Laser device including lens assembly

    公开(公告)号:US12147020B2

    公开(公告)日:2024-11-19

    申请号:US17239732

    申请日:2021-04-26

    Abstract: Provided is a laser device including a light source generating a laser beam, a stage, and a lens assembly disposed between the light source and the stage and irradiating the laser beam to a substrate disposed on the stage. The laser device is capable of irradiating a uniform laser beam over an entire processing area to which the laser beam is irradiated. Thus, the laser device may irradiate a uniform laser beam to not only a center area, but also the edge area of the processing area.

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