公开(公告)号：US10410722B2

公开(公告)日：2019-09-10

申请号：US15987207

申请日：2018-05-23

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sungwoo Kim ,  Bong-Soo Kim ,  Youngbae Kim ,  Kijae Hur ,  Gwanhyeob Koh ,  Hyeongsun Hong ,  Yoosang Hwang

IPC: H01L27/00 ,  G11C14/00 ,  H01L27/24 ,  H01L23/528 ,  H01L45/00 ,  G11C13/00 ,  G11C11/00 ,  G11C5/02 ,  H01L27/108

Abstract: A semiconductor device includes: a first memory section, a first peripheral circuit section, and a second peripheral circuit section that are disposed on a substrate; and a second memory section and a wiring section that are stacked on the second peripheral circuit section, wherein the first memory section includes a plurality of first memory cells, each of the first memory cells including a cell transistor and a capacitor connected to the cell transistor, the second memory section includes a plurality of second memory cells, each of the second memory cells including a variable resistance element and a select element coupled in series to each other, and the wiring section includes a plurality of line patterns, wherein the line patterns and the second memory cells are higher than the capacitor with respect to the substrate.

公开(公告)号：US10580469B2

公开(公告)日：2020-03-03

申请号：US16460284

申请日：2019-07-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sungwoo Kim ,  Bong-Soo Kim ,  Youngbae Kim ,  Kijae Hur ,  Gwanhyeob Koh ,  Hyeongsun Hong ,  Yoosang Hwang

IPC: H01L27/00 ,  G11C11/00 ,  G11C5/02 ,  G11C14/00 ,  H01L27/108 ,  H01L45/00 ,  H01L27/24 ,  H01L49/02 ,  H01L23/528

Abstract: A semiconductor device including: a first memory section, a first peripheral circuit section, and a second peripheral circuit section that are disposed next to each other on a substrate; and a second memory section laterally spaced apart from the first memory section, the second peripheral circuit section and the second memory section disposed next to each other on the substrate, wherein the first memory section includes a plurality of first memory cells, each of the first memory cells including a cell transistor and a capacitor connected to the cell transistor, and the second memory section includes a plurality of second memory cells, each of the second memory cells including a variable resistance element and a select element coupled in series to each other, wherein the second memory cells are higher from the substrate than each of the capacitors.

公开(公告)号：US11183500B2

公开(公告)日：2021-11-23

申请号：US16826655

申请日：2020-03-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hoju Song ,  Seokhyun Kim ,  Youngjun Kim ,  Jinhyung Park ,  Hyeran Lee ,  Bongsoo Kim ,  Sungwoo Kim

IPC: H01L27/108

Abstract: A method of manufacturing a semiconductor memory device includes forming bit line structures extending in a first horizontal direction on a substrate, and insulating spacer structures covering opposite sidewalls of each bit line structure, forming a preliminary buried contact material layer and a mold layer to respectively fill lower and upper portions of a space between a pair of insulating spacer structures, patterning the mold layer and the preliminary buried contact material layer into mold patterns spaced apart from each other in a second horizontal direction and buried contacts spaced apart from each other in the second horizontal direction, forming insulating fences among the mold patterns separated from each other and among the buried contacts separated from each other, removing the mold patterns to expose the buried contacts, and forming landing pads on the exposed buried contacts, each landing pad connected to a corresponding one of the exposed buried contacts.

公开(公告)号：US11968824B2

公开(公告)日：2024-04-23

申请号：US18137169

申请日：2023-04-20

Applicant: Samsung Electronics Co., Ltd.

