公开(公告)号：US20230193450A1

公开(公告)日：2023-06-22

申请号：US18167761

申请日：2023-02-10

Applicant: Samsung Display Co., LTD.

Inventor： Kyubum Kim ,  Sungjin Kim ,  Chunyoung Park ,  Uno Chang

IPC: C23C14/04 ,  G03F7/20 ,  H01L21/687 ,  H01L21/677 ,  H10K71/00

CPC classification number: C23C14/042 ,  G03F7/707 ,  G03F7/70733 ,  H01L21/67745 ,  H01L21/68764 ,  H01L21/68778 ,  H10K71/00 ,  B05B12/22

Abstract: A carrier, an apparatus for manufacturing a display apparatus and including the carrier, and a method of manufacturing a display apparatus are provided. The carrier includes a body portion; an electro permanent magnetic chuck arranged on a boundary portion of the body portion and configured to selectively fix a mask assembly; and a substrate fixing unit arranged in the body portion to selectively fix a display substrate.

公开(公告)号：US09893322B2

公开(公告)日：2018-02-13

申请号：US15173008

申请日：2016-06-03

Applicant: Samsung Display Co., Ltd.

Inventor： Jungsuk Hahn ,  Taeyong Kim ,  Jaeseok Park ,  Kyubum Kim ,  Jonghee Lim

IPC: H01L51/56 ,  C23C16/458 ,  H01L21/677 ,  H01L21/683 ,  H01L51/00 ,  H01L27/32

CPC classification number: H01L51/56 ,  C23C14/042 ,  C23C14/12 ,  C23C14/24 ,  C23C14/568 ,  C23C16/4586 ,  H01L21/67706 ,  H01L21/6831 ,  H01L27/3244 ,  H01L51/001 ,  H01L2227/323

Abstract: An organic layer deposition apparatus including: a conveying unit including a first conveying unit conveying in a first direction a moving unit to which a substrate is removably adhered, and a second conveying unit conveying in a direction opposite to the first direction the moving unit from which the substrate is separated, in which the moving unit may be cyclically conveyed by the first and second conveying units; and a deposition unit including a deposition assembly being separate from the substrate while the first conveying unit conveys the substrate adhered to the moving unit and having a material deposited onto the substrate, and a housing having the deposition assembly provided therein and an internal space allowing the moving unit to pass therethrough, in which the movable unit may include a main body unit, an electrostatic chuck provided on the main body unit and having the substrate adhered thereto, a contactless power supply (CPS) module provided facing with the electrostatic chuck each other on the main body unit, and a shield unit having at least a portion thereof provided on the main body unit with the CPS module thereon and preventing heat transfer.

公开(公告)号：US09823464B2

公开(公告)日：2017-11-21

申请号：US14704897

申请日：2015-05-05

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kyubum Kim ,  Seungho Myoung ,  Jekil Ryu ,  Wonhee Oh

IPC: G02B26/08 ,  G02B27/64

CPC classification number: G02B26/0816 ,  G02B26/085 ,  G02B27/646

Abstract: An optical module includes a mirror unit including a mirror holder and a mirror on the mirror holder, the mirror holding including a first plate; a center guide supporting the mirror unit; and an actuator configured to rotate the mirror unit about a rotation axis. The actuator includes a first actuator at the first plate and second and third actuators at second and third plates, respectively, and spaced from each other in a direction parallel to the rotation axis, and the first actuator is configured to be acted upon by the second and third actuators to rotate the mirror unit about the rotation axis.

公开(公告)号：US11618940B2

公开(公告)日：2023-04-04

申请号：US16531866

申请日：2019-08-05

Applicant: Samsung Display Co., Ltd.

Inventor： Kyubum Kim ,  Sungjin Kim ,  Chunyoung Park ,  Uno Chang

IPC: C23C14/04 ,  H01L51/56 ,  G03F7/20 ,  H01L21/687 ,  H01L21/677 ,  B05B12/22

Abstract: A method of manufacturing a display apparatus includes: sequentially fixing a display substrate and a mask assembly to a carrier; transporting the mask assembly and the display substrate to a deposition unit via the carrier; and depositing a deposition material on the display substrate by passing the deposition material through the mask assembly, by using the deposition unit.

