公开(公告)号：US5325230A

公开(公告)日：1994-06-28

申请号：US801813

申请日：1991-12-06

申请人： Shigeru Yamagata ,  Kyoichi Inaki ,  Toshikatu Matsuya ,  Ralf Takke ,  Stephan Thomas ,  Heinz Fabian

发明人： Shigeru Yamagata ,  Kyoichi Inaki ,  Toshikatu Matsuya ,  Ralf Takke ,  Stephan Thomas ,  Heinz Fabian

IPC分类号： C03B19/14 ,  C03B32/00 ,  C03C3/06 ,  C03C23/00 ,  G02B1/00 ,  G03F7/20 ,  C03C25/02

CPC分类号： G03F7/70958 ,  C03B19/1423 ,  C03B19/1453 ,  C03B32/00 ,  C03C23/007 ,  C03C3/06 ,  G02B1/00 ,  G03F7/70241 ,  C03B2201/07 ,  C03B2201/20 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2207/06 ,  C03B2207/08 ,  C03B2207/12 ,  C03B2207/14 ,  C03B2207/20 ,  C03B2207/32 ,  C03B2207/36 ,  C03B2207/42 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/54 ,  Y02P40/57 ,  Y10S65/90

摘要： The invention relates to lenses, prisms or other optical members which are subjected to high-power ultraviolet light having a wavelength of about 360 nm or less, or ionizing radiation, particularly optical members for use in laser exposure apparatus for lithography, and to blanks for such optical members. The homogeneity of the refractive index distribution and the resistance to optical deterioration when the optical members are exposed for a long period of time to short wavelength ultraviolet light from a laser beam are improved. The optical members are made of high-purity synthetic silica glass material containing at least about 50 wt. ppm of OH groups, and are doped with hydrogen. The refractive index distribution caused by the fictive temperature distribution during heat treatment in the process of producing high-purity silica glass blanks for optical members in accordance with the present invention is offset by the combined refractive index distribution determined by the OH group concentration distribution or by the OH group concentration distribution and the Cl concentration distribution in the glass.

摘要翻译： 本发明涉及经受大约360nm或更小的波长的大功率紫外光的透镜，棱镜或其它光学构件，或者电离辐射，特别是用于光刻的激光曝光装置的光学构件，以及用于 这种光学构件。 当光学元件长时间暴露于来自激光束的短波长紫外光时，折射率分布的均匀性和光学劣化的抵抗性得到改善。 光学构件由含有至少约50重量％的高纯度合成石英玻璃材料制成。 ppm的OH基团，并掺杂氢气。 在根据本发明的用于制造用于光学部件的高纯度二氧化硅玻璃毛坯的过程中由热处理期间的假想温度分布引起的折射率分布由由OH基浓度分布或由OH基浓度分布确定的组合折射率分布或由 玻璃中的OH基浓度分布和Cl浓度分布。

公开(公告)号：US5086352A

公开(公告)日：1992-02-04

申请号：US535205

申请日：1990-06-08

申请人： Shigeru Yamagata ,  Kyoichi Inaki ,  Toshikatu Matsuya ,  Ralf Takke ,  Stephan Thomas ,  Heinz Fabian

发明人： Shigeru Yamagata ,  Kyoichi Inaki ,  Toshikatu Matsuya ,  Ralf Takke ,  Stephan Thomas ,  Heinz Fabian

IPC分类号： C03B19/14 ,  C03B32/00 ,  C03C3/06 ,  C03C23/00 ,  G02B1/00 ,  G03F7/20

CPC分类号： G03F7/70241 ,  C03B19/1423 ,  C03B19/1453 ,  C03B32/00 ,  C03C23/007 ,  C03C3/06 ,  G02B1/00 ,  C03B2201/07 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2207/06 ,  C03B2207/08 ,  C03B2207/12 ,  C03B2207/14 ,  C03B2207/20 ,  C03B2207/32 ,  C03B2207/36 ,  C03B2207/42 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/54 ,  Y02P40/57 ,  Y10S65/90

