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公开(公告)号：US11894833B2
公开(公告)日：2024-02-06
申请号：US16851729
申请日：2020-04-17
发明人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , In Sang Song , Moon Chul Lee
CPC分类号： H03H9/173 , H03H3/02 , H03H9/02118 , H03H2003/021 , Y10T29/42
摘要： Disclosed is a bulk acoustic wave resonator (BAWR). The BAWR includes a bulk acoustic wave resonance unit with a first electrode, a second electrode, and a piezoelectric layer. The piezoelectric layer is disposed between the first electrode and the second electrode. An air edge is formed at a distance from a center of the bulk acoustic wave resonance unit.
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公开(公告)号：US10991872B2
公开(公告)日：2021-04-27
申请号：US15827040
申请日：2017-11-30
发明人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Moon Chul Lee , Cui Jing
IPC分类号： H01L41/107 , H03H9/17 , H03H9/02
摘要： Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include an air cavity disposed on a substrate, a bulk acoustic wave resonant unit including a piezoelectric layer, and a reflective layer to reflect a wave of a resonant frequency that is generated from the piezoelectric layer.
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公开(公告)号：US09385303B2
公开(公告)日：2016-07-05
申请号：US14073509
申请日：2013-11-06
发明人： In Sang Song , Ho Soo Park , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Moon Chul Lee
CPC分类号： H01L41/314 , H03H9/132 , H03H9/174 , H03H9/175
摘要： Provided are a resonator and a method of fabricating the same. The resonator may include a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a control layer disposed on the second electrode and having a frame with an uneven surface.
摘要翻译： 提供一种谐振器及其制造方法。 谐振器可以包括设置在基板上的第一电极，设置在第一电极上的压电层，设置在压电层上的第二电极，以及设置在第二电极上并具有不平坦表面的框架的控制层。
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公开(公告)号：US10666224B2
公开(公告)日：2020-05-26
申请号：US15494866
申请日：2017-04-24
发明人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , In Sang Song , Moon Chul Lee
摘要： Disclosed is a bulk acoustic wave resonator (BAWR). The BAWR includes a bulk acoustic wave resonance unit with a first electrode, a second electrode, and a piezoelectric layer. The piezoelectric layer is disposed between the first electrode and the second electrode. An air edge is formed at a distance from a center of the bulk acoustic wave resonance unit.
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公开(公告)号：US09954511B2
公开(公告)日：2018-04-24
申请号：US14077777
申请日：2013-11-12
发明人： Sang Uk Son , Ho Soo Park , Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , In Sang Song , Moon Chul Lee
CPC分类号： H03H9/02102 , H03H3/04 , H03H9/173 , H03H9/568 , H03H9/588 , H03H9/605 , H03H2003/0407 , Y10T29/42
摘要： A radio frequency filter and a manufacturing method thereof are provided. A radio frequency filter includes bulk acoustic wave resonators (BAWRs), the BAWRs including first BAWRs connected in series, second BAWRs connected in parallel, or a combination thereof.
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公开(公告)号：US09899593B2
公开(公告)日：2018-02-20
申请号：US13686005
申请日：2012-11-27
发明人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Moon Chul Lee , Cui Jing
IPC分类号： H01L41/107 , H03H9/17 , H03H9/02
CPC分类号： H01L41/107 , H03H9/02102 , H03H9/0211 , H03H9/173 , H03H9/174 , H03H9/175
摘要： Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include an air cavity disposed on a substrate, a bulk acoustic wave resonant unit including a piezoelectric layer, and a reflective layer to reflect a wave of a resonant frequency that is generated from the piezoelectric layer.
