公开(公告)号：US11752577B2

公开(公告)日：2023-09-12

申请号：US16680148

申请日：2019-11-11

Applicant: Samsung Display Co., Ltd.

Inventor： Yeonghwan Ko ,  Taekil Oh ,  Gyoowan Han ,  Jooseob Ahn ,  Yoongyeong Bae

IPC: B23K26/36 ,  B23K26/06 ,  B23K26/362 ,  G02B27/10 ,  G02B19/00 ,  G02B27/28 ,  B23K26/0622 ,  B23K26/073 ,  B23K26/067

CPC classification number: B23K26/362 ,  B23K26/0604 ,  B23K26/067 ,  B23K26/0622 ,  B23K26/0626 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/0665 ,  B23K26/073 ,  G02B19/0009 ,  G02B27/1093 ,  G02B27/283

Abstract: A laser apparatus may include a laser generator generating at least one a laser beam, which is used as an input light, an optical system converting the input light, which is provided from the laser generator, into a plurality of pattern lights, and a stage, on which a target object is loaded. The output light may be irradiated onto the target object. The optical system may divide the input light into a plurality of divided lights, and the pattern lights may be produced by constructive interference of the plurality of divided lights. A diameter of each of the pattern lights may be smaller than a diameter of the input light.

公开(公告)号：US20220152745A1

公开(公告)日：2022-05-19

申请号：US17650051

申请日：2022-02-04

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sungyong Lee ,  Jaeha Lim ,  Gyoowan Han

IPC: B23K26/38 ,  B08B5/04 ,  B25B11/00 ,  B23K26/70 ,  B08B15/00 ,  B23K26/16 ,  B23K37/04

Abstract: A work table for laser processing includes an upper plate including a plurality of cell regions and at least one groove region that divides the plurality of cell regions. The upper plate includes a plurality of absorption holes that fix a substrate in the plurality of cell regions. A plurality of suction holes collect particles generated during a cutting process performed on the substrate. A lower plate is disposed under the upper plate. The lower plate forms an absorption path that is coupled to the plurality of absorption holes. A suction path is coupled to the plurality of suction holes by combining the lower plate with the upper plate.

公开(公告)号：US10355241B2

公开(公告)日：2019-07-16

申请号：US15815098

申请日：2017-11-16

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jooseob Ahn ,  Seongchae Jeong ,  Inae Han ,  Hyojin Kim ,  Jekil Ryu ,  Jaeseok Park ,  Gyoowan Han

IPC: H01L51/50 ,  H01L51/52 ,  H01L51/56 ,  H01L51/00

Abstract: A method of manufacturing a display apparatus includes forming a plurality of display units including bending areas on a mother substrate. Each of the plurality of display units include a bending area configured to be bent about a bending axis. A protection film is attached to a lower surface of the mother substrate. The protection film includes a protection film base and an adhesive layer. An opening or a groove is formed corresponding to the bending area of each of the plurality of display units by removing at least a portion of the protection film. The mother substrate and the protection film are cut to separate the plurality of display units from each other. The mother substrate is bent about the bending axis. The removing of the at least a portion of the protection film is performed by a laser beam.

公开(公告)号：US20190126406A1

公开(公告)日：2019-05-02

申请号：US16166170

申请日：2018-10-22

Applicant: Samsung Display Co., Ltd.

Inventor： Taras Litoshenko ,  Voronov Alexander ,  Gyoowan Han

IPC: B23K26/382 ,  B23K26/082 ,  B23K26/067 ,  B23K26/06 ,  B23K26/0622 ,  C23C14/04 ,  C23C16/04

Abstract: A method of manufacturing a deposition mask including: arranging a deposition mask to be processed on a stage and forming a deposition hole in the deposition mask by irradiating the deposition mask with a laser beam. The laser beam forming the deposition hole is irradiated plural times in an identical moving path in a region where the deposition hole is formed, the laser beam includes a pulse laser, and pulse energy of the laser beam when the laser beam is irradiated once is different from pulse energy of the laser beam when the laser beam is irradiated twice.

公开(公告)号：US20180154485A1

公开(公告)日：2018-06-07

申请号：US15708927

申请日：2017-09-19

Applicant: Samsung Display Co., Ltd.

Inventor： Sungyong Lee ,  Jaeha Lim ,  Gyoowan Han

IPC: B23K26/38 ,  B25B11/00 ,  B08B5/04

CPC classification number: B23K26/38 ,  B08B5/04 ,  B08B15/00 ,  B23K26/16 ,  B23K26/702 ,  B23K37/0408 ,  B25B11/005

Abstract: A work table for laser processing includes an upper plate including a plurality of cell regions and at least one groove region that divides the plurality of cell regions. The upper plate includes a plurality of absorption holes that fix a substrate in the plurality of cell regions. A plurality of suction holes collect particles generated during a cutting process performed on the substrate. A lower plate is disposed under the upper plate. The lower plate forms an absorption path that is coupled to the plurality of absorption holes. A suction path is coupled to the plurality of suction holes by combining the lower plate with the upper plate.

