公开(公告)号：US20160168010A1

公开(公告)日：2016-06-16

申请号：US14958024

申请日：2015-12-03

申请人： Corning Incorporated

发明人： Sezhian Annamalai ,  Carlos Alberto Duran ,  Kenneth Edward Hrdina

IPC分类号： C03C3/06 ,  C03B25/02 ,  C03B19/14 ,  C03C3/112 ,  C03C4/00

CPC分类号： C03C3/06 ,  C03B19/1453 ,  C03B19/1461 ,  C03B25/02 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/14 ,  C03B2201/23 ,  C03B2201/32 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/50 ,  C03B2201/54 ,  C03C3/112 ,  C03C4/00 ,  C03C2201/12 ,  C03C2201/14 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2201/50 ,  C03C2201/54 ,  C03C2203/52

摘要： A doped silica-titania glass article is provided that includes a glass article having a glass composition comprising (i) a silica-titania base glass, (ii) a fluorine dopant, and (iii) a second dopant. The fluorine dopant has a concentration of fluorine of up to 5 wt. % and the second dopant comprises one or more oxides selected from the group consisting of Al, Nb, Ta, B, Na, K, Mg, Ca and Li oxides at a total oxide concentration from 50 ppm to 6 wt. %. Further, the glass article has an expansivity slope of less than 0.5 ppb/K2 at 20° C. The second dopant can be optional. The composition of the glass article may also contain an OH concentration of less than 100 ppm.

摘要翻译： 提供掺杂二氧化硅 - 二氧化钛玻璃制品，其包括具有玻璃组合物的玻璃制品，所述玻璃组合物包含（i）二氧化硅 - 二氧化钛基底玻璃，（ii）氟掺杂剂和（iii）第二掺杂剂。 氟掺杂剂的氟浓度高达5wt。 ％，第二掺杂剂包含一种或多种选自Al，Nb，Ta，B，Na，K，Mg，Ca和Li氧化物的氧化物，其总氧化物浓度为50ppm至6wt。 ％。 此外，玻璃制品在20℃下具有小于0.5ppb / K 2的膨胀斜率。第二掺杂剂可以是任选的。 玻璃制品的组成也可以含有小于100ppm的OH浓度。

公开(公告)号：US20160147010A1

公开(公告)日：2016-05-26

申请号：US14943190

申请日：2015-11-17

申请人： SUMITOMO ELECTRIC INDUSTRIES, LTD.

发明人： Yoshiaki TAMURA ,  Tetsuya HARUNA ,  Yoshihiro SAITO ,  Yuki KAWAGUCHI ,  Masaaki HIRANO

IPC分类号： G02B6/02

CPC分类号： G02B6/02 ,  C03B37/01211 ,  C03B37/014 ,  C03B37/01807 ,  C03B37/01861 ,  C03B37/01892 ,  C03B2201/06 ,  C03B2201/07 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/50 ,  C03B2203/22 ,  C03B2203/26 ,  C03B2205/40 ,  C03C3/06 ,  C03C13/045 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/50 ,  C03C2203/40

摘要： An optical fiber containing an alkali metal and capable of reducing Rayleigh scattering loss is provided. An optical fiber has a core and a cladding made of silica glass and enclosing the core. The cladding contains fluorine and has a refractive index lower than the refractive index of the core. The core contains first group dopants selected from the group of Na element, K element, or a compound thereof at an average concentration of 0.2 ppm or more and 10 ppm or less. The core also contains second group dopants for reducing the viscosity of silica glass and having a diffusion coefficient of 1×10−12 cm2/s or more and smaller than the diffusion coefficient of the first group dopants, by an average concentration of 0.2 ppm or more at a temperature of 2000° C. to 2300° C.

