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公开(公告)号：US12202078B2
公开(公告)日：2025-01-21
申请号：US17545982
申请日：2021-12-08
Applicant: Samsung Display Co., Ltd.
Inventor： Kyu-Bum Kim , Jaeseok Park , Jungseob Lee , Kyongho Hong , Inho Lee , Bosuck Jeon
IPC: B23K37/04 , B23K26/02 , B23K26/362
Abstract: A laser processing apparatus includes a stage configured to transfer a target substrate and including an opening, an electrostatic chuck disposed on the stage and including a plurality of holes, and a laser irradiation unit disposed above the stage and spaced apart from the stage and configured to irradiate a laser beam on the target substrate. A surface of the electrostatic chuck is in contact with the target substrate, the target substrate includes a plurality of etching regions to be etched by the laser beam and a non-etching region surrounding the plurality of etching regions of the target substrate, and the plurality of holes of the electrostatic chuck overlap the opening of the stage and the plurality of etching regions of the target substrate.
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公开(公告)号：US11358240B2
公开(公告)日：2022-06-14
申请号：US15973462
申请日：2018-05-07
Applicant: Samsung Display Co., Ltd.
Inventor： Taekil Oh , Gyoowan Han , Wonyong Kim , Seungho Myoung , Jaeseok Park , Alexander Voronov , Jinhong Jeun
IPC: B23K26/362 , C22C38/08 , B23K26/067 , B23K26/082 , B23K26/06 , B23K26/382 , B23K103/02
Abstract: A method of manufacturing a deposition mask includes: a splitting process in which a laser beam irradiated from a light source is split into a plurality of laser beams; a scanning process in which the plurality of laser beams are simultaneously scanned onto the mask substrate; and a tuning process in which irradiation states of the plurality of laser beams are finely changed to correspond to shapes of the plurality of pattern holes while the plurality of laser beams are scanned.
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公开(公告)号：US20170162832A1
公开(公告)日：2017-06-08
申请号：US15173008
申请日：2016-06-03
Applicant: Samsung Display Co., Ltd.
Inventor： Jungsuk Hahn , Taeyong Kim , Jaeseok Park , Kyubum Kim , Jonghee Lim
IPC: H01L51/56 , C23C16/458 , H01L51/00 , H01L21/677 , H01L21/683
CPC classification number: H01L51/56 , C23C14/042 , C23C14/12 , C23C14/24 , C23C14/568 , C23C16/4586 , H01L21/67706 , H01L21/6831 , H01L27/3244 , H01L51/001 , H01L2227/323
Abstract: An organic layer deposition apparatus including: a conveying unit including a first conveying unit conveying in a first direction a moving unit to which a substrate is removably adhered, and a second conveying unit conveying in a direction opposite to the first direction the moving unit from which the substrate is separated, in which the moving unit may be cyclically conveyed by the first and second conveying units; and a deposition unit including a deposition assembly being separate from the substrate while the first conveying unit conveys the substrate adhered to the moving unit and having a material deposited onto the substrate, and a housing having the deposition assembly provided therein and an internal space allowing the moving unit to pass therethrough, in which the movable unit may include a main body unit, an electrostatic chuck provided on the main body unit and having the substrate adhered thereto, a contactless power supply (CPS) module provided facing with the electrostatic chuck each other on the main body unit, and a shield unit having at least a portion thereof provided on the main body unit with the CPS module thereon and preventing heat transfer.
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公开(公告)号：US20180175323A1
公开(公告)日：2018-06-21
申请号：US15815098
申请日：2017-11-16
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： JOOSEOB AHN , Seongchae Jeong , Inae Han , Hyojin Kim , Jekil Ryu , Jaeseok Park , Gyoowan Han
CPC classification number: H01L51/5253 , H01L51/0097 , H01L51/5246 , H01L51/56 , H01L2227/323 , H01L2251/5338 , Y02E10/549
Abstract: A method of manufacturing a display apparatus includes forming a plurality of display units including bending areas on a mother substrate. Each of the plurality of display units include a bending area configured to be bent about a bending axis. A protection film is attached to a lower surface of the mother substrate. The protection film includes a protection film base and an adhesive layer. An opening or a groove is formed corresponding to the bending area of each of the plurality of display units by removing at least a portion of the protection film. The mother substrate and the protection film are cut to separate the plurality of display units from each other. The mother substrate is bent about the bending axis. The removing of the at least a portion of the protection film is performed by a laser beam.
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Patent Agency Ranking
公开(公告)号：US20220297236A1
公开(公告)日：2022-09-22
申请号：US17838243
申请日：2022-06-12
Applicant: Samsung Display Co., Ltd.
