摘要:
A method of producing bi-modal particles includes the steps of igniting a first precursor gas using a primary burner thereby producing a first plurality of particles of a first size, fluidly transporting the first plurality of particles down a particle tube, igniting a second precursor gas using a secondary burner thereby producing a second plurality of particles of a second size, flowing the second plurality of particles into the first plurality of particles, and capturing the first and second plurality of particles.
摘要:
A soot glass deposit body is manufactured by placing a starting rod and a burner 22 for producing glass particulates in a reaction container, introducing a source material gas to the burner 22 through a supplying pipe 26, producing glass particulates by a pyrolytic oxidation reaction of the source material gas in a flame formed by the burner 22, and depositing the produced glass particulates on the starting rod. At the time, the source material gas to be supplied to the burner 22 is a siloxane, the burner 22 is heated so that temperature of the burner 22 falls within the range of from −30° C. to +30° C. relative to the boiling point of the siloxane, and also temperature of the supplying pipe is controlled within the range of from the boiling point of the siloxane to the boiling point plus 30° C.
摘要:
A member is made of titania-doped quartz glass in which striae have a curvature radius of at least 150 mm in a surface perpendicular to an EUV-reflecting surface. The member free of exposed striae and having a high flatness is useful in EUV lithography.
摘要:
A burner module comprising a burner gas inlet block, a lower flow plate, an upper flow plate, a burner gas flow disperser, and a burner gas discharge block. The burner gas inlet block, the burner gas flow disperser, and the burner gas discharge block each comprising a plurality of channels separated by partitions. The partitions of the burner gas flow disperser and the burner gas discharge block comprising a knife edge. The upper flow plate and the lower flow plate each comprising a plurality of pressure holes in fluid communication with the plurality of channels. Additionally, the method of forming a glass sheet or ribbon using the disclosed burner module and a glass sheet or ribbon formed using the method.
摘要:
A synthetic quartz glass ingot is prepared by vapor phase hydrolyzing or oxidatively decomposing a silica feedstock in a flame to form fine particles of silica, depositing the silica particles on a target and melting and vitrifying the particles to form a synthetic quartz glass ingot on the target while the target is moved back and forth. The method further comprises: (i) continuously feeding the silica feedstock at a predetermined rate, (ii) keeping the flame in constant contact with an overall growing face, (iii) cyclically repeating the back and forth movement of the target at a predetermined speed, and (iv) maintaining the shape of the growing ingot unchanged.
摘要:
A burner for a vapour deposition process has a central nozzle for ejecting a glass precursor material, at least a crown of nozzles surrounding said central nozzle for ejecting a flame reactant, and a circular nozzle between said central nozzle and said crown of nozzles for ejecting an innershield gas, wherein the central nozzle has a concave shape in a cross section in the axial plane and, preferably, a symmetry about an axial plane.
摘要:
A burner for fabricating an optical fiber preform, which can suppress the adhesion and deposition of glass particles to the front end of the burner without enlarging the burner diameter, is provided. The burner has a first tube, a second tube and a third tube coaxially arranged and define a glass raw material gas port, a sealing gas port, and a burnable gas port by the front end portions thereof, and a plurality of small diameter nozzles arranged between the second tube and the third tube, each of the nozzles arranged on a concentric circle relative to the glass raw material gas port and defines a combustion assisting gas port by the front end portion thereof, the front end portion of the second tube protrudes ahead of that of the first tube, and the front end portion of the third tube protrudes ahead of those of the second tube and each of the nozzles.
摘要:
A multi-nozzle type burner is used for producing a porous glass preform, the burner having small variations in deposition efficiency with the burner tip being not burned even when axial shift occurs at the concentric multi-tube part of the burner. The present invention provides a burner for producing a porous glass preform with a concentric multi-tube structure, comprising a glass material gas jet port in a center, a plurality of gas jet ports concentrically disposed outside the glass material gas jet port, and small-diameter gas jet ports which are disposed in a line or a plurality of lines concentrically to the glass material gas jet port so as to be enclosed in one of the gas jet ports other than the gas jet ports in the center and at an outermost side, the small-diameter gas jet ports in the same line having an identical focal length. In the present invention, the gas jet ports disposed outside the gas jet port enclosing the small-diameter gas jet ports are each reduced in diameter in a direction toward a burner tip, and satisfy a relationship of L1>L2>L3> . . . >Ln, where L1, L2, L3, . . . Ln represent lengths from the burner tip to diameter-reduction start positions of the outside-disposed gas jet ports in this order from the inside, respectively, so that the more outward the gas jet port is located, the closer to the burner tip the diameter-reduction start position of the gas jet port is.
摘要:
A burner for fabricating an optical fiber preform, which can suppress the adhesion and deposition of glass particles to the front end of the burner without enlarging the burner diameter, is provided. The burner has a first tube, a second tube and a third tube coaxially arranged and define a glass raw material gas port, a sealing gas port, and a burnable gas port by the front end portions thereof, and a plurality of small diameter nozzles arranged between the second tube and the third tube, each of the nozzles arranged on a concentric circle relative to the glass raw material gas port and defines a combustion assisting gas port by the front end portion thereof, the front end portion of the second tube protrudes ahead of that of the first tube, and the front end portion of the third tube protrudes ahead of those of the second tube and each of the nozzles.
摘要:
Method and burner for increasing the deposition rate of porous glass deposit in the manufacture of optical preforms, by modifying the cross-sectional shape of the flow of glass particles impacting onto a target preform. In particular, the cross-section of the flow of glass particles is modified by increasing the dimension of the flow from a circular cross-section to one having a major and minor axis in a direction substantially perpendicular to the longitudinal axis of the target preform.