摘要翻译： 提供含有碱金属并能够降低瑞利散射损失的光纤。 光纤具有由石英玻璃制成的芯和包层，并且包围芯。 包层含氟，折射率低于芯的折射率。 核心包含平均浓度为0.2ppm以上且10ppm以下的选自Na元素，K元素或其化合物的第一族掺杂剂。 该芯还含有第二组掺杂剂，用于降低石英玻璃的粘度，并且扩散系数为1×10-12cm2 / s以上且小于第一组掺杂剂的扩散系数，平均浓度为0.2ppm或 更高温度在2000°C至2300°C

公开(公告)号：US09139466B2

公开(公告)日：2015-09-22

申请号：US13352644

申请日：2012-01-18

申请人： Masaaki Hirano ,  Tetsuya Haruna ,  Yoshiaki Tamura

发明人： Masaaki Hirano ,  Tetsuya Haruna ,  Yoshiaki Tamura

IPC分类号： G02B6/00 ,  C03B37/018

CPC分类号： C03B37/01807 ,  C03B37/01853 ,  C03B2201/07 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/50 ,  Y10T428/294

摘要： An optical fiber preform includes a core portion, in which the core portion includes an alkali-metal-doped core glass portion doped with an alkali metal, the maximum concentration of oxygen molecules in the core portion is 30 mol ppb or more, and the average concentration of the alkali metal in the core portion is 5 atomic ppm or more. A method of manufacturing an optical fiber preform includes an alkali-metal-doping step of doping a pipe composed of silica-based glass with an alkali metal, an oxygen-molecule-doping step of doping the glass pipe with oxygen molecules, and a collapsing step of collapsing the glass pipe by heating the glass pipe, in which the optical fiber preform is manufactured.

摘要翻译： 光纤预制棒包括芯部，芯部包括掺杂有碱金属的碱金属掺杂的芯玻璃部分，芯部中的氧分子的最大浓度为30mol ppb以上，平均 芯部中的碱金属的浓度为5原子ppm以上。 制造光纤预制棒的方法包括：碱金属掺杂步骤，用碱金属掺杂由二氧化硅基玻璃构成的管，用氧分子掺杂玻璃管的氧分子掺杂步骤，以及塌陷 通过加热其中制造光纤预制棒的玻璃管来塌缩玻璃管的步骤。

公开(公告)号：US20140373571A1

公开(公告)日：2014-12-25

申请号：US14269409

申请日：2014-05-05

申请人： Corning Incorporated

发明人： Kenneth Edward Hrdina ,  Changyi Lai ,  Lisa Anne Moore ,  Ulrich Wilhelm Heinz Neukirch ,  William Rogers Rosch

IPC分类号： C03C23/00

CPC分类号： C03C23/0095 ,  C03B19/1453 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/22 ,  C03C3/06 ,  C03C4/0085 ,  C03C21/007 ,  C03C2201/21 ,  C03C2201/22 ,  C03C2201/23 ,  C03C2203/54

摘要： A fused silica glass article having greater resistance to damage induced by exposure to laser radiation such as laser induced wavefront distortion at deep ultraviolet (DUV) wavelengths, and behaviors such as fluence dependent transmission, which are related to intrinsic defects in the glass. The improved resistance to laser damage may be achieved in some embodiments by loading the glass article with molecular hydrogen (H2) at temperatures of about 400° C. or less, or 350° C. or less. The combined OH and deuteroxyl (OD) concentration may be less than 10 ppm by weight. In other embodiments, the improved resistance may be achieved by providing the glass with 10 to 60 ppm deuteroxyl (OD) species by weight. In still other embodiments, improved resistance to such laser damage may be achieved by both loading the glass article with molecular hydrogen at temperatures of about 350° C. or less and providing the glass with less than 10 ppm combined OH and OD, or 10 to 60 ppm OD by weight.