摘要： The invention relates to lenses, prisms or other optical members which are subjected to high-power ultraviolet light having a wavelength of about 360 nm or less, or ionizing radiation, particularly optical members for use in laser exposure apparatus for lithography, and to blanks for such optical members. The homogeneity of the refractive index distribution and the resistance to optical deterioration when the optical members are exposed for a long period of time to short wavelength ultraviolet light from a laser beam are improved. The optical members are made of high-purity synthetic silica glass material containing at least about 50 wt. ppm of OH groups, and are doped with hydrogen. The refractive index distribution caused by the fictive temperature distribution during heat treatment in the process of producing high-purity silica glass blanks for optical members in accordance with the present invention is offset by the combined refractive index distribution determined by the OH group concentration distribution or by the OH group concentration distribution and the Cl concentration distribution in the glass.

摘要翻译： 本发明涉及经受大约360nm或更小的波长的大功率紫外光的透镜，棱镜或其它光学构件，或者电离辐射，特别是用于光刻的激光曝光装置的光学构件，以及用于 这种光学构件。 当光学元件长时间暴露于来自激光束的短波长紫外光时，折射率分布的均匀性和光学劣化的抵抗性得到改善。 光学构件由含有至少约50重量％的高纯度合成石英玻璃材料制成。 ppm的OH基团，并掺杂氢气。 在根据本发明的用于制造用于光学部件的高纯度二氧化硅玻璃毛坯的过程中由热处理期间的假想温度分布引起的折射率分布由由OH基浓度分布或由OH基浓度分布确定的组合折射率分布或由 玻璃中的OH基浓度分布和Cl浓度分布。

公开(公告)号：US5410428A

公开(公告)日：1995-04-25

申请号：US779737

申请日：1991-10-23

申请人： Shigeru Yamagata ,  Michiyou Kuriyama ,  Kyoichi Inaki ,  Ralf Takke

发明人： Shigeru Yamagata ,  Michiyou Kuriyama ,  Kyoichi Inaki ,  Ralf Takke

IPC分类号： C03B19/14 ,  C03B32/00 ,  C03C3/06 ,  C03C4/00 ,  G02B1/00 ,  G03F7/20 ,  H01S3/034 ,  C03C4/08

CPC分类号： G03F7/70958 ,  C03B19/1453 ,  C03B32/00 ,  C03C3/06 ,  C03C4/0071 ,  G02B1/00 ,  G03F7/70241 ,  H01S3/034 ,  C03B2201/07 ,  C03B2201/21 ,  C03B2201/23 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/10 ,  C03C2203/54 ,  Y10S359/90 ,  Y10S501/905

摘要： This invention relates to an optical member made of highly transparent, high-purity synthetic silica glass, to a method for manufacturing a blank or an optical member of such glass, and to the optical members themselves. The optical members have an absolute refractive index, n.sub.d, of 1.460 or more and a hydrogen molecule concentration of at least 5.times.10.sup.16 molecules/cm.sup.3 uniformly distributed throughout the glass and are particularly well suited for use in apparatus in which they are exposed to a high-power laser beam such as that produced by an excimer laser.

摘要翻译： 本发明涉及由高透明，高纯度的合成石英玻璃制成的光学构件，制造这种玻璃的坯料或光学构件的方法以及光学构件本身。 光学构件的绝对折射率nd为1.460以上，氢分子浓度至少为5×10 16分/ cm 3，均匀分布在整个玻璃中，特别适用于将其暴露于高分子量的设备中， 功率激光束，例如由准分子激光器产生的激光束。

公开(公告)号：US20110272322A1

公开(公告)日：2011-11-10

申请号：US13145063

申请日：2010-10-19

申请人： Shigeru Yamagata ,  Tomomi Usui

发明人： Shigeru Yamagata ,  Tomomi Usui

IPC分类号： B65D85/00 ,  C03B19/06 ,  C03B19/09 ,  C03B20/00

CPC分类号： B65D13/02 ,  C03B19/095 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/54 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57

