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公开(公告)号：US11774422B2
公开(公告)日：2023-10-03
申请号：US16458561
申请日：2019-07-01
Applicant: STMicroelectronics PTE LTD
Inventor： Fangxing Yuan , Ravi Shankar , Olivier Le Neel
CPC classification number: G01N33/0013 , G01N29/228 , G01N33/0016 , G01N33/0031
Abstract: The present disclosure is directed to a selective multi-gas sensor device that detects when a high concentration level of a particular gas, such as methane, carbon monoxide, and/or ethanol, is present. The selective multi-gas sensor device detects and identifies a particular gas based on a ratio between a sensitivity of a gas sensitive material at a first temperature and a sensitivity of the gas sensitive material at a second temperature.
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公开(公告)号：US10254261B2
公开(公告)日：2019-04-09
申请号：US15213100
申请日：2016-07-18
Applicant: STMicroelectronics Pte Ltd
Inventor： Olivier Le Neel , Tien Choy Loh , Shian Yeu Kam , Ravi Shankar
Abstract: A microelectronic device capable of detecting multiple gas constituents in ambient air can be used to monitor air quality. The microelectronic air quality monitor includes a plurality of temperature-sensitive gas sensors tuned to detect different gas species. Each gas sensor is tuned by programming an adjacent heater. An insulating air pocket formed below the sensor helps to maintain the sensor at a desired temperature. A temperature sensor may also be integrated with each gas sensor to provide additional feedback control. The heater, temperature sensor, and gas sensors are in the form of patternable thin films integrated on a single microchip. The device can be incorporated into computer workstations, smart phones, clothing, or other wearable accessories to function as a personal air quality monitor that is smaller, more accurate, and less expensive than existing air quality sensors.
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公开(公告)号：US20180090678A1
公开(公告)日：2018-03-29
申请号：US15783293
申请日：2017-10-13
Applicant: STMicroelectronics Pte Ltd
Inventor： Olivier Le Neel , Ravi Shankar
CPC classification number: H01L43/14 , G01N27/74 , H01L21/8234 , H01L43/04 , H01L43/065 , H01L43/10 , Y10T29/4913
Abstract: A miniature oxygen sensor makes use of paramagnetic properties of oxygen gas to provide a fast response time, low power consumption, improved accuracy and sensitivity, and superior durability. The miniature oxygen sensor disclosed maintains a sample of ambient air within a micro-channel formed in a semiconductor substrate. O2 molecules segregate in response to an applied magnetic field, thereby establishing a measureable Hall voltage. Oxygen present in the sample of ambient air can be deduced from a change in Hall voltage with variation in the applied magnetic field. The magnetic field can be applied either by an external magnet or by a thin film magnet integrated into a gas sensing cavity within the micro-channel. A differential sensor further includes a reference element containing an unmagnetized control sample. The miniature oxygen sensor is suitable for use as a real-time air quality monitor in consumer products such as smart phones.
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公开(公告)号：US09529433B2
公开(公告)日：2016-12-27
申请号：US14586547
申请日：2014-12-30
Applicant: STMICROELECTRONICS PTE LTD
Inventor： Ravi Shankar , Olivier Leneel
CPC classification number: G06F3/014 , G09G5/18 , G09G2370/16
Abstract: A flexible smart glove detects fine hand and finger motions while permitting the wearer to make hand gestures with dexterity. The flexible smart glove has a thickness of less than about 100 μm and incorporates capacitive micro-sensors positioned at finger joint locations. The micro-sensors are thin film devices built on substrates made of a pliable material such as polyimide. Interdigitated serpentine capacitors monitor strain in the back of the hand, while parallel plate capacitors monitor contact pressure on the palm. Thus the smart glove responds electrically to various types of hand motions. Thin film resistors responsive to changes in body temperature are also formed on the flexible substrate. Motion and temperature data is transmitted from the glove to a microprocessor via a passive RFID tag or an active wireless transmitter. An ASIC is embedded in the smart glove to relay real time sensor data to a remote processor.
Abstract translation: 灵活的智能手套可以检测精细的手指和手指运动，同时允许佩戴者灵巧地进行手势。 柔性智能手套具有小于约100μm的厚度，并且包括位于手指接合位置处的电容式微传感器。 微传感器是由诸如聚酰亚胺等柔韧材料制成的基板上的薄膜装置。 交叉蛇形电容器用于监测手背的应变，而平行电容器则监测手掌上的接触压力。 因此，智能手套电动响应于各种类型的手动。 响应于体温变化的薄膜电阻也形成在柔性基板上。 运动和温度数据通过无源RFID标签或有源无线发射器从手套传送到微处理器。 ASIC嵌入智能手套中以将实时传感器数据中继到远程处理器。
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公开(公告)号：US20160018356A1
公开(公告)日：2016-01-21
申请号：US14334572
申请日：2014-07-17
Applicant: STMicroelectronics Pte Ltd
Inventor： Ravi Shankar , Olivier Le Neel , Tien-Choy Loh , Shian-Yeu Kam
IPC: G01N27/406
CPC classification number: G01N27/12 , G01N27/123 , G01N27/125 , G01N27/128
Abstract: Miniature resistive gas detectors incorporate thin films that can selectively identify specific gases when heated to certain characteristic temperatures. A solid state gas sensor module is disclosed that includes a gas sensor, a heater, and a temperature sensor, stacked over an insulating recess. The insulating recess is partially filled with a support material that provides structural integrity. The solid state gas sensor module can be integrated on top of an ASIC on a common substrate. With sufficient thermal insulation, such a gas detector can be provided as a low-power component of mobile electronic devices such as smart phones. A method of operating a multi-sensor array allows detection of relative concentrations of different gas species by either using dedicated sensors, or by thermally tuning the sensors to monitor different gas species.
Abstract translation: 微型电阻气体检测器包含薄膜，当加热到特定温度时可以选择性地识别特定气体。 公开了一种固态气体传感器模块，其包括堆叠在绝缘凹槽上的气体传感器，加热器和温度传感器。 绝缘凹部部分地填充有提供结构完整性的支撑材料。 固态气体传感器模块可以集成在公共基板上的ASIC的顶部上。 具有足够的绝热性，这种气体检测器可以作为诸如智能电话的移动电子设备的低功率组件来提供。 操作多传感器阵列的方法允许通过使用专用传感器或通过热调谐传感器来监测不同气体种类来检测不同气体种类的相对浓度。
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Patent Agency Ranking
公开(公告)号：US09176089B2
公开(公告)日：2015-11-03
申请号：US13853732
申请日：2013-03-29
Applicant: STMicroelectronics Pte Ltd.
Inventor： Olivier Le Neel , Ravi Shankar , Suman Cherian , Calvin Leung , Tien-Choy Loh , Shian-Yeu Kam
IPC: H01L31/058 , G01N27/22 , H01L25/065 , H01L25/00 , G01L9/12 , G01K7/01 , H01L27/02 , H01L29/78 , G01K7/18 , G01K7/20
CPC classification number: G01N27/223 , G01D21/02 , G01K7/01 , G01K7/16 , G01K7/186 , G01K7/20 , G01L9/12 , G01L19/0092 , H01L25/0652 , H01L25/50 , H01L27/0248 , H01L29/7804 , H01L2924/0002 , H01L2924/00
Abstract: A semiconductor-based multi-sensor module integrates miniature temperature, pressure, and humidity sensors onto a single substrate. Pressure and humidity sensors can be implemented as capacitive thin film sensors, while the temperature sensor is implemented as a precision miniature Wheatstone bridge. Such multi-sensor modules can be used as building blocks in application-specific integrated circuits (ASICs). Furthermore, the multi-sensor module can be built on top of existing circuitry that can be used to process signals from the sensors. An integrated multi-sensor module that uses differential sensors can measure a variety of localized ambient environmental conditions substantially simultaneously, and with a high level of precision. The multi-sensor module also features an integrated heater that can be used to calibrate or to adjust the sensors, either automatically or as needed. Such a miniature integrated multi-sensor module that features low power consumption can be used in medical monitoring and mobile computing, including smart phone applications.
Abstract translation: 基于半导体的多传感器模块将微型温度，压力和湿度传感器集成到单个基板上。 压力和湿度传感器可以实现为电容薄膜传感器，而温度传感器实现为精密微型惠斯通电桥。 这种多传感器模块可以用作专用集成电路（ASIC）中的构建块。 此外，多传感器模块可以构建在可用于处理来自传感器的信号的现有电路之上。 使用差分传感器的集成多传感器模块可以大量同时测量各种局部环境条件，并以高精度测量。 多传感器模块还具有集成加热器，可用于自动或根据需要校准或调整传感器。 这种具有低功耗的微型集成多传感器模块可用于医疗监控和移动计算，包括智能手机应用。
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公开(公告)号：US09013012B2
公开(公告)日：2015-04-21
申请号：US13785938
申请日：2013-03-05
Applicant: STMicroelectronics Pte Ltd.
Inventor： Ravi Shankar , Olivier Le Neel , Shian Yeu Kam , Tien Choy Loh
CPC classification number: B81C1/00293 , B81B7/0041 , B81C2203/0136
Abstract: Embodiments of the present disclosure are related to MEMS devices having a suspended membrane that are secured to and spaced apart from a substrate with a sealed cavity therebetween. The membrane includes openings with sidewalls that are closed by a dielectric material. In various embodiments, the cavity between the membrane and the substrate is formed by removing a sacrificial layer through the openings. In one or more embodiments, the openings in the membrane are closed by depositing the dielectric material on the sidewalls of the openings and the upper surface of the membrane.
Abstract translation: 本公开的实施例涉及具有悬置膜的MEMS器件，其被固定到衬底上并与衬底间隔开密封腔。 膜包括具有由介电材料封闭的侧壁的开口。 在各种实施例中，通过从开口去除牺牲层来形成膜与衬底之间的空腔。 在一个或多个实施例中，通过将介电材料沉积在开口的侧壁和膜的上表面上来封闭膜中的开口。
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8.发明申请公开(公告)号：US20140292317A1
公开(公告)日：2014-10-02
申请号：US13853805
申请日：2013-03-29
Applicant: STMICROELECTRONICS PTE LTD.
Inventor： Olivier Le Neel , Ravi Shankar
IPC: G01N27/74
CPC classification number: H01L43/14 , G01N27/74 , H01L21/8234 , H01L43/04 , H01L43/065 , H01L43/10 , Y10T29/4913
Abstract: A miniature oxygen sensor makes use of paramagnetic properties of oxygen gas to provide a fast response time, low power consumption, improved accuracy and sensitivity, and superior durability. The miniature oxygen sensor disclosed maintains a sample of ambient air within a micro-channel formed in a semiconductor substrate. O2 molecules segregate in response to an applied magnetic field, thereby establishing a measureable Hall voltage. Oxygen present in the sample of ambient air can be deduced from a change in Hall voltage with variation in the applied magnetic field. The magnetic field can be applied either by an external magnet or by a thin film magnet integrated into a gas sensing cavity within the micro-channel. A differential sensor further includes a reference element containing an unmagnetized control sample. The miniature oxygen sensor is suitable for use as a real-time air quality monitor in consumer products such as smart phones.
Abstract translation: 微型氧传感器利用氧气的顺磁特性提供快速的响应时间，低功耗，提高的精度和灵敏度以及优异的耐久性。 所公开的微型氧传感器在半导体衬底中形成的微通道内保持环境空气样品。 O 2分子响应于施加的磁场而分离，从而建立可测量的霍尔电压。 环境空气样品中存在的氧气可以从施加磁场变化的霍尔电压变化推导出来。 磁场可以由外部磁体或集成到微通道内的气体感测腔中的薄膜磁体施加。 差分传感器还包括含有非磁化控制样品的参考元件。 微型氧传感器适用于智能手机等消费类产品中的实时空气质量监控。
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公开(公告)号：US20210247344A1
公开(公告)日：2021-08-12
申请号：US17236750
申请日：2021-04-21
Applicant: STMICROELECTRONICS PTE LTD
Inventor： Malek Brahem , Hatem Majeri , Olivier Le Neel , Ravi Shankar
Abstract: The present disclosure is directed to a gas sensor device that includes a plurality of gas sensors. Each of the gas sensors includes a semiconductor metal oxide (SMO) film, a heater, and a temperature sensor. Each of the SMO films is designed to be sensitive to a different gas concentration range. As a result, the gas sensor device is able to obtain accurate readings for a wide range of gas concentration levels. In addition, the gas sensors are selectively activated and deactivated based on a current gas concentration detected by the gas sensor device. Thus, the gas sensor device is able to conserve power as gas sensors are on when appropriate instead of being continuously on.
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公开(公告)号：US20210214211A1
公开(公告)日：2021-07-15
申请号：US17115137
申请日：2020-12-08
Applicant: STMicroelectronics Pte Ltd
Inventor： Ravi Shankar , Tien Choy Loh , Ananya Venkatesan
Abstract: A blind opening is formed in a bottom surface of a semiconductor substrate to define a thin membrane suspended from a substrate frame. The thin membrane has a topside surface and a bottomside surface. A stress structure is mounted to one of the topside surface or bottomside surface of the thin membrane. The stress structure induces a bending of the thin membrane which defines a normal state for the thin membrane. Piezoresistors are supported by the thin membrane. In response to an applied pressure, the thin membrane is bent away from the normal state and a change in resistance of the piezoresistors is indicative of the applied pressure.
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