摘要翻译： 一种熔融石英玻璃制品，其具有较强的耐受暴露于激光辐射（例如在深紫外（DUV）波长处的激光诱导波前失真）以及与玻璃中的固有缺陷有关的诸如通量依赖透射的行为的损伤。 在一些实施方案中，可以通过在约400℃或更低或350℃或更低的温度下加载具有分子氢（H 2）的玻璃制品来实现对激光损伤的改进的抗性。 组合的OH和氘氧化（OD）浓度可以小于10ppm重量。 在其它实施方案中，可以通过为玻璃提供10至60ppm的重量的氘氧化（OD）种类来实现改进的电阻。 在另外的其它实施方案中，可以通过在大约350℃或更低的温度下将玻璃制品加载到分子氢中来提供对这种激光损伤的改进的抗性，并且使玻璃具有小于10ppm的组合的OH和OD，或10至 60ppm OD重量。

公开(公告)号：US08017536B2

公开(公告)日：2011-09-13

申请号：US12226861

申请日：2007-09-04

申请人： Juergen Weber ,  Tatsuhiro Sato ,  Ralf Schneider ,  Achim Hofmann ,  Christian Gebauer

发明人： Juergen Weber ,  Tatsuhiro Sato ,  Ralf Schneider ,  Achim Hofmann ,  Christian Gebauer

IPC分类号： C03C3/06 ,  C03B19/06 ,  C03B19/00

CPC分类号： C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B20/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/24 ,  C03B2201/34 ,  C03B2201/36 ,  C03C4/20 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2203/10 ,  C03C2203/54

摘要： The invention starts from a known component of quartz glass for use in semiconductor manufacture, which component at least in a near-surface region shows a co-doping of a first dopant and of a second oxidic dopant, said second dopant containing one or more rare-earth metals in a concentration of 0.1-3% by wt. each (based on the total mass of SiO2 and dopant). Starting from this, to provide a quartz glass component for use in semiconductor manufacture in an environment with etching action, which component is distinguished by both high purity and high resistance to dry etching and avoids known drawbacks caused by co-doping with aluminum oxide, it is suggested according to the invention that the first dopant should be nitrogen and that the mean content of metastable hydroxyl groups of the quartz glass is less than 30 wtppm.

摘要翻译： 本发明从用于半导体制造的石英玻璃的已知组件开始，至少在近表面区域中的该组分表现出第一掺杂剂和第二氧化物掺杂剂的共掺杂，所述第二掺杂剂含有一种或多种稀有金属 - 浓度为0.1-3重量％的矿物金属。 每个（基于SiO 2和掺杂剂的总质量）。 从此开始，为了在具有蚀刻作用的环境中提供用于半导体制造的石英玻璃组分，该组分通过高纯度和高耐干蚀刻性而被区分，并避免了与氧化铝共掺杂引起的已知缺点。 根据本发明建议第一掺杂剂应为氮，并且石英玻璃的亚稳态羟基的平均含量小于30重量ppm。

公开(公告)号：US08012894B2

公开(公告)日：2011-09-06

申请号：US12151172

申请日：2008-05-05

申请人： Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Kenneth Edward Hrdina ,  Rostislav Radievich Khrapko

发明人： Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Kenneth Edward Hrdina ,  Rostislav Radievich Khrapko

IPC分类号： C03C3/06 ,  C03B19/06 ,  C03B19/00 ,  C03B37/00 ,  C03B37/018

CPC分类号： C03C3/06 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/21 ,  C03B2201/22 ,  C03B2201/23 ,  C03B2201/31 ,  C03C2201/22 ,  C03C2201/23 ,  C03C2203/54

摘要： A fused silica glass and a fused silica article having a combined concentration of at least one of OH and OD of up to about 50 ppm. The fused silica glass is formed by drying a fused silica soot blank or preform in an inert atmosphere containing a drying agent, followed by removal of residual drying agent from the dried soot blank by heating the dried soot blank in an atmosphere comprising an inert gas and of oxygen.