摘要： The present invention is a method for producing a silica container having a substrate containing gaseous bubbles in its outer peripheral part and an inner layer comprised of a transparent silica glass formed on an inner surface of the substrate, wherein a powdered raw material for forming a substrate containing Li, Na, and K with the total concentration of 50 or less ppm by weight and a powdered raw material for forming an inner layer containing Ca, Sr, and Ba with the total concentration of 50 to 2000 ppm by weight are prepared; a preliminarily molded substrate is formed in a frame; a preliminarily molded inner layer is formed on an inner surface of the preliminarily molded substrate; and the preliminarily molded substrate and molded inner layer are heated from inside thereof by a discharge-heat melting method under a gas atmosphere containing a hydrogen gas or a helium gas or a gas mixture thereof with the ratio of more than 10% by volume thereby making an outer peripheral part of the preliminarily molded substrate to a sintered body and an inner peripheral part of the preliminarily molded substrate and the preliminarily molded inner layer to a fused glass body. With this, a method for producing a silica container, producible with a low cost and having a high durability and dimensional precision, and a container of this sort can be provided.

摘要翻译： 本发明是一种生产二氧化硅容器的方法，该二氧化硅容器具有在其外周部分含有气泡的基底和由形成在基材的内表面上的透明石英玻璃构成的内层，其中形成基材的粉末原料 含有总浓度为50以下的Li，Na和K，并且制备总重量为50〜2000ppm的含有Ca，Sr，Ba的内层的粉末状原料。 在框架中形成预成型基板; 在预成型基板的内表面上形成预成型内层， 并且通过放电加热熔融法在含有大于10体积％的氢气或氦气或其气体混合物的气体气氛下从其内部加热预成型基板和模制内层，从而使 将预成型基板的外周部分与烧结体和预成型基板的内周部分和预成型的内层部分连接到熔融玻璃体。 由此，可以提供一种生产低成本，高耐久性和尺寸精度的二氧化硅容器的制造方法和这种容器。

公开(公告)号：US20110256330A1

公开(公告)日：2011-10-20

申请号：US13140982

申请日：2010-09-01

申请人： Shigeru Yamagata ,  Tomomi Usui

发明人： Shigeru Yamagata ,  Tomomi Usui

IPC分类号： C03B20/00 ,  C03C12/00 ,  B32B17/00 ,  B32B1/04 ,  C01B33/12 ,  C03B19/01

CPC分类号： C03B19/095 ,  C01B33/12 ,  C01P2004/61 ,  C03B2201/21 ,  C03B2201/54 ,  C30B15/10 ,  C30B29/06 ,  Y02P40/57 ,  Y10T428/131 ,  Y10T428/1317 ,  Y10T428/2982

摘要： A method is provided for producing a silica container arranged with a substrate, having a rotational symmetry, comprised of mainly a silica, and containing gaseous bubbles at least in its peripheral part, and an inner layer, formed on an inner surface of the substrate and comprised of a transparent silica glass; wherein a powdered silica, having particle diameter of 10 to 1000 μm, containing Ca, Sr, and Ba with the total concentration of 50 to 5000 ppm by weight, and releasing hydrogen molecules with the amount of 3×1016 to 3×1019 molecules/g upon heating at 1000° C. under vacuum, is prepared at least as a powdered raw material for forming the inner layer, and then the inner layer is formed from the powdered silica as the powdered raw material for forming the inner layer.

摘要翻译： 提供一种制造二氧化硅容器的方法，该二氧化硅容器具有旋转对称性，主要由二氧化硅构成的基板，至少在其周边部分含有气泡，内层形成在基板的内表面上， 由透明石英玻璃组成; 其中粉末二氧化硅的粒径为10〜1000μm，含有总量为50〜5000重量ppm的Ca，Sr，Ba，释放量为3×1016〜3×1019分子/ 至少作为形成内层的粉末状原料制备，然后内层由作为形成内层的粉末状原料的二氧化硅粉末形成。

公开(公告)号：US20110240663A1

公开(公告)日：2011-10-06

申请号：US13131987

申请日：2010-06-25

申请人： Shigeru Yamagata ,  Tomomi Usui

发明人： Shigeru Yamagata ,  Tomomi Usui

IPC分类号： B65D6/00 ,  C03B19/09 ,  B32B1/02

CPC分类号： C03B19/095 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/32 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  Y10T428/131 ,  Y10T428/1317 ,  Y10T428/2982

