FABRICATING METHODS OF SEMICONDUCTOR DEVICES AND PICK-UP APPARATUSES OF SEMICONDUCTOR DEVICES THEREIN
    2.
    发明申请
    FABRICATING METHODS OF SEMICONDUCTOR DEVICES AND PICK-UP APPARATUSES OF SEMICONDUCTOR DEVICES THEREIN 审中-公开
    半导体器件的制造方法及其半导体器件的拾取器件

    公开(公告)号:US20130149817A1

    公开(公告)日:2013-06-13

    申请号:US13559141

    申请日:2012-07-26

    IPC分类号: H01L21/762

    摘要: A fabricating method of a semiconductor device may include forming a semiconductor die on a supporting wafer, and picking up the die from the wafer by attaching to the die a transfer unit, the transfer unit including a head unit configured to enable twisting movement, and performing the twisting movement. A fabricating method of a semiconductor device may include forming a first semiconductor device on a supporting wafer; and picking up the first semiconductor device from the wafer, moving the first semiconductor device onto a second semiconductor device, and bonding the first semiconductor device to the second semiconductor device while maintaining the first semiconductor device oriented so that a surface faces upwardly. A fabricating method of a semiconductor device may include forming a first semiconductor device on a supporting wafer, attaching to the first semiconductor device a transfer unit configured to enable twisting movement, and performing the twisting movement.

    摘要翻译: 半导体器件的制造方法可以包括在支撑晶片上形成半导体管芯,并且通过将转移单元附接到管芯而从晶片上拾取管芯,所述转移单元包括构造成能够进行扭转运动的头单元,以及执行 扭转运动。 半导体器件的制造方法可以包括在支撑晶片上形成第一半导体器件; 以及从所述晶片拾取所述第一半导体器件,将所述第一半导体器件移动到第二半导体器件上,并且将所述第一半导体器件接合到所述第二半导体器件,同时保持所述第一半导体器件定向成使得表面朝上。 半导体器件的制造方法可以包括在支撑晶片上形成第一半导体器件,附接到第一半导体器件,被配置为能够进行扭转运动并执行扭转运动的转移单元。