摘要翻译： 熔融石英玻璃和熔融二氧化硅制品，其具有高达约50ppm的OH和OD中的至少一种的组合浓度。 熔融二氧化硅玻璃通过在含有干燥剂的惰性气氛中干燥熔融二氧化硅烟灰坯料或预型体而形成，然后通过在包含惰性气体的气氛中加热干燥的烟灰坯料从干燥的烟灰坯中除去残留的干燥剂， 的氧气。

公开(公告)号：US20110092354A1

公开(公告)日：2011-04-21

申请号：US12902238

申请日：2010-10-12

申请人： Carlos Duran ,  Kenneth Edward Hrdina ,  Ulrich Wilhelm Heinz Neukirch

发明人： Carlos Duran ,  Kenneth Edward Hrdina ,  Ulrich Wilhelm Heinz Neukirch

IPC分类号： C03C3/04 ,  C03B25/00

CPC分类号： C03B25/02 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/22 ,  C03B2201/23

摘要： A method of making a silica glass having a uniform fictive temperature. The glass article is heated at a target fictive temperature, or heated or cooled at a rate that is less than the rate of change of the fictive temperature, for a time that is sufficient to allow the fictive temperature of the glass to come within 3° C. of the target fictive temperature. The silica glass is then cooled from the target fictive temperature to a temperature below the strain point of the glass at a cooling rate that is greater than the relaxation rate of the glass at the target fictive temperature. The silica glass has a fictive temperature that varies by less than 3° C. after the annealing step. A silica glass made by the method is also described.

摘要翻译： 制造具有均匀的假想温度的二氧化硅玻璃的方法。 将玻璃制品在目标假想温度下加热，或以低于假想温度变化率的速率加热或冷却一段足以使玻璃的假想温度达到3°的时间 C.目标虚构温度。 然后将二氧化硅玻璃从目标假想温度冷却至低于玻璃应变点的温度，其冷却速率大于目标假想温度下玻璃的松弛率。 二氧化硅玻璃具有在退火步骤之后变化小于3℃的假想温度。 还描述了通过该方法制备的二氧化硅玻璃。

公开(公告)号：US07501367B2

公开(公告)日：2009-03-10

申请号：US11403267

申请日：2006-04-13

申请人： Bodo Kuehn ,  Stephan Ochs ,  Steffen Kaiser ,  Denis Kassube

发明人： Bodo Kuehn ,  Stephan Ochs ,  Steffen Kaiser ,  Denis Kassube

IPC分类号： C03C3/06

CPC分类号： C03C3/06 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  Y02P40/57

摘要： To provide an optical component of quartz glass for use in a projection lens system for immersion lithography with an operating wavelength below 250 nm, which is optimized for use with linearly polarized UV laser radiation and particularly with respect to compaction and birefringence induced by anisotropic density change, it is suggested according to the invention that the quartz glass should show the combination of several properties: particularly a glass structure essentially without oxygen defects, a mean content of hydroxyl groups of less than 60 wt ppm, a mean content of fluorine of less than 10 wt ppm, a mean content of chlorine of less than 1 wt ppm. A method for producing such an optical component comprises the following method steps: producing and drying an SiO2 soot body under reducing conditions and treating the dried soot body before or during vitrification with a reagent reacting with oxygen defects of the quartz glass structure.

摘要翻译： 提供用于投影透镜系统的石英玻璃的光学部件，用于工作波长低于250nm的浸没式光刻，其被优化用于线偏振UV激光辐射，特别是关于由各向异性密度变化引起的压实和双折射 根据本发明，建议石英玻璃应显示几种性能的组合：特别是基本上没有氧缺陷的玻璃结构，羟基的平均含量小于60重量ppm，氟的平均含量小于 10重量ppm，氯的平均含量小于1重量ppm。 一种制造这种光学元件的方法包括以下方法步骤：在还原条件下制备和干燥SiO 2烟炱体，并在玻璃化之前或期间用与石英玻璃结构的氧缺陷反应的试剂处理干燥的烟炱体。

公开(公告)号：US20080066497A1

公开(公告)日：2008-03-20

申请号：US11630405

申请日：2006-03-30

申请人： Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

发明人： Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

IPC分类号： C03C3/06 ,  C03B19/14 ,  H01L21/00

CPC分类号： C03C3/06 ,  C03B19/06 ,  C03B19/09 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/24 ,  C03B2201/32 ,  C03C15/00 ,  C03C19/00 ,  C03C23/0025 ,  C03C23/006 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/32 ,  C03C2201/50 ,  C03C2203/54 ,  C30B25/12 ,  C30B31/14 ,  C30B35/00 ,  Y02P40/57

