Discharge laser having electrodes with sputter cavities and discharge peaks
    1.
    发明授权
    Discharge laser having electrodes with sputter cavities and discharge peaks 失效
    放电激光器具有带溅射腔和放电峰的电极

    公开(公告)号:US06560263B1

    公开(公告)日:2003-05-06

    申请号:US09590958

    申请日:2000-06-09

    IPC分类号: H01S322

    摘要: A gas discharge laser having a laser chamber with two elongated electrode elements, each having a discharge section having an optimum array of discharge peaks and sputter cavities. The sputter cavities provide sputter metal ions to contribute to a plasma between the electrodes and support a glow-type discharge. The peaks provide very high fields which produce a very large number of filament-type discharges. The electrodes erode gradually but since the discharge region is confined to the array of discharge peaks and sputter cavities, the shape of he discharge remains approximately constant for billions of pulses. A pulse power system provides electrical pulses of at least 2J at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.

    摘要翻译: 一种气体放电激光器,其具有具有两个细长电极元件的激光室,每个具有放电部分,其具有最佳放电峰阵列和溅射腔。 溅射腔提供溅射金属离子以有助于电极之间的等离子体并且支持辉光型放电。 这些峰提供非常高的场,其产生非常大量的灯丝型放电。 电极逐渐腐蚀,但是由于放电区被限制在放电峰和溅射腔阵列中,所以放电的形状在几十亿个脉冲中保持近似恒定。 脉冲功率系统以至少1KHz的速率提供至少2J的电脉冲。 鼓风机以至少5m / s的速度在电极之间循环激光气体,并且提供热交换器以去除由鼓风机和排出物产生的热量。

    Gas discharge laser system electrodes and power supply for delivering electrical energy to same
    3.
    发明授权
    Gas discharge laser system electrodes and power supply for delivering electrical energy to same 有权
    气体放电激光系统电极和用于将电能传递到相同的电源

    公开(公告)号:US07706424B2

    公开(公告)日:2010-04-27

    申请号:US11241850

    申请日:2005-09-29

    IPC分类号: H01S3/22 H02G3/04

    摘要: A apparatus and method are disclosed which may comprise a fluorine gas discharge laser system and electrode support system which may comprise a first electrode electrically connected to a source of high voltage; a first insulating mechanism insulating the first electrode from ground; a second electrode electrically insulated from the source of high voltage and together with the first electrode forming an elongated discharge region between portions of the first and second electrodes respectively extending along a longitudinal axis of each of the first and second electrodes, defining electrode discharge receiving region end portions; a plurality of current return tines electrically connected to the second electrode and to ground, the tines distributed along the longitudinal extent of the elongated discharge region; a second insulating mechanism electrically isolating the second electrode from ground except through the plurality of current return tines.

    摘要翻译: 公开了一种可以包括氟气放电激光器系统和电极支撑系统的装置和方法,该系统可以包括电连接到高电压源的第一电极; 将第一电极与地绝缘的第一绝缘机构; 与第一电极电绝缘的第二电极,与第一电极一起形成分别沿第一和第二电极的纵向轴线延伸的第一和第二电极的部分之间的细长放电区,限定电极放电接收区域 端部; 多个电流返回齿电连接到第二电极并接地,所述尖齿沿着细长放电区域的纵向范围分布; 除了通过多个电流返回齿之外,第二绝缘机构将第二电极与地电隔离。

    Halogen gas discharge laser electrodes
    4.
    发明授权
    Halogen gas discharge laser electrodes 有权
    卤素气体放电激光电极

    公开(公告)号:US07301980B2

    公开(公告)日:2007-11-27

    申请号:US10877737

    申请日:2004-06-25

    IPC分类号: H01S3/097

    摘要: A gas discharge laser includes a laser chamber containing a halogen laser gas, two electrode elements defining a cathode and an anode, each having a discharge receiving region defining two longitudinal edges and having a region width defining a width of an electric discharge between the electrode elements in the laser gas. The anode comprising a first anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region, a pair of second anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an electrode center base portion integral with the first anode portion; and wherein each of the respective pair of second anode portions is mechanically bonded to the center base portion.

