发明授权
US06451719B1 Silica glass optical material for excimer laser and excimer lamp, and method for producing the same
有权
用于准分子激光和准分子灯的二氧化硅玻璃光学材料及其制备方法
- 专利标题： Silica glass optical material for excimer laser and excimer lamp, and method for producing the same
- 专利标题（中）： 用于准分子激光和准分子灯的二氧化硅玻璃光学材料及其制备方法
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申请号： US09692014申请日： 2000-10-19
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公开(公告)号： US06451719B1公开(公告)日： 2002-09-17
- 发明人: Shigeru Yamagata
- 申请人： Shigeru Yamagata
- 优先权： JP11-296101 19991019
- 主分类号： C03C306
- IPC分类号： C03C306
摘要：
A silica glass optical material for transmitting light with a wavelength of from 155 to 195 nm emitted from an excimer laser or an excimer lamp, which comprises silica glass optical material of ultrahigh purity, containing from 1 to 100 wtppm of OH groups, from 5×1016 to 5×1019 molecules/cm3 of H2, and from 10 to 10,000 wtppm of F, but substantially free from halogens other than F, and having a fluctuation in refractive index, &Dgr;n, of from 3×10−6 to 3×10−7.
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