摘要： A method for producing a silica container having a rotational symmetry is provided. The method includes, forming a preliminarily molded article by feeding a powdered substrate's raw material to an inner wall of an outer frame having aspiration holes with rotating the frame, and forming a silica substrate. The preliminarily molded article is aspirated from an outer peripheral side with controlling a humidity inside the outer frame by ventilating gases present in the outer frame with charging from inside the preliminarily molded article a gas mixture comprised of an O2 gas and an inert gas and made below a prescribed dew-point temperature by dehumidification, and at the same time heated from inside the preliminarily molded article by a discharge-heat melting method with carbon electrodes, thereby making an outer peripheral part of the preliminarily molded article to a sintered body while an inner peripheral part to a fused glass body.

摘要翻译： 提供了具有旋转对称性的二氧化硅容器的制造方法。 该方法包括：通过将粉末状基材的原料供给到具有旋转框架的抽吸孔的外框架的内壁，形成二氧化硅基板来形成预成型品。 从外周侧抽吸预成型品，通过从外部框架内部充填从O 2气体和惰性气体构成的气体混合物从外部框架内的气体通风来控制外框内的湿度， 通过除湿规定的露点温度，同时用碳电极通过放电加热熔融法从预成型体内部加热，由此使预成型品的外周部分成为烧结体，而内部 周边部分为熔融玻璃体。

公开(公告)号：US08733127B2

公开(公告)日：2014-05-27

申请号：US13123629

申请日：2010-06-01

申请人： Shigeru Yamagata ,  Tomomi Usui

发明人： Shigeru Yamagata ,  Tomomi Usui

IPC分类号： C03B19/09

CPC分类号： C03B19/09 ,  C03B19/095 ,  Y02P40/57

摘要： A method for producing a silica container, the method including forming a preliminarily molded silica substrate to an intended shape by feeding a powdered substrate's raw material (silica particles) to an inner wall of a carbon-made outer frame having aspiration holes with rotating the outer frame, and forming the silica substrate wherein the preliminarily molded substrate is degassed by aspiration from its outer peripheral side with charging from an inner peripheral side of the preliminarily molded silica substrate a reducing gas containing more than 10% by volume of an H2 gas, and at the same time heated from inside the preliminarily molded silica substrate by a discharge-heat melting method with carbon electrodes, thereby making an outer peripheral part of the preliminarily molded silica substrate to a sintered body while an inner peripheral part of the preliminarily molded silica substrate to a fused glass body.

摘要翻译： 一种二氧化硅容器的制造方法，其特征在于，通过将粉末状基材的原料（二氧化硅粒子）供给到具有抽吸孔的碳制外框的内壁，将预成型的二氧化硅基板形成为预定形状， 框架，并且形成二氧化硅基板，其中通过从预先模塑的二氧化硅基板的内周侧充填含有超过10体积％的H 2气体的还原气体，从其外周侧抽吸预先模塑的基板被脱气，以及 同时用碳电极通过放电加热熔化法从预成型二氧化硅基板内部加热，从而将预先成型的二氧化硅基板的外周部分制成烧结体，而预成型二氧化硅基板的内周部分 到熔融玻璃体。

公开(公告)号：US08815403B2

公开(公告)日：2014-08-26

申请号：US13131987

申请日：2010-06-25

申请人： Shigeru Yamagata ,  Tomomi Usui

发明人： Shigeru Yamagata ,  Tomomi Usui

IPC分类号： B32B9/04 ,  B32B13/04 ,  B32B5/16 ,  B32B1/08 ,  C03B19/01 ,  C03B37/00 ,  C03B27/012 ,  C03B29/00 ,  C03B11/08 ,  C30B29/06 ,  C30B35/00 ,  C03B19/09 ,  C30B15/10

CPC分类号： C03B19/095 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/32 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  Y10T428/131 ,  Y10T428/1317 ,  Y10T428/2982

摘要： A method for producing a silica container having a rotational symmetry is provided. The method includes forming a preliminarily molded article by feeding a powdered substrate's raw material to an inner wall of an outer frame having aspiration holes with rotating the frame, and forming a silica substrate. The preliminarily molded article is aspirated from an outer peripheral side with controlling a humidity inside the outer frame by ventilating gases present in the outer frame with charging from inside the preliminarily molded article a gas mixture comprised of an O2 gas and an inert gas and made below a prescribed dew-point temperature by dehumidification, and at the same time heated from inside the preliminarily molded article by a discharge-heat melting method with carbon electrodes, thereby making an outer peripheral part of the preliminarily molded article to a sintered body while an inner peripheral part to a fused glass body.

