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公开(公告)号:US20210104463A1
公开(公告)日:2021-04-08
申请号:US16946491
申请日:2020-06-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: SEUNGYOUNG LEE , SANGHOON BAEK
IPC: H01L23/528 , G06F30/3953 , G06F30/392 , H01L23/522
Abstract: A semiconductor device includes: a device layer including first and second active patterns, extending in a first direction on a substrate and adjacent to each other, and a plurality of gate electrodes extending in a second direction, intersecting the first direction, on the substrate and crossing the first and second active patterns; a lower wiring layer on the device layer, and including first and second lower wiring patterns extending in the first direction, located on the first and second active patterns, respectively, and connected to the plurality of gate electrodes; and an upper wiring layer on the lower wiring layer, and having first and second upper vias on the first and second lower wiring patterns, respectively, and first and second upper wiring patterns extending in the second direction. The first upper wiring pattern is connected to the first upper via without being connected to the second upper via and the second upper wiring pattern is connected to the second upper via without being connected to the first upper via.
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公开(公告)号:US20180182846A1
公开(公告)日:2018-06-28
申请号:US15820053
申请日:2017-11-21
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: MYOUNG-HO KANG , JUNG-HO DO , GIYOUNG YANG , SEUNGYOUNG LEE
IPC: H01L29/06 , H01L27/092 , H01L29/08 , H01L29/78 , H01L21/8238
CPC classification number: H01L29/0653 , H01L21/823814 , H01L21/823821 , H01L21/823878 , H01L27/0924 , H01L29/0847 , H01L29/165 , H01L29/78 , H01L29/7848
Abstract: A semiconductor device includes a substrate that includes active patterns extending in a second direction, a third device isolation layer disposed on an upper portion of the substrate that includes a PMOSFET region and an NMOSFET region, and a gate electrode that extends across the active patterns in a first direction that crosses the second direction. The active patterns extend across the PMOSFET region and the NMOSFET region. The third device isolation layer lies between the PMOSFET region and the NMOSFET region. The third device isolation layer comprises a first part that extends in the second direction and a second part that extends in a third direction that crosses the first and second directions. The second part has opposite sidewalls parallel to the third direction, in a plan view.
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公开(公告)号:US20230047840A1
公开(公告)日:2023-02-16
申请号:US17503486
申请日:2021-10-18
Applicant: Samsung Electronics Co., Ltd.
Inventor: SEUNGYOUNG LEE , SAEHAN PARK
IPC: H01L29/786 , H03B5/12
Abstract: Cross-coupled structures are provided. Cross-coupled structures may include a first transistor, a second transistor, a third transistor, and a fourth transistor. The first transistor, the second transistor, and the fourth transistor may be spaced apart from each other in a first direction, and the third transistor and the second transistor may be stacked in a second direction that is perpendicular to the first direction. The third transistor and the second transistor may include a common gate structure, a first portion of the common gate structure may be a gate structure of the second transistor, and a second portion of the common gate structure may be a gate structure of the third transistor.
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公开(公告)号:US20180174861A1
公开(公告)日:2018-06-21
申请号:US15899686
申请日:2018-02-20
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: JUNG-HO DO , JONGHOON JUNG , SANGHOON BAEK , SEUNGYOUNG LEE , TAEJOONG SONG , JINYOUNG LIM
IPC: H01L21/3213 , H01L21/8238
CPC classification number: H01L21/32139 , H01L21/823807 , H01L21/823821 , H01L21/823878
Abstract: A method of manufacturing a semiconductor device may include forming first trenches that define active patterns extending in a first direction on a substrate, forming first insulating layers filling the first trenches, forming first mask patterns extending in the first direction while having a first width along a second direction perpendicular to the first direction, forming a second mask pattern extending in the first direction while having a second width along the second direction, and forming a second trench that partly defines an active region by executing a first etching process that etches the active patterns and the first insulating layer using the first mask patterns and the second mask pattern.
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公开(公告)号:US20220093489A1
公开(公告)日:2022-03-24
申请号:US17540303
申请日:2021-12-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: JUNG HO DO , SEUNGYOUNG LEE
IPC: H01L23/48 , H01L27/02 , H01L27/088
Abstract: Stacked integrated circuit devices may include standard cells including a first standard cell in a first row and a second standard cell in a second row immediately adjacent to the first row. Each of the standard cells may include an upper transistor and a lower transistor. The upper transistor may include an upper active region, an upper gate structure, and an upper source/drain region. The lower transistor may include a lower active region, a lower gate structure, and a lower source/drain region. Each of the standard cells may also include a power line and a power via electrically connecting the power line to the lower source/drain region. The power via of the first standard cell and the power via of the second standard cell may be aligned with each other along the first direction.
