尖端和样品表面之间产生相对扫描运动; 用于调节力传感探针尖端和样品表面之间的距离的Z控制; 以及用于产生指示柔性悬臂的偏转的偏转信号的偏转检测器。 扫描探针显微镜还包括用于产生磁场的交流信号源和磁场发生器，其中磁场发生器耦合到交流信号源，以便利用交流信号调制磁场。 力传感悬臂沿着悬臂的软轴磁化一段时间。
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公开(公告)号：US5983712A
公开(公告)日：1999-11-16
申请号：US905815
申请日：1997-08-04
申请人： Stuart M. Lindsay , Tianwei Jing , Wenhai Han
发明人： Stuart M. Lindsay , Tianwei Jing , Wenhai Han
IPC分类号： G01B7/34 , B81B3/00 , G01B7/00 , G01B21/30 , G01Q10/06 , G01Q30/14 , G01Q60/24 , G01Q60/32 , G01Q60/38 , G01Q70/06 , G01B5/28
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q10/06 , G01Q30/14 , Y10S977/849 , Y10S977/851 , Y10S977/852 , Y10S977/863 , Y10S977/872 , Y10S977/875 , Y10S977/881 , Y10S977/934
摘要： An atomic force microscope and method of operation are provided and include a force sensing probe tip adapted to be brought into close proximity with a sample surface, a scanning element for generating relative movement between the probe tip and the sample surface, a device for generating a magnetic field to cause deflection of the probe tip, a driver for the device, the driver including a source of alternating current and a source of a second current of a controlled magnitude, and a detector for detecting the position of the probe tip. In a preferred mode of operation, two signals, one of alternating current and the other of a fixed, but variable, current, are applied to cause a displacement of the time-average position of the probe tip.
摘要翻译： 提供了一种原子力显微镜和操作方法，其包括适于与样品表面紧密接近的力传感探针尖端，用于产生探针尖端和样品表面之间的相对运动的扫描元件，用于产生 磁场以引起探针尖端的偏转，用于该装置的驱动器，该驱动器包括交流电流源和受控量级的第二电流源，以及用于检测探头尖端的位置的检测器。 在优选的操作模式中，施加两个信号，一个交流电流，另一个是固定的但是可变的电流，以引起探头尖端的时间平均位置的位移。
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公开(公告)号：US5866805A
公开(公告)日：1999-02-02
申请号：US710191
申请日：1996-09-12
申请人： Wenhai Han , Stuart M. Lindsay , Tianwei Jing
发明人： Wenhai Han , Stuart M. Lindsay , Tianwei Jing
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q30/14 , G01Q60/32 , G01Q60/38 , Y10S977/849 , Y10S977/86 , Y10S977/865 , Y10S977/871 , Y10S977/872 , Y10S977/873 , Y10S977/875
摘要： A force sensing cantilever for use in a scanning probe microscope has both a top side and a bottom side. From the bottom side extends a probe tip. The bottom side is coated with a thin film of a first material and the top side is coated with a thin film of a second material. The first and second materials may be the same or they may be different. The materials and thicknesses of the respective films are selected so as to create opposing forces to counter the tendency of such cantilevers to bend when a thin film is applied to only one side thereof.
摘要翻译： 用于扫描探针显微镜的力传感悬臂具有顶侧和底侧。 从底部延伸探针尖。 底部涂覆有第一材料的薄膜，并且顶侧涂覆有第二材料的薄膜。 第一和第二材料可以相同或可以不同。 选择各个薄膜的材料和厚度以产生相反的力，以便在仅将薄膜施加到其一侧时产生这种悬臂弯曲的倾向。
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公开(公告)号：US6121611A
公开(公告)日：2000-09-19
申请号：US82095
申请日：1998-05-20
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
CPC分类号： G01Q60/40 , B82Y35/00 , G01Q70/14 , Y10S977/865 , Y10S977/873
摘要： Force sensing probes for use in scanning probe microscopes and a method for coating such probes with a film comprising a magnetostrictive material are provided. The probes may be magnetized by placing them in a magnetic field which can be oriented in any direction with respect to the probes. The magnetostrictive effect leads to a compression or expansion of the magnetic film, altering its length by the strength of the applied field. This in turn causes the probe, which in a preferred embodiment is in the form of a cantilever, and the applied magnetic film, to deflect or bend. The consequent motion of the probe is much greater than that obtained by direct application of a magnetic force and the effect is not sensitive to the direction of the applied field.
