公开(公告)号：US20190105736A1

公开(公告)日：2019-04-11

申请号：US15973462

申请日：2018-05-07

Applicant: Samsung Display Co., Ltd.

Inventor： Taekil OH ,  Gyoowan Han ,  Wonyong Kim ,  Seungho Myoung ,  Jaeseok Park ,  Alexander Voronov ,  Jinhong Jeun

IPC: B23K26/362 ,  C22C38/08 ,  B23K26/06 ,  B23K26/067 ,  B23K26/082

Abstract: A method of manufacturing a deposition mask includes: a splitting process in which a laser beam irradiated from a light source is split into a plurality of laser beams; a scanning process in which the plurality of laser beams are simultaneously scanned onto the mask substrate; and a tuning process in which irradiation states of the plurality of laser beams are finely changed to correspond to shapes of the plurality of pattern holes while the plurality of laser beams are scanned.

公开(公告)号：US11358240B2

公开(公告)日：2022-06-14

申请号：US15973462

申请日：2018-05-07

Applicant: Samsung Display Co., Ltd.

Inventor： Taekil Oh ,  Gyoowan Han ,  Wonyong Kim ,  Seungho Myoung ,  Jaeseok Park ,  Alexander Voronov ,  Jinhong Jeun

IPC: B23K26/362 ,  C22C38/08 ,  B23K26/067 ,  B23K26/082 ,  B23K26/06 ,  B23K26/382 ,  B23K103/02

Abstract: A method of manufacturing a deposition mask includes: a splitting process in which a laser beam irradiated from a light source is split into a plurality of laser beams; a scanning process in which the plurality of laser beams are simultaneously scanned onto the mask substrate; and a tuning process in which irradiation states of the plurality of laser beams are finely changed to correspond to shapes of the plurality of pattern holes while the plurality of laser beams are scanned.

公开(公告)号：US20190148641A1

公开(公告)日：2019-05-16

申请号：US16138710

申请日：2018-09-21

Applicant: Samsung Display Co., Ltd.

Inventor： Wonyong Kim ,  Gyoowan Han ,  Taekkyo Kang ,  Seungho Myoung ,  Taekil Oh

IPC: H01L51/00 ,  H01L51/56 ,  C23C16/04 ,  B23K26/364

Abstract: An apparatus for manufacturing a mask is provided. The apparatus includes a stage on which a pre-mask is disposed, and a laser irradiation device including a laser generation member, an optical system for controlling a shape of a laser beam, and a scanner for adjusting a path of a laser beam that has the shape controlled by the optical system. The pre-mask includes a first pattern groove defined on a front surface and a second pattern groove defined on a rear surface that corresponds to the front surface. A first portion and a second portion are defined in a first direction that is a thickness direction of the pre-mask. The laser beam with the controlled shape is irradiated to the second portion of the pre-mask in a second direction crossing the first direction, a mask having an opening, in which the second portion is removed, is provided.

公开(公告)号：US12069894B2

公开(公告)日：2024-08-20

申请号：US17455631

申请日：2021-11-18

Applicant: Samsung Display Co., Ltd.

Inventor： Wonyong Kim ,  Jongki Kim ,  Gyoowan Han

IPC: H10K59/121 ,  H10K50/844 ,  H10K59/12 ,  H10K59/131 ,  H10K71/00

CPC classification number: H10K59/1213 ,  H10K50/844 ,  H10K59/1216 ,  H10K59/131 ,  H10K71/00 ,  H10K59/1201

Abstract: A method of manufacturing the display apparatus, the method including preparing a substrate in which an opening area and a non-display area around at least a portion of the opening area are defined, forming, on the substrate, an insulating layer having an opening corresponding to the opening area and defining an irradiated region including a first area and a second area on the non-display area, forming a conductive pattern on the irradiated region, covering the first area, and exposing the second area, forming an organic material layer on the insulating layer and the conductive pattern, forming an electrode layer on the organic material layer, and removing, by irradiating a laser beam to the irradiated region, the conductive pattern, the organic material layer on the irradiated region, and the electrode layer on the irradiated region.

公开(公告)号：US20220216283A1

公开(公告)日：2022-07-07

申请号：US17455631

申请日：2021-11-18

Applicant: Samsung Display Co., Ltd.

Inventor： Wonyong Kim ,  Jongki Kim ,  Gyoowan Han

IPC: H01L27/32 ,  H01L51/56 ,  H01L51/52

Abstract: A method of manufacturing the display apparatus, the method including preparing a substrate in which an opening area and a non-display area around at least a portion of the opening area are defined, forming, on the substrate, an insulating layer having an opening corresponding to the opening area and defining an irradiated region including a first area and a second area on the non-display area, forming a conductive pattern on the irradiated region, covering the first area, and exposing the second area, forming an organic material layer on the insulating layer and the conductive pattern, forming an electrode layer on the organic material layer, and removing, by irradiating a laser beam to the irradiated region, the conductive pattern, the organic material layer on the irradiated region, and the electrode layer on the irradiated region.