Inventor： Youngjun Kim ,  Seokhyun Kim ,  Jinhyung Park ,  Hoju Song ,  Hyeran Lee ,  Sungwoo Kim ,  Bongsoo Kim

IPC: H01L27/10 ,  H01L21/768 ,  H10B12/00

CPC classification number: H10B12/485 ,  H01L21/76829 ,  H10B12/0335 ,  H10B12/09 ,  H10B12/315

Abstract: A semiconductor device includes a bit line structure, first and second capping patterns, first and second contact plug structures, and a capacitor. The bit line structure extends on a cell region and a dummy region. The first capping pattern is adjacent the bit line structure on the cell region. The second capping pattern is adjacent the bit line structure on the dummy region. The first contact plug structure is adjacent the bit line structure and the first capping pattern on the cell region, and includes a lower contact plug and a first upper contact plug sequentially stacked. The second contact plug structure is adjacent the bit line structure and the second capping pattern on the dummy region, and includes a dummy lower contact plug and a second upper contact plug sequentially stacked. The capacitor contacts an upper surface of the first contact plug structure on the cell region.

公开(公告)号：US20230255021A1

公开(公告)日：2023-08-10

申请号：US18137169

申请日：2023-04-20

Applicant: Samsung Electronics Co., Ltd.

Inventor： Youngjun Kim ,  Seokhyun Kim ,  Jinhyung Park ,  Hoju Song ,  Hyeran Lee ,  Bongsoo Kim ,  Sungwoo Kim

IPC: H10B12/00 ,  H01L21/768

CPC classification number: H10B12/485 ,  H01L21/76829 ,  H10B12/09 ,  H10B12/315 ,  H10B12/0335

Abstract: A semiconductor device includes a bit line structure, first and second capping patterns, first and second contact plug structures, and a capacitor. The bit line structure extends on a cell region and a dummy region. The first capping pattern is adjacent the bit line structure on the cell region. The second capping pattern is adjacent the bit line structure on the dummy region. The first contact plug structure is adjacent the bit line structure and the first capping pattern on the cell region, and includes a lower contact plug and a first upper contact plug sequentially stacked. The second contact plug structure is adjacent the bit line structure and the second capping pattern on the dummy region, and includes a dummy lower contact plug and a second upper contact plug sequentially stacked. The capacitor contacts an upper surface of the first contact plug structure on the cell region.

公开(公告)号：US11678478B2

公开(公告)日：2023-06-13

申请号：US17667697

申请日：2022-02-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Youngjun Kim ,  Seokhyun Kim ,  Jinhyung Park ,  Hoju Song ,  Hyeran Lee ,  Bongsoo Kim ,  Sungwoo Kim

IPC: H01L27/10 ,  H01L27/108 ,  H01L21/768

CPC classification number: H01L27/10888 ,  H01L21/76829 ,  H01L27/10814 ,  H01L27/10855 ,  H01L27/10894

Abstract: A semiconductor device includes a bit line structure, first and second capping patterns, first and second contact plug structures, and a capacitor. The bit line structure extends on a cell region and a dummy region. The first capping pattern is adjacent the bit line structure on the cell region. The second capping pattern is adjacent the bit line structure on the dummy region. The first contact plug structure is adjacent the bit line structure and the first capping pattern on the cell region, and includes a lower contact plug and a first upper contact plug sequentially stacked. The second contact plug structure is adjacent the bit line structure and the second capping pattern on the dummy region, and includes a dummy lower contact plug and a second upper contact plug sequentially stacked. The capacitor contacts an upper surface of the first contact plug structure on the cell region.

公开(公告)号：US11264392B2

公开(公告)日：2022-03-01

申请号：US16832268

申请日：2020-03-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Youngjun Kim ,  Seokhyun Kim ,  Jinhyung Park ,  Hoju Song ,  Hyeran Lee ,  Bongsoo Kim ,  Sungwoo Kim

IPC: H01L29/00 ,  H01L27/108

Abstract: A semiconductor device includes a bit line structure, first and second capping patterns, first and second contact plug structures, and a capacitor. The bit line structure extends on a cell region and a dummy region. The first capping pattern is adjacent the bit line structure on the cell region. The second capping pattern is adjacent the bit line structure on the dummy region. The first contact plug structure is adjacent the bit line structure and the first capping pattern on the cell region, and includes a lower contact plug and a first upper contact plug sequentially stacked. The second contact plug structure is adjacent the bit line structure and the second capping pattern on the dummy region, and includes a dummy lower contact plug and a second upper contact plug sequentially stacked. The capacitor contacts an upper surface of the first contact plug structure on the cell region.