摘要翻译： 提供用于扫描探针显微镜的力传感探针和用包含磁致伸缩材料的膜涂覆这种探针的方法。 可以通过将探针放置在可以相对于探针的任何方向定向的磁场中来磁化探针。 磁致伸缩效应导致磁膜的压缩或膨胀，通过施加磁场的强度改变其长度。 这又导致在优选实施例中是悬臂形式的探针和所施加的磁性膜偏转或弯曲。 探头的随后的运动远远大于通过直接施加磁力获得的运动，并且该效果对所施加的磁场的方向不敏感。
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公开(公告)号：US6051825A
公开(公告)日：2000-04-18
申请号：US100049
申请日：1998-06-19
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
CPC分类号： G01Q60/40 , B82Y35/00 , G01Q30/14 , Y10S977/85 , Y10S977/871
摘要： A scanning probe microscope for measuring the characteristics of a surface of a sample is provided and includes a probe for scanning the surface of a sample to be measured and a sample stage which is adapted to position a sample in the microscope. In a preferred embodiment, the microscope is a conducting atomic force microscope. The microscope also includes a source of voltage in communication with the probe and the sample and a detector for measuring the electrical current to or from the probe and the sample. The probe and the sample are positioned within an enclosure which isolates the probe and the sample from the ambient environment, and the enclosure includes a gas inlet and a gas outlet for controlling the environment in the enclosure to maintain the atmosphere in the enclosure at approximately atmospheric pressure.
摘要翻译： 提供了用于测量样品表面特性的扫描探针显微镜，包括用于扫描待测样品表面的探针和适于将样品置于显微镜中的样品台。 在优选实施例中，显微镜是导电原子力显微镜。 显微镜还包括与探头和样品连通的电压源，以及用于测量来自探针和样品的电流的检测器。 探针和样品位于外壳内，将探头和样品与周围环境隔离，并且外壳包括气体入口和气体出口，用于控制外壳中的环境，以将外壳中的气氛维持在大气压 压力。
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公开(公告)号：US5675154A
公开(公告)日：1997-10-07
申请号：US653200
申请日：1996-05-24
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
摘要： Features for incorporation with scanning probe microscopes are provided which may be used separately or together. The features include constructing the microscope with a hinged top housing providing easy access to the heart of the microscope; a self-aligning and torque limiting magnetic clutch coupling a motor drive powering at least one vertical adjustment screw of the microscope; a removable microscope head for easy adjustment; an optical microscope, optionally mounted to an electronic camera and imaging system, installed adjacent to the head; operation on an inverted microscope stage; bowing error correction; a gas sparging system providing contaminant and noise reduction; a glove box type of loading system so that reactive materials may be safely loaded into the microscope; and a compact desk-top chamber which provides acoustic and vibration isolation.
摘要翻译： 提供用于结合扫描探针显微镜的特征，其可以单独使用或一起使用。 这些特征包括用铰链顶部外壳构建显微镜，可轻松访问显微镜的心脏; 耦合电动机驱动器的自对准和扭矩限制电磁离合器为显微镜的至少一个垂直调节螺钉供电; 一个可拆卸的显微镜头，便于调节; 光学显微镜，可选地安装在电子照相机和成像系统上，安装在头部附近; 在倒置显微镜阶段进行手术; 弯曲误差校正; 提供污染和降噪的气体喷射系统; 手套箱式加载系统，使反应性材料可以安全地载入显微镜; 和一个紧凑的桌面室，提供隔音和隔音。
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公开(公告)号：US5821545A
公开(公告)日：1998-10-13
申请号：US729395
申请日：1996-10-11
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
CPC分类号： G01Q30/10 , H01J2237/2001 , H01J2237/2818 , Y10S977/871
摘要： A heater for use in heating a sample stage of a microscope such as a scanning probe microscope is bonded to a sample stage which sits on a tube of a ceramic thermal insulator which is, in turn, mounted within or part of a tube of the same material. This re-entrant design provides an increased thermal path over straight line distances between the heater and the support structure for the sample stage and thus provides excellent thermal insulation, while also maximizing the thermal stability of the system.
