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公开(公告)号：US11894833B2
公开(公告)日：2024-02-06
申请号：US16851729
申请日：2020-04-17
发明人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , In Sang Song , Moon Chul Lee
CPC分类号： H03H9/173 , H03H3/02 , H03H9/02118 , H03H2003/021 , Y10T29/42
摘要： Disclosed is a bulk acoustic wave resonator (BAWR). The BAWR includes a bulk acoustic wave resonance unit with a first electrode, a second electrode, and a piezoelectric layer. The piezoelectric layer is disposed between the first electrode and the second electrode. An air edge is formed at a distance from a center of the bulk acoustic wave resonance unit.
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公开(公告)号：US10991872B2
公开(公告)日：2021-04-27
申请号：US15827040
申请日：2017-11-30
发明人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Moon Chul Lee , Cui Jing
IPC分类号： H01L41/107 , H03H9/17 , H03H9/02
摘要： Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include an air cavity disposed on a substrate, a bulk acoustic wave resonant unit including a piezoelectric layer, and a reflective layer to reflect a wave of a resonant frequency that is generated from the piezoelectric layer.
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公开(公告)号：US09385303B2
公开(公告)日：2016-07-05
申请号：US14073509
申请日：2013-11-06
发明人： In Sang Song , Ho Soo Park , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Moon Chul Lee
CPC分类号： H01L41/314 , H03H9/132 , H03H9/174 , H03H9/175
摘要： Provided are a resonator and a method of fabricating the same. The resonator may include a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a control layer disposed on the second electrode and having a frame with an uneven surface.
摘要翻译： 提供一种谐振器及其制造方法。 谐振器可以包括设置在基板上的第一电极，设置在第一电极上的压电层，设置在压电层上的第二电极，以及设置在第二电极上并具有不平坦表面的框架的控制层。
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4.发明授权Radio frequency (RF) filter and RF transceiver using bulk acoustic wave resonator (BAWR) 有权使用体声波谐振器（BAWR）的射频（RF）滤波器和RF收发器公开(公告)号：US09154110B2
公开(公告)日：2015-10-06
申请号：US13747594
申请日：2013-01-23
发明人： Duck Hwan Kim , Chul Soo Kim , Seong Joong Kim , In Sang Song , Jea Shik Shin
CPC分类号： H03H9/54 , H03H9/02834 , H03H9/173 , H03H9/605
摘要： A filter and a transceiver in a radio frequency (RF) band, using a bulk acoustic wave resonator (BAWR), are provided. The RF filter includes at least one low temperature coefficient of frequency (TCF) BAWR. The RF filter further includes at least one high quality factor (Q) BAWR including a high Q compared to the at least one low TCF BAWR, the at least one low TCF BAWR including a low TCF compared to the at least one high Q BAWR.
摘要翻译： 提供了使用体声波谐振器（BAWR）的射频（RF）频带中的滤波器和收发器。 RF滤波器包括至少一个低温频率系数（TCF）BAWR。 所述RF滤波器还包括与所述至少一个低TCF BAWR相比包括高Q的至少一个高品质因子（Q）BAWR，所述至少一个低TCF BAWR与所述至少一个高Q BAWR相比包括低TCF。
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公开(公告)号：US10686426B2
公开(公告)日：2020-06-16
申请号：US15822341
申请日：2017-11-27
发明人： Hosoo Park , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , In Sang Song , Jeashik Shin , Moonchul Lee
摘要： A resonance apparatus that processes an electrical loss using a conductive material and a method of manufacturing the resonance apparatus are provided. The resonance apparatus includes a lower electrode formed at a predetermined distance from a substrate, and a piezoelectric layer formed on the lower electrode. The resonance apparatus further includes an upper electrode formed on the piezoelectric layer, and a conductive layer formed on the upper electrode or the lower electrode.
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公开(公告)号：US10666224B2
公开(公告)日：2020-05-26
申请号：US15494866
申请日：2017-04-24
发明人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , In Sang Song , Moon Chul Lee
摘要： Disclosed is a bulk acoustic wave resonator (BAWR). The BAWR includes a bulk acoustic wave resonance unit with a first electrode, a second electrode, and a piezoelectric layer. The piezoelectric layer is disposed between the first electrode and the second electrode. An air edge is formed at a distance from a center of the bulk acoustic wave resonance unit.
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公开(公告)号：US09954511B2
公开(公告)日：2018-04-24
申请号：US14077777
申请日：2013-11-12
发明人： Sang Uk Son , Ho Soo Park , Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , In Sang Song , Moon Chul Lee
CPC分类号： H03H9/02102 , H03H3/04 , H03H9/173 , H03H9/568 , H03H9/588 , H03H9/605 , H03H2003/0407 , Y10T29/42
摘要： A radio frequency filter and a manufacturing method thereof are provided. A radio frequency filter includes bulk acoustic wave resonators (BAWRs), the BAWRs including first BAWRs connected in series, second BAWRs connected in parallel, or a combination thereof.
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公开(公告)号：US09899593B2
公开(公告)日：2018-02-20
申请号：US13686005
申请日：2012-11-27
发明人： Jea Shik Shin , Duck Hwan Kim , Chul Soo Kim , Ho Soo Park , Sang Uk Son , In Sang Song , Moon Chul Lee , Cui Jing
IPC分类号： H01L41/107 , H03H9/17 , H03H9/02
CPC分类号： H01L41/107 , H03H9/02102 , H03H9/0211 , H03H9/173 , H03H9/174 , H03H9/175
摘要： Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include an air cavity disposed on a substrate, a bulk acoustic wave resonant unit including a piezoelectric layer, and a reflective layer to reflect a wave of a resonant frequency that is generated from the piezoelectric layer.
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公开(公告)号：US20140203686A1
公开(公告)日：2014-07-24
申请号：US14073509
申请日：2013-11-06
发明人： In Sang Song , Ho Soo Park , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jae Shik Shin , Moon Chul Lee
IPC分类号： H01L41/053 , H01L41/314
CPC分类号： H01L41/314 , H03H9/132 , H03H9/174 , H03H9/175
摘要： Provided are a resonator and a method of fabricating the same. The resonator may include a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a control layer disposed on the second electrode and having a frame with an uneven surface.
摘要翻译： 提供一种谐振器及其制造方法。 谐振器可以包括设置在基板上的第一电极，设置在第一电极上的压电层，设置在压电层上的第二电极，以及设置在第二电极上并具有不平坦表面的框架的控制层。
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公开(公告)号：US12028048B2
公开(公告)日：2024-07-02
申请号：US17245545
申请日：2021-04-30
发明人： Hosoo Park , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , In Sang Song , Jeashik Shin , Moonchul Lee
CPC分类号： H03H9/542 , H03H9/0211 , H03H9/132 , H03H9/174 , H03H9/175 , H10N30/06 , H10N30/87 , Y10T29/42
摘要： A resonance apparatus that processes an electrical loss using a conductive material and a method of manufacturing the resonance apparatus are provided. The resonance apparatus includes a lower electrode formed at a predetermined distance from a substrate, and a piezoelectric layer formed on the lower electrode. The resonance apparatus further includes an upper electrode formed on the piezoelectric layer, and a conductive layer formed on the upper electrode or the lower electrode.
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