公开(公告)号：US11597994B2

公开(公告)日：2023-03-07

申请号：US16531866

申请日：2019-08-05

Applicant: Samsung Display Co., Ltd.

Inventor： Kyubum Kim ,  Sungjin Kim ,  Chunyoung Park ,  Uno Chang

IPC: C23C14/04 ,  H01L51/56 ,  G03F7/20 ,  H01L21/687 ,  H01L21/677 ,  B05B12/22

Abstract: A method of manufacturing a display apparatus includes: sequentially fixing a display substrate and a mask assembly to a carrier; transporting the mask assembly and the display substrate to a deposition unit via the carrier; and depositing a deposition material on the display substrate by passing the deposition material through the mask assembly, by using the deposition unit.

公开(公告)号：US20170162832A1

公开(公告)日：2017-06-08

申请号：US15173008

申请日：2016-06-03

Applicant: Samsung Display Co., Ltd.

Inventor： Jungsuk Hahn ,  Taeyong Kim ,  Jaeseok Park ,  Kyubum Kim ,  Jonghee Lim

IPC: H01L51/56 ,  C23C16/458 ,  H01L51/00 ,  H01L21/677 ,  H01L21/683

CPC classification number: H01L51/56 ,  C23C14/042 ,  C23C14/12 ,  C23C14/24 ,  C23C14/568 ,  C23C16/4586 ,  H01L21/67706 ,  H01L21/6831 ,  H01L27/3244 ,  H01L51/001 ,  H01L2227/323

Abstract: An organic layer deposition apparatus including: a conveying unit including a first conveying unit conveying in a first direction a moving unit to which a substrate is removably adhered, and a second conveying unit conveying in a direction opposite to the first direction the moving unit from which the substrate is separated, in which the moving unit may be cyclically conveyed by the first and second conveying units; and a deposition unit including a deposition assembly being separate from the substrate while the first conveying unit conveys the substrate adhered to the moving unit and having a material deposited onto the substrate, and a housing having the deposition assembly provided therein and an internal space allowing the moving unit to pass therethrough, in which the movable unit may include a main body unit, an electrostatic chuck provided on the main body unit and having the substrate adhered thereto, a contactless power supply (CPS) module provided facing with the electrostatic chuck each other on the main body unit, and a shield unit having at least a portion thereof provided on the main body unit with the CPS module thereon and preventing heat transfer.

公开(公告)号：US20160103313A1

公开(公告)日：2016-04-14

申请号：US14704897

申请日：2015-05-05

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kyubum Kim ,  Seungho Myoung ,  Jekil Ryu ,  Wonhee Oh

IPC: G02B26/08 ,  G02B27/64

CPC classification number: G02B26/0816 ,  G02B26/085 ,  G02B27/646

Abstract: An optical module includes a mirror unit including a mirror holder and a mirror on the mirror holder, the mirror holding including a first plate; a center guide supporting the mirror unit; and an actuator configured to rotate the mirror unit about a rotation axis. The actuator includes a first actuator at the first plate and second and third actuators at second and third plates, respectively, and spaced from each other in a direction parallel to the rotation axis, and the first actuator is configured to be acted upon by the second and third actuators to rotate the mirror unit about the rotation axis.

Abstract translation: 光学模块包括反射镜单元，该反射镜单元包括反射镜保持器和反射镜保持器上的反射镜，反射镜保持件包括第一板; 支撑镜子单元的中心导轨; 以及致动器，其构造成围绕旋转轴线旋转镜单元。 致动器包括在第一板处的第一致动器和分别在第二和第三板处的第二和第三致动器，并且在平行于旋转轴线的方向上彼此间隔开，并且第一致动器构造成由第二致动器 以及第三致动器以围绕旋转轴线旋转镜单元。