公开(公告)号：US20230193450A1

公开(公告)日：2023-06-22

申请号：US18167761

申请日：2023-02-10

Applicant: Samsung Display Co., LTD.

Inventor： Kyubum Kim ,  Sungjin Kim ,  Chunyoung Park ,  Uno Chang

IPC: C23C14/04 ,  G03F7/20 ,  H01L21/687 ,  H01L21/677 ,  H10K71/00

CPC classification number: C23C14/042 ,  G03F7/707 ,  G03F7/70733 ,  H01L21/67745 ,  H01L21/68764 ,  H01L21/68778 ,  H10K71/00 ,  B05B12/22

Abstract: A carrier, an apparatus for manufacturing a display apparatus and including the carrier, and a method of manufacturing a display apparatus are provided. The carrier includes a body portion; an electro permanent magnetic chuck arranged on a boundary portion of the body portion and configured to selectively fix a mask assembly; and a substrate fixing unit arranged in the body portion to selectively fix a display substrate.

公开(公告)号：US11618940B2

公开(公告)日：2023-04-04

申请号：US16531866

申请日：2019-08-05

Applicant: Samsung Display Co., Ltd.

Inventor： Kyubum Kim ,  Sungjin Kim ,  Chunyoung Park ,  Uno Chang

IPC: C23C14/04 ,  H01L51/56 ,  G03F7/20 ,  H01L21/687 ,  H01L21/677 ,  B05B12/22

Abstract: A method of manufacturing a display apparatus includes: sequentially fixing a display substrate and a mask assembly to a carrier; transporting the mask assembly and the display substrate to a deposition unit via the carrier; and depositing a deposition material on the display substrate by passing the deposition material through the mask assembly, by using the deposition unit.

公开(公告)号：US11597994B2

公开(公告)日：2023-03-07

申请号：US16531866

申请日：2019-08-05

Applicant: Samsung Display Co., Ltd.

Inventor： Kyubum Kim ,  Sungjin Kim ,  Chunyoung Park ,  Uno Chang

IPC: C23C14/04 ,  H01L51/56 ,  G03F7/20 ,  H01L21/687 ,  H01L21/677 ,  B05B12/22

Abstract: A method of manufacturing a display apparatus includes: sequentially fixing a display substrate and a mask assembly to a carrier; transporting the mask assembly and the display substrate to a deposition unit via the carrier; and depositing a deposition material on the display substrate by passing the deposition material through the mask assembly, by using the deposition unit.