公开(公告)号：US10720211B2

公开(公告)日：2020-07-21

申请号：US16458594

申请日：2019-07-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sungwoo Kim ,  Bong-Soo Kim ,  Youngbae Kim ,  Kijae Hur ,  Gwanhyeob Koh ,  Hyeongsun Hong ,  Yoosang Hwang

IPC: H01L27/00 ,  G11C14/00 ,  H01L27/24 ,  H01L23/528 ,  G11C13/00 ,  G11C5/02 ,  G11C11/00 ,  H01L45/00 ,  H01L27/108

Abstract: A semiconductor device includes: a first memory section, a first peripheral circuit section, and a second peripheral circuit section that are disposed on a substrate; and a second memory section and a wiring section that are stacked on the second peripheral circuit section, wherein the first memory section includes a plurality of first memory cells, each of the first memory cells including a cell transistor and a capacitor connected to the cell transistor, the second memory section includes a plurality of second memory cells, each of the second memory cells including a variable resistance element and a select element coupled in series to each other, and the wiring section includes a plurality of line patterns, wherein the line patterns and the second memory cells are higher than the capacitor with respect to the substrate.

公开(公告)号：US20190027200A1

公开(公告)日：2019-01-24

申请号：US15984914

申请日：2018-05-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sungwoo Kim ,  Bong-Soo Kim ,  Youngbae Kim ,  Kijae Hur ,  Gwanhyeob Koh ,  Hyeongsun Hong ,  Yoosang Hwang

IPC: G11C11/00 ,  H01L27/108 ,  H01L27/24 ,  H01L23/528 ,  H01L49/02 ,  H01L45/00

CPC classification number: G11C11/005 ,  G11C5/025 ,  G11C14/0045 ,  H01L23/528 ,  H01L27/10814 ,  H01L27/10823 ,  H01L27/10897 ,  H01L27/2409 ,  H01L27/2427 ,  H01L27/2463 ,  H01L28/60 ,  H01L45/06 ,  H01L45/1233 ,  H01L45/144

Abstract: A semiconductor device including: a first memory section, a first peripheral circuit section, and a second peripheral circuit section that are disposed next to each other on a substrate; and a second memory section laterally spaced apart from the first memory section, the second peripheral circuit section and the second memory section disposed next to each other on the substrate, wherein the first memory section includes a plurality of first memory cells, each of the first memory cells including a cell transistor and a capacitor connected to the cell transistor, and the second memory section includes a plurality of second memory cells, each of the second memory cells including a variable resistance element and a select element coupled in series to each other, wherein the second memory cells are higher from the substrate than each of the capacitors.

公开(公告)号：US20220254787A1

公开(公告)日：2022-08-11

申请号：US17667697

申请日：2022-02-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Youngjun Kim ,  Seokhyun Kim ,  Jinhyung Park ,  Hoju Song ,  Hyeran Lee ,  Bongsoo Kim ,  Sungwoo Kim

IPC: H01L27/108

Abstract: A semiconductor device includes a bit line structure, first and second capping patterns, first and second contact plug structures, and a capacitor. The bit line structure extends on a cell region and a dummy region. The first capping pattern is adjacent the bit line structure on the cell region. The second capping pattern is adjacent the bit line structure on the dummy region. The first contact plug structure is adjacent the bit line structure and the first capping pattern on the cell region, and includes a lower contact plug and a first upper contact plug sequentially stacked. The second contact plug structure is adjacent the bit line structure and the second capping pattern on the dummy region, and includes a dummy lower contact plug and a second upper contact plug sequentially stacked. The capacitor contacts an upper surface of the first contact plug structure on the cell region.