摘要翻译： 用于加热诸如扫描探针显微镜的显微镜的样品台的加热器被结合到位于陶瓷绝热体的管上的样品台上，陶瓷绝热体又安装在其中的管或其一部分中 材料。 这种重新设计的设计提供了加热器和样品台的支撑结构之间的直线距离上的增加的热路径，因此提供了优异的隔热性，同时也使系统的热稳定性最大化。
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公开(公告)号：US5630932A
公开(公告)日：1997-05-20
申请号：US524054
申请日：1995-09-06
CPC分类号： G01Q70/16 , B82Y35/00 , Y10S977/875 , Y10S977/881 , Y10S977/891
摘要： A tip and substrate preparation system for use with scanning probe microscopes (SPMs) includes a scanning tunneling microscope (STM) tip maker, STM tip coater, a substrate treatment method for producing clean, flat gold substrates for STM use and methods for preparing chemically activated substrates for use with an atomic force microscope (AFM). The tip maker includes a coater and an etcher which are preferably controlled by electronic controllers. The etcher provides fully automatic tip etching in a two-stage process in sodium hydroxide (NaOH) solution, permitting platinum alloys to be etched without the use of cyanide-containing chemicals. The coater is used to insulate the tips with soft polymer coatings so as to ensure very low tip leakage current (on the order of about 1 pA typical). The substrate treatment device comprises a quartz plate and a quartz torch for annealing substrates in a hydrogen flame. The chemically activated substrates for atomic force microscopy permit the surface of mica to be modified at will so as to be hydrophobic, hydrophilic, positively or negatively charged.
摘要翻译： 用于扫描探针显微镜（SPM）的尖端和底物制备系统包括扫描隧道显微镜（STM）尖端制造器，STM尖端涂布机，用于制造用于STM的清洁的平坦金基底的基底处理方法和用于制备化学活化的方法 用于原子力显微镜（AFM）的底物。 尖端制造器包括优选由电子控制器控制的涂布机和蚀刻机。 蚀刻器在氢氧化钠（NaOH）溶液中在两步法中提供全自动尖端蚀刻，允许在不使用含氰化合物的情况下对铂合金进行蚀刻。 涂层机用于将尖端与柔性聚合物涂层绝缘，以确保极低的尖端泄漏电流（典型值约为1 pA）。 基板处理装置包括用于在氢火焰中退火基板的石英板和石英手电筒。 用于原子力显微镜的化学活化的底物允许云母的表面随意改性，以便是疏水性的，亲水的，带正电荷或带负电荷的。
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公开(公告)号：US06245204B1
公开(公告)日：2001-06-12
申请号：US09273634
申请日：1999-03-23
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
IPC分类号： G01N2727
CPC分类号： G01Q30/14 , G01Q60/38 , G01Q60/60 , Y10S977/852
摘要： A scanning probe microscope is provided for measuring at least one characteristic of a surface, the microscope including a force sensing probe which is responsive to the at least one characteristic of the surface, an oscillator which moves the position of the probe relative to the surface, a voltage source for establishing an electrical potential between the force sensing probe and the surface, and a detector which detects the oscillating component of the electrical current flow into or out of the probe as a measure of the at least one characteristic of the surface. The microscope can be operated to simultaneously acquire both electrical and topographical information from a surface of a substrate.
摘要翻译： 提供了用于测量表面的至少一个特性的扫描探针显微镜，所述显微镜包括响应于所述表面的至少一个特性的力感测探针，使所述探针相对于所述表面移动位置的振荡器， 用于在力感测探头和表面之间建立电位的电压源，以及检测电流流入或流出探针的振荡分量作为表面的至少一个特征的量度的检测器。 可以操作显微镜以同时从衬底的表面获取电和形貌信息。
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