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公开(公告)号:US20210384106A1
公开(公告)日:2021-12-09
申请号:US16947241
申请日:2020-07-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: JUNG HO DO , SEUNGYOUNG LEE
IPC: H01L23/48 , H01L27/088 , H01L27/02
Abstract: Stacked integrated circuit devices may include standard cells including a first standard cell in a first row and a second standard cell in a second row immediately adjacent to the first row. Each of the standard cells may include an upper transistor and a lower transistor. The upper transistor may include an upper active region, an upper gate structure, and an upper source/drain region. The lower transistor may include a lower active region, a lower gate structure, and a lower source/drain region. Each of the standard cells may also include a power line and a power via electrically connecting the power line to the lower source/drain region. The power via of the first standard cell and the power via of the second standard cell may be aligned with each other along the first direction.
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公开(公告)号:US20200152640A1
公开(公告)日:2020-05-14
申请号:US16725155
申请日:2019-12-23
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: JUNG-HO DO , SEUNGYOUNG LEE , JONGHOON JUNG , JINYOUNG LIM , GIYOUNG YANG , SANGHOON BAEK , TAEJOONG SONG
IPC: H01L27/11 , H01L23/522 , H01L49/02 , H01L21/768
Abstract: A semiconductor device including: a conductor disposed on a substrate; a first contact disposed on the conductor; a second contact having a first portion disposed on the first contact and a second portion protruded away from the first portion in a direction parallel to the substrate, wherein the first and second contacts are disposed in an insulating layer; a via disposed on the insulating layer and the second portion of the second contact; and a metal line disposed on the via.
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公开(公告)号:US20180323082A1
公开(公告)日:2018-11-08
申请号:US16032127
申请日:2018-07-11
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: JUNG-HO DO , JONGHOON JUNG , SANGHOON BAEK , SEUNGYOUNG LEE , TAEJOONG SONG , JINYOUNG LIM
IPC: H01L21/3213 , H01L21/8238
CPC classification number: H01L21/32139 , H01L21/823807 , H01L21/823821 , H01L21/823878
Abstract: A method of manufacturing a semiconductor device may include forming active patterns, forming a polygonal mask pattern having a first width and a second width on the active patterns, forming an active region by executing a first etching process using the mask pattern, forming a first cutting mask for removing a first corner rounding in which a width of the active region is the first width, removing the first corner rounding by executing a second etching process using the first cutting mask, forming a second cutting mask for removing a second corner rounding in which the width of the active region is changed from the first width to the second width, and executing a third etching process using the second cutting mask.
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公开(公告)号:US20170148727A1
公开(公告)日:2017-05-25
申请号:US15355159
申请日:2016-11-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: JUNG-HO DO , SEUNGYOUNG LEE , JONGHOON JUNG , JINYOUNG LIM , GIYOUNG YANG , SANGHOON BAEK , TAEJOONG SONG
IPC: H01L23/528 , H01L23/532 , H01L27/11 , H01L23/522
Abstract: A semiconductor device including: a conductor disposed on a substrate; a first contact disposed on the conductor; a second contact having a first portion disposed on the first contact and a second portion protruded away from the first portion in a direction parallel to the substrate, wherein the first and second contacts are disposed in an insulating layer; a via disposed on the insulating layer and the second portion of the second contact; and a metal line disposed on the via.
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公开(公告)号:US20170148687A1
公开(公告)日:2017-05-25
申请号:US15350716
申请日:2016-11-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: JUNG-HO DO , JONGHOON JUNG , SANGHOON BAEK , SEUNGYOUNG LEE , TAEJOONG SONG , JINYOUNG LIM
IPC: H01L21/8238 , H01L21/3213
CPC classification number: H01L21/32139 , H01L21/823807 , H01L21/823821 , H01L21/823878
Abstract: A method of manufacturing a semiconductor device may include forming first trenches that define active patterns extending in a first direction on a substrate, forming first insulating layers filling the first trenches, forming first mask patterns extending in the first direction while having a first width along a second direction perpendicular to the first direction, forming a second mask pattern extending in the first direction while having a second width along the second direction, and forming a second trench that partly defines an active region by executing a first etching process that etches the active patterns and the first insulating layer using the first mask patterns and the second mask pattern.
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