    摘要翻译: 气体放电激光器包括含有卤素激光气体的激光室,限定阴极和阳极的两个电极元件,每个具有限定两个纵向边缘的放电接收区域,并且具有限定电极元件之间的放电宽度的区域宽度 在激光气体中。 阳极包括第一阳极部分,其包括限定第一阳极材料侵蚀速率的第一阳极材料,其完全位于放电接收区域内;一对第二阳极部分,包括限定第二阳极材料侵蚀速率的第二阳极材料,分别位于 所述第一阳极部分的每一侧并且至少部分地在所述放电接收区域内; 与所述第一阳极部分成一体的电极中心基部; 并且其中相应的一对第二阳极部分中的每一个机械地结合到中心基部。

    Adjustable flow guide to accommodate electrode erosion in a gas discharge laser
    5.
    发明授权
    Adjustable flow guide to accommodate electrode erosion in a gas discharge laser 有权
    可调导流板,适应气体放电激光器的电极腐蚀

    公开(公告)号:US07068697B1

    公开(公告)日:2006-06-27

    申请号:US11239581

    申请日:2005-09-28

    IPC分类号: H01S3/22

    摘要: A laser and method for operating a laser and disclosed. The laser may include a first discharge electrode and a second discharge electrode positioned at a distance from the first electrode. A laserable gas may be provided together with a circulation system to flow the gas into a space between the electrodes. A voltage source may be connected to the electrodes for creating a discharge in the space; and a flow guide having a guide surface in contact with the gas may be provided that is guide selectively moveable relative to the first electrode to guide a flow of gas into the space. In one implementation, the flow guide directs flow toward an extremity of the first electrode and is adjustable to direct flow toward the extremity as the first electrode wears.

    摘要翻译: 一种用于操作激光器的激光器和方法,并公开。 激光器可以包括位于距离第一电极一定距离的第一放电电极和第二放电电极。 可激光气体可与循环系统一起设置,以将气体流入电极之间的空间。 电压源可以连接到电极以在该空间中产生放电; 并且可以提供具有与气体接触的引导表面的流动引导件,其是相对于第一电极选择性地可移动的引导件,以引导气体流入空间。 在一个实施方案中,流动引导件将流动引向第一电极的末端,并且可调节以使流向第一电极磨损时的末端流动。

    Line narrowing apparatus with high transparency prism beam expander
    6.
    发明授权
    Line narrowing apparatus with high transparency prism beam expander 有权
    具有高透明棱镜光束扩张器的线条变窄装置

    公开(公告)号:US5978409A

    公开(公告)日:1999-11-02

    申请号:US162341

    申请日:1998-09-28

    摘要: A grating based line-narrowing apparatus having a prism beam expander with at least four prisms. Each prism is positioned at an incidence angle between 67 and 71 degrees. A single layer coating of high refractive index, robust material, such as Al.sub.2 O.sub.3, is applied to the hypotenuse face of each prism, providing an efficient, anti-reflection coating. In a preferred embodiment the incident angle of the four prisms are each at about 68.2 degrees. The laser of the preferred embodiment has similar line narrowing efficiency and bandwidth as that for a laser with a 3 prism, ideal multi-layer anti-reflection coated beam expander. The primary benefit of the new four prism arrangement is that the prism coatings should be much less expensive and have greatly increased durability. Applicants have tested the new prisms for 30 million, 10 mJ pulses in air with no noticeable degradation. No present day dielectric multi-layer stack coating could survive such exposure.

    摘要翻译: 一种基于光栅的线条变窄装置,具有至少具有四个棱镜的棱镜扩束器。 每个棱镜定位在67和71度之间的入射角。 高折射率的单层涂层,诸如Al2O3的坚固材