Inventor： Taekil OH , Gyoowan HAN , Wonyong KIM , Seungho Myoung , Jaeseok Park , Alexander VORONOV , Jinhong JEUN
IPC: B23K26/362 , C22C38/08 , B23K26/067 , B23K26/082 , B23K26/06 , B23K26/382
Abstract: An apparatus for manufacturing a deposition mask including a stage on which a mask substrate is mounted, a light source configured to irradiate a laser beam, a beam splitter configured to split the irradiated laser beam into a plurality of laser beams, a scanner configured to simultaneously scan the plurality of laser beams onto the mask substrate, and a tuner configured to finely change irradiation states of the plurality of laser beams to correspond to shapes of a plurality of pattern holes, while the plurality of laser beams are scanned.
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公开(公告)号：US20220241906A1
公开(公告)日：2022-08-04
申请号：US17545982
申请日：2021-12-08
Applicant: Samsung Display Co., Ltd.
Inventor： Kyu-Bum Kim , Jaeseok Park , Jungseob Lee , Kyongho Hong , Inho Lee , Bosuck Jeon
IPC: B23K37/04 , B23K26/02 , B23K26/362
Abstract: A laser processing apparatus includes a stage configured to transfer a target substrate and including an opening, an electrostatic chuck disposed on the stage and including a plurality of holes, and a laser irradiation unit disposed above the stage and spaced apart from the stage and configured to irradiate a laser beam on the target substrate. A surface of the electrostatic. chuck is in contact with the target substrate, the target substrate includes a plurality of etching regions to be etched by the laser beam and a non-etching region surrounding the plurality of etching regions of the target substrate, and the plurality of holes of the electrostatic chuck overlap the opening of the stage and the plurality of etching regions of the target substrate.
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公开(公告)号：US20190105736A1
公开(公告)日：2019-04-11
申请号：US15973462
申请日：2018-05-07
Applicant: Samsung Display Co., Ltd.
Inventor： Taekil OH , Gyoowan Han , Wonyong Kim , Seungho Myoung , Jaeseok Park , Alexander Voronov , Jinhong Jeun
IPC: B23K26/362 , C22C38/08 , B23K26/06 , B23K26/067 , B23K26/082
Abstract: A method of manufacturing a deposition mask includes: a splitting process in which a laser beam irradiated from a light source is split into a plurality of laser beams; a scanning process in which the plurality of laser beams are simultaneously scanned onto the mask substrate; and a tuning process in which irradiation states of the plurality of laser beams are finely changed to correspond to shapes of the plurality of pattern holes while the plurality of laser beams are scanned.
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公开(公告)号：US10355241B2
公开(公告)日：2019-07-16
申请号：US15815098
申请日：2017-11-16
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Jooseob Ahn , Seongchae Jeong , Inae Han , Hyojin Kim , Jekil Ryu , Jaeseok Park , Gyoowan Han
Abstract: A method of manufacturing a display apparatus includes forming a plurality of display units including bending areas on a mother substrate. Each of the plurality of display units include a bending area configured to be bent about a bending axis. A protection film is attached to a lower surface of the mother substrate. The protection film includes a protection film base and an adhesive layer. An opening or a groove is formed corresponding to the bending area of each of the plurality of display units by removing at least a portion of the protection film. The mother substrate and the protection film are cut to separate the plurality of display units from each other. The mother substrate is bent about the bending axis. The removing of the at least a portion of the protection film is performed by a laser beam.
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公开(公告)号：US09893322B2
公开(公告)日：2018-02-13
申请号：US15173008
申请日：2016-06-03
Applicant: Samsung Display Co., Ltd.
Inventor： Jungsuk Hahn , Taeyong Kim , Jaeseok Park , Kyubum Kim , Jonghee Lim
IPC: H01L51/56 , C23C16/458 , H01L21/677 , H01L21/683 , H01L51/00 , H01L27/32
CPC classification number: H01L51/56 , C23C14/042 , C23C14/12 , C23C14/24 , C23C14/568 , C23C16/4586 , H01L21/67706 , H01L21/6831 , H01L27/3244 , H01L51/001 , H01L2227/323
Abstract: An organic layer deposition apparatus including: a conveying unit including a first conveying unit conveying in a first direction a moving unit to which a substrate is removably adhered, and a second conveying unit conveying in a direction opposite to the first direction the moving unit from which the substrate is separated, in which the moving unit may be cyclically conveyed by the first and second conveying units; and a deposition unit including a deposition assembly being separate from the substrate while the first conveying unit conveys the substrate adhered to the moving unit and having a material deposited onto the substrate, and a housing having the deposition assembly provided therein and an internal space allowing the moving unit to pass therethrough, in which the movable unit may include a main body unit, an electrostatic chuck provided on the main body unit and having the substrate adhered thereto, a contactless power supply (CPS) module provided facing with the electrostatic chuck each other on the main body unit, and a shield unit having at least a portion thereof provided on the main body unit with the CPS module thereon and preventing heat transfer.
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