摘要翻译： 提供了具有旋转对称性的二氧化硅容器的制造方法。 该方法包括通过将粉末状基材的原料供给到具有旋转框架的具有抽吸孔的外框架的内壁，并形成二氧化硅基板来形成预成型品。 从外周侧抽吸预成型品，通过从外部框架内部充填从O 2气体和惰性气体构成的气体混合物从外部框架内的气体通风来控制外框内的湿度， 通过除湿规定的露点温度，同时用碳电极通过放电加热熔融法从预成型体内部加热，由此使预成型品的外周部分成为烧结体，而内部 周边部分为熔融玻璃体。

公开(公告)号：US20140041575A1

公开(公告)日：2014-02-13

申请号：US14112190

申请日：2013-01-22

申请人： Shigeru Yamagata

发明人： Shigeru Yamagata

IPC分类号： C30B15/10

CPC分类号： C30B15/10 ,  C03B19/095 ,  C03B2201/03 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57 ,  Y10T117/1032

摘要： The present invention is directed to a silica container for pulling single crystal silicon, the silica container including a straight body portion, a curved portion, and a bottom portion, wherein the outside of the silica container is made of opaque silica glass containing gaseous bubbles, the inside of the silica container is made of transparent silica glass containing substantially no gaseous bubble, and, on the inner surface of the bottom portion, a silica glass layer containing the OH group in a concentration of more than 300 ppm by mass but 3000 ppm by mass or less, the silica glass layer having a thickness of 20 μm or more but 1000 μm or less, is formed. As a result, a low-cost silica container for pulling single crystal silicon, the silica container that can reduce cavity defects called voids and pinholes in pulled single crystal silicon, is provided.

摘要翻译： 本发明涉及一种用于拉取单晶硅的二氧化硅容器，该二氧化硅容器包括直体部分，弯曲部分和底部部分，其中二氧化硅容器的外部由含有气泡的不透明二氧化硅玻璃制成， 二氧化硅容器的内部由基本上不含气泡的透明石英玻璃制成，并且在底部的内表面上含有浓度大于300质量ppm但为3000ppm的OH基的二氧化硅玻璃层 以下，形成厚度为20μm以上且1000μm以下的石英玻璃层。 结果，提供了一种用于拉制单晶硅的低成本二氧化硅容器，可以减少被拉制的单晶硅中称为空洞和针孔的空洞缺陷的二氧化硅容器。

公开(公告)号：US06451719B1

公开(公告)日：2002-09-17

申请号：US09692014

申请日：2000-10-19

申请人： Shigeru Yamagata

发明人： Shigeru Yamagata

IPC分类号： C03C306

CPC分类号： G03F7/70958 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/54 ,  Y10S501/905

摘要： A silica glass optical material for transmitting light with a wavelength of from 155 to 195 nm emitted from an excimer laser or an excimer lamp, which comprises silica glass optical material of ultrahigh purity, containing from 1 to 100 wtppm of OH groups, from 5×1016 to 5×1019 molecules/cm3 of H2, and from 10 to 10,000 wtppm of F, but substantially free from halogens other than F, and having a fluctuation in refractive index, &Dgr;n, of from 3×10−6 to 3×10−7.

摘要翻译： 一种二氧化硅玻璃光学材料，用于从准分子激光或准分子灯发射波长为155至195nm的光，其包括含有1至100重量ppm的OH基团的超高纯度的石英玻璃光学材料，从5×10 16至 5×1019分子/ cm 3的H 2和10至10,000重量ppm的F，但基本上不含F以外的卤素，并且具有3×10 -6至3×10 -7的折射率DELTAn。