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公开(公告)号：US09617146B2
公开(公告)日：2017-04-11
申请号：US14094178
申请日：2013-12-02
申请人： SAMSUNG ELECTRONICS CO., LTD. , Korea University Industrial & Academic Collaboration Foundation
发明人： Duck Hwan Kim , In Sang Song , Jea Shik Shin , Ho Soo Park , Jae-Sung Rieh , Byeong Kwon Ju
CPC分类号： B81C1/0019 , B81B3/0018 , B81B3/0021 , H03H3/0072
摘要： A method of fabricating a nano resonator, includes forming a line pattern in a first substrate, and transferring the line pattern to a second substrate including a gate electrode. The method further includes forming a source electrode and a drain electrode on the transferred line pattern.
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8.发明授权公开(公告)号：US09952169B2
公开(公告)日：2018-04-24
申请号：US14881819
申请日：2015-10-13
发明人： Sang Uk Son , Duck Hwan Kim , In Sang Song , Seong Chan Jun , Ho Soo Park , Jea Shik Shin , Moon Chul Lee
CPC分类号： G01N27/08 , A61B5/05 , A61B5/053 , A61B5/14532 , A61B5/14546 , G01N27/02 , G01N27/07 , G01N27/226
摘要： A method of measuring biological sample properties and a biological sample property measuring apparatus is provided. A method of measuring biological sample properties includes disposing a biomaterial to contact a sensing unit, detecting a radio frequency (RF) signal flowing through the sensing unit, and obtaining an RF property indicator of the biomaterial based on the detected RF signal.
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9.发明授权公开(公告)号：US09360443B2
公开(公告)日：2016-06-07
申请号：US13668760
申请日：2012-11-05
发明人： Moon Chul Lee , Duck Hwan Kim , In Sang Song , Jea Shik Shin
CPC分类号： G01N27/04 , B81B2201/02 , H03H3/0072 , H03H3/0077 , H03H9/2463 , H03H2009/02346 , H03H2009/0244
摘要： A nano scale resonator, a nano scale sensor, and a fabrication method thereof are provided. The nano scale resonator includes a resonance unit of nano scale configured to resonate based on an applied signal, and an anchor on a substrate, the anchor being configured to support the resonance unit, the anchor having an air gap within boundaries of the anchor, the resonance unit, and the substrate, the air gap being configured to reflect a vertical wave occurring in the resonance unit.
摘要翻译： 提供了纳米级谐振器，纳米级传感器及其制造方法。 所述纳米级谐振器包括纳米级的谐振单元，其被配置为基于所施加的信号而谐振，并且所述锚固件被构造成支撑所述谐振单元，所述锚固件在所述锚的边界内具有气隙， 谐振单元和基板，气隙被配置为反映在谐振单元中发生的垂直波。
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10.发明授权Radio frequency (RF) filter and RF transceiver using bulk acoustic wave resonator (BAWR) 有权使用体声波谐振器（BAWR）的射频（RF）滤波器和RF收发器公开(公告)号：US09154110B2
公开(公告)日：2015-10-06
申请号：US13747594
申请日：2013-01-23
发明人： Duck Hwan Kim , Chul Soo Kim , Seong Joong Kim , In Sang Song , Jea Shik Shin
CPC分类号： H03H9/54 , H03H9/02834 , H03H9/173 , H03H9/605
摘要： A filter and a transceiver in a radio frequency (RF) band, using a bulk acoustic wave resonator (BAWR), are provided. The RF filter includes at least one low temperature coefficient of frequency (TCF) BAWR. The RF filter further includes at least one high quality factor (Q) BAWR including a high Q compared to the at least one low TCF BAWR, the at least one low TCF BAWR including a low TCF compared to the at least one high Q BAWR.
摘要翻译： 提供了使用体声波谐振器（BAWR）的射频（RF）频带中的滤波器和收发器。 RF滤波器包括至少一个低温频率系数（TCF）BAWR。 所述RF滤波器还包括与所述至少一个低TCF BAWR相比包括高Q的至少一个高品质因子（Q）BAWR，所述至少一个低TCF BAWR与所述至少一个高Q BAWR相比包括低TCF。
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