摘要： An ideal quartz glass for a wafer jig for use in an environment having an etching effect is distinguished by both high purity and high resistance to dry etching. To indicate a quartz glass that substantially fulfills these requirements, it is suggested according to the invention that the quartz glass is doped with nitrogen at least in a near-surface area, has a mean content of metastable hydroxyl groups of less than 30 wt ppm and that its fictive temperature is below 1250° C. and its viscosity is at least 1013 dPa·s at a temperature of 1200° C. An economic method for producing such a quartz glass comprises the following method steps: melting an SiO2 raw material to obtain a quartz glass blank, the SiO2 raw material or the quartz glass blank being subjected to a dehydration measure, heating the SiO2 raw material or the quartz glass blank to a nitriding temperature in the range between 1050° C. and 1850° C. in an ammonia-containing atmosphere, a temperature treatment by means of which the quartz glass of the quartz glass blank is set to a fictive temperature of 1250° C. or less, and a surface treatment of the quartz glass blank with formation of the quartz glass jig.

摘要翻译： 用于具有蚀刻效果的环境中的晶片夹具的理想石英玻璃的特征在于高纯度和高耐干蚀刻性。 为了表明基本满足这些要求的石英玻璃，根据本发明提出，石英玻璃至少在近表面积中掺杂氮，其平均含量小于30重量ppm， 其假想温度低于1250℃，在1200℃的温度下其粘度至少为10-13Pa。制备这种石英玻璃的经济方法包括以下方法步骤 ：将SiO 2原料熔化，得到石英玻璃坯料，将SiO 2原料或石英玻璃坯料进行脱水处理，加热SiO _{2 原料或石英玻璃坯料，在含氨气氛中在1050℃至1850℃的范围内的氮化温度，使用石英玻璃的石英玻璃 将玻璃坯料设定为1250℃以下的假想温度，进行表面处理 石英玻璃夹具形成石英玻璃夹具。}

公开(公告)号：US20060234848A1

公开(公告)日：2006-10-19

申请号：US11403267

申请日：2006-04-13

申请人： Bodo Kuehn ,  Stefan Ochs ,  Steffen Kaiser ,  Denis Kassube

发明人： Bodo Kuehn ,  Stefan Ochs ,  Steffen Kaiser ,  Denis Kassube

IPC分类号： C03C3/06 ,  C03B19/06 ,  C03B19/00

CPC分类号： C03C3/06 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  Y02P40/57

摘要： To provide an optical component of quartz glass for use in a projection lens system for immersion lithography with an operating wavelength below 250 nm, which is optimized for use with linearly polarized UV laser radiation and particularly with respect to compaction and birefringence induced by anisotropic density change, it is suggested according to the invention that the quartz glass should show the combination of several properties: particularly a glass structure essentially without oxygen defects, a mean content of hydroxyl groups of less than 60 wt ppm, a mean content of fluorine of less than 10 wt ppm, a mean content of chlorine of less than 1 wt ppm. A method for producing such an optical component comprises the following method steps: producing and drying an SiO2 soot body under reducing conditions and treating the dried soot body before or during vitrification with a reagent reacting with oxygen defects of the quartz glass structure.

摘要翻译： 提供用于投影透镜系统的石英玻璃的光学部件，用于工作波长低于250nm的浸没式光刻，其被优化用于线偏振UV激光辐射，特别是关于由各向异性密度变化引起的压实和双折射 根据本发明，建议石英玻璃应显示几种性能的组合：特别是基本上没有氧缺陷的玻璃结构，羟基的平均含量小于60重量ppm，氟的平均含量小于 10重量ppm，氯的平均含量小于1重量ppm。 制造这种光学部件的方法包括以下步骤：在还原条件下制备和干燥SiO 2烟炱体，并在玻璃化之前或期间用与氧缺陷反应的试剂处理干燥的烟炱体 石英玻璃结构。