公开(公告)号：US20170162832A1

公开(公告)日：2017-06-08

申请号：US15173008

申请日：2016-06-03

Applicant: Samsung Display Co., Ltd.

Inventor： Jungsuk Hahn ,  Taeyong Kim ,  Jaeseok Park ,  Kyubum Kim ,  Jonghee Lim

IPC: H01L51/56 ,  C23C16/458 ,  H01L51/00 ,  H01L21/677 ,  H01L21/683

CPC classification number: H01L51/56 ,  C23C14/042 ,  C23C14/12 ,  C23C14/24 ,  C23C14/568 ,  C23C16/4586 ,  H01L21/67706 ,  H01L21/6831 ,  H01L27/3244 ,  H01L51/001 ,  H01L2227/323

Abstract: An organic layer deposition apparatus including: a conveying unit including a first conveying unit conveying in a first direction a moving unit to which a substrate is removably adhered, and a second conveying unit conveying in a direction opposite to the first direction the moving unit from which the substrate is separated, in which the moving unit may be cyclically conveyed by the first and second conveying units; and a deposition unit including a deposition assembly being separate from the substrate while the first conveying unit conveys the substrate adhered to the moving unit and having a material deposited onto the substrate, and a housing having the deposition assembly provided therein and an internal space allowing the moving unit to pass therethrough, in which the movable unit may include a main body unit, an electrostatic chuck provided on the main body unit and having the substrate adhered thereto, a contactless power supply (CPS) module provided facing with the electrostatic chuck each other on the main body unit, and a shield unit having at least a portion thereof provided on the main body unit with the CPS module thereon and preventing heat transfer.

公开(公告)号：US09893322B2

公开(公告)日：2018-02-13

申请号：US15173008

申请日：2016-06-03

Applicant: Samsung Display Co., Ltd.

Inventor： Jungsuk Hahn ,  Taeyong Kim ,  Jaeseok Park ,  Kyubum Kim ,  Jonghee Lim

IPC: H01L51/56 ,  C23C16/458 ,  H01L21/677 ,  H01L21/683 ,  H01L51/00 ,  H01L27/32

CPC classification number: H01L51/56 ,  C23C14/042 ,  C23C14/12 ,  C23C14/24 ,  C23C14/568 ,  C23C16/4586 ,  H01L21/67706 ,  H01L21/6831 ,  H01L27/3244 ,  H01L51/001 ,  H01L2227/323

Abstract: An organic layer deposition apparatus including: a conveying unit including a first conveying unit conveying in a first direction a moving unit to which a substrate is removably adhered, and a second conveying unit conveying in a direction opposite to the first direction the moving unit from which the substrate is separated, in which the moving unit may be cyclically conveyed by the first and second conveying units; and a deposition unit including a deposition assembly being separate from the substrate while the first conveying unit conveys the substrate adhered to the moving unit and having a material deposited onto the substrate, and a housing having the deposition assembly provided therein and an internal space allowing the moving unit to pass therethrough, in which the movable unit may include a main body unit, an electrostatic chuck provided on the main body unit and having the substrate adhered thereto, a contactless power supply (CPS) module provided facing with the electrostatic chuck each other on the main body unit, and a shield unit having at least a portion thereof provided on the main body unit with the CPS module thereon and preventing heat transfer.