公开(公告)号：US12147020B2

公开(公告)日：2024-11-19

申请号：US17239732

申请日：2021-04-26

Applicant: Samsung Display Co., Ltd.

Inventor： Emil Aslanov ,  Jongki Kim ,  Yoongyeong Bae ,  Gyoowan Han

IPC: G02B19/00 ,  B23K26/06

Abstract: Provided is a laser device including a light source generating a laser beam, a stage, and a lens assembly disposed between the light source and the stage and irradiating the laser beam to a substrate disposed on the stage. The laser device is capable of irradiating a uniform laser beam over an entire processing area to which the laser beam is irradiated. Thus, the laser device may irradiate a uniform laser beam to not only a center area, but also the edge area of the processing area.

公开(公告)号：US12069894B2

公开(公告)日：2024-08-20

申请号：US17455631

申请日：2021-11-18

Applicant: Samsung Display Co., Ltd.

Inventor： Wonyong Kim ,  Jongki Kim ,  Gyoowan Han

IPC: H10K59/121 ,  H10K50/844 ,  H10K59/12 ,  H10K59/131 ,  H10K71/00

CPC classification number: H10K59/1213 ,  H10K50/844 ,  H10K59/1216 ,  H10K59/131 ,  H10K71/00 ,  H10K59/1201

Abstract: A method of manufacturing the display apparatus, the method including preparing a substrate in which an opening area and a non-display area around at least a portion of the opening area are defined, forming, on the substrate, an insulating layer having an opening corresponding to the opening area and defining an irradiated region including a first area and a second area on the non-display area, forming a conductive pattern on the irradiated region, covering the first area, and exposing the second area, forming an organic material layer on the insulating layer and the conductive pattern, forming an electrode layer on the organic material layer, and removing, by irradiating a laser beam to the irradiated region, the conductive pattern, the organic material layer on the irradiated region, and the electrode layer on the irradiated region.

公开(公告)号：US11786990B2

公开(公告)日：2023-10-17

申请号：US16747490

申请日：2020-01-20

Applicant: Samsung Display Co., Ltd.

Inventor： Jooseob Ahn ,  Taekil Oh ,  Gyoowan Han ,  Yeonghwan Ko ,  Yoongyeong Bae

IPC: B23K26/06 ,  B23K26/073 ,  B23K26/382 ,  B23K26/082 ,  B23K26/362 ,  B23K103/00

CPC classification number: B23K26/0604 ,  B23K26/0648 ,  B23K26/0732 ,  B23K26/082 ,  B23K26/362 ,  B23K26/382 ,  B23K2103/50

Abstract: A laser etching apparatus includes a light source to emit a first laser beam having a first energy profile; and a scanner to radiate a second laser beam upon an object along a circular path, the second laser beam having a second energy profile different from the first energy profile.

公开(公告)号：US11532476B2

公开(公告)日：2022-12-20

申请号：US17235178

申请日：2021-04-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Akifumi Sangu ,  Gyoowan Han ,  Jekil Ryu ,  Kyungjae Lee

IPC: H01L21/02 ,  G02B27/28 ,  G01J1/42 ,  G02B27/10 ,  B23K26/064 ,  H01L27/12 ,  B23K26/067 ,  H01L21/67 ,  B23K26/03 ,  B23K26/08 ,  B23K26/70 ,  B23K26/352 ,  B23K26/06 ,  B23K26/354 ,  B23K26/00 ,  B23K101/40 ,  B23K103/00

Abstract: A laser crystallizing apparatus includes a first light source unit configured to emit a first input light having a linearly polarized laser beam shape. A second light source unit is configured to emit a second input light having a linearly polarized laser beam shape. A polarization optical system is configured to rotate the first input light and/or the second input light at a predetermined rotation angle. An optical system is configured to convert the first input light and the second input light, which pass through the polarization optical system, into an output light. A target substrate is seated on a stage and output light is directed onto the target substrate. A monitoring unit is configured to receive the first input light or the second input light from the polarization optical system and measure a laser beam quality thereof.

公开(公告)号：US20220216283A1

公开(公告)日：2022-07-07

申请号：US17455631

申请日：2021-11-18

Applicant: Samsung Display Co., Ltd.

Inventor： Wonyong Kim ,  Jongki Kim ,  Gyoowan Han

IPC: H01L27/32 ,  H01L51/56 ,  H01L51/52

Abstract: A method of manufacturing the display apparatus, the method including preparing a substrate in which an opening area and a non-display area around at least a portion of the opening area are defined, forming, on the substrate, an insulating layer having an opening corresponding to the opening area and defining an irradiated region including a first area and a second area on the non-display area, forming a conductive pattern on the irradiated region, covering the first area, and exposing the second area, forming an organic material layer on the insulating layer and the conductive pattern, forming an electrode layer on the organic material layer, and removing, by irradiating a laser beam to the irradiated region, the conductive pattern, the organic material layer on the irradiated region, and the electrode layer on the irradiated region.