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公开(公告)号:US20230063578A1
公开(公告)日:2023-03-02
申请号:US17712489
申请日:2022-04-04
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Eunho CHO , Jihwang KIM , Sunchul KIM
IPC: H01L23/498 , H01L23/31
Abstract: A semiconductor package is provided. The semiconductor package includes: a lower substrate including a lower wiring layer; a semiconductor chip disposed on the lower substrate, and electrically connected to the lower wiring layer; an upper substrate disposed on the semiconductor chip, and including an upper wiring layer; a first connection structure disposed on the lower wiring layer, and having a first hollow open toward the upper substrate; a second connection structure disposed below the upper wiring layer, and having a second hollow open toward the lower substrate; a conductive connection member disposed between the first connection structure and the second connection structure, and filling at least a portion of the first hollow; and an encapsulant disposed between the lower substrate and the upper substrate, and encapsulating at least a portion of each of the semiconductor chip, the first connection structure and the second connection structure.
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公开(公告)号:US20230112061A1
公开(公告)日:2023-04-13
申请号:US17826505
申请日:2022-05-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Eunho CHO , Jihwang KIM , Jongbo SHIM
IPC: H01L23/473 , H01L25/065 , H01L23/00
Abstract: A semiconductor package includes a first semiconductor chip, a second semiconductor chip disposed on the first semiconductor chip, a chip connection terminal configured to electrically connect the first semiconductor chip to the second semiconductor chip, an underfill layer disposed between the first semiconductor chip and the second semiconductor chip and surrounding the chip connection terminal, a vertical porous structure filling spaces of a plurality of vertical cooling channels passing through the first semiconductor chip, the second semiconductor chip, and the underfill layer in a vertical direction, and having a plurality of cooling holes, and a cooling fluid provided to the plurality of cooling holes of the vertical porous structure to flow inside the plurality of vertical cooling channels.
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公开(公告)号:US20240339376A1
公开(公告)日:2024-10-10
申请号:US18403864
申请日:2024-01-04
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Seunghyun CHO , Eunho CHO
IPC: H01L23/373 , H01L21/48 , H01L23/00 , H01L23/498
CPC classification number: H01L23/373 , H01L21/481 , H01L23/4985 , H01L24/16 , H01L24/32 , H01L24/73 , H01L23/145 , H01L2224/16227 , H01L2224/32225 , H01L2224/73204
Abstract: A chip on film package includes a flexible base film having a first surface and a second surface opposite to the first surface, the base film having a chip mounting region on the first surface; a plurality of wirings extending from the chip mounting region on the first surface of the base film in a first direction parallel to an extending direction of the base film; a semiconductor chip mounted on the chip mounting region on the first surface of the base film and electrically connected to the plurality of wirings; a heat dissipation layer provided to have a predetermined thickness in a depth direction from the second surface of the base film in an area overlapping the chip mounting region, the heat dissipation layer including a laser-induced carbon material; and an insulating layer covering the heat dissipation layer on the second surface of the base film.
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公开(公告)号:US20240194536A1
公开(公告)日:2024-06-13
申请号:US18215459
申请日:2023-06-28
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Heesub KIM , GUNHO JO , BOMI KIM , Eunho CHO
IPC: H01L21/8234 , H01L27/088
CPC classification number: H01L21/823481 , H01L27/088
Abstract: A method for manufacturing a semiconductor device includes: forming a semiconductor structure and a dummy structure on a substrate; forming a first insulating layer between the semiconductor structure and the dummy structure; forming a first space by removing the dummy structure; forming an isolation pattern in the first space; forming a main gate sacrificial pattern crossing the first direction to overlap the semiconductor structure; forming second spaces by removing portions of the semiconductor structure at both sides of the main gate sacrificial pattern, and forming source/drain patterns in the second spaces; forming a second insulating layer on the source/drain patterns; forming a third space by removing the main gate sacrificial pattern, and forming a gate electrode in the third space; and forming fourth spaces by removing the second insulating layer, and forming, in the fourth spaces, contact structures connected to the source/drain patterns and disposed on both sides of the isolation pattern.
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公开(公告)号:US20240321989A1
公开(公告)日:2024-09-26
申请号:US18397561
申请日:2023-12-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Gunho JO , Heesub KIM , Seunghyun LIM , Bomi KIM , Eunho CHO
IPC: H01L29/423 , H01L29/06 , H01L29/417 , H01L29/66 , H01L29/775
CPC classification number: H01L29/42392 , H01L29/0673 , H01L29/41733 , H01L29/66439 , H01L29/66545 , H01L29/775
Abstract: A semiconductor device includes a substrate, an active pattern including a lower pattern extending in a first direction and a plurality of sheet patterns above an upper surface of the lower pattern and spaced apart from the lower pattern in a second direction substantially perpendicular to the first direction, a gate structure on the lower pattern and including a gate electrode and a gate insulating film, the gate electrode and the gate insulating film at least partially surrounding the plurality of sheet patterns, a first gate capping pattern on the gate structure and above the plurality of sheet patterns in the second direction, a gate spacer extending along a side wall of the gate structure, and a second gate capping pattern extending along an upper surface of the gate structure and an upper surface of the first gate capping pattern.
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公开(公告)号:US20240145360A1
公开(公告)日:2024-05-02
申请号:US18244997
申请日:2023-09-12
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hwanjoo PARK , Jaechoon KIM , Sunggu KANG , Eunho CHO , Taehwan KIM , Jonggyu LEE
IPC: H01L23/498 , H01L23/00 , H01L25/10
CPC classification number: H01L23/49811 , H01L23/49838 , H01L24/16 , H01L24/32 , H01L24/73 , H01L25/105 , H01L2224/16225 , H01L2224/32225 , H01L2224/73204 , H01L2224/73253 , H01L2225/1023 , H01L2225/1041 , H01L2924/1434
Abstract: A semiconductor package includes a first redistribution wiring layer having first redistribution wirings, a first semiconductor chip on the first redistribution wiring layer and having a first thickness from the first redistribution wiring layer, a second semiconductor chip disposed on the first redistribution wiring layer spaced apart from the first semiconductor chip and having a second thickness from the first redistribution wiring layer smaller than the first thickness, a sealing member covering the first semiconductor chip and the second semiconductor chip on the first redistribution wiring layer, a plurality of conductive vias provided in the sealing member and electrically connected to the first redistribution wirings, a second redistribution wiring layer disposed on the sealing member and having second redistribution wirings electrically connected to the conductive vias, and at least one third semiconductor chip disposed on the second redistribution wiring layer and electrically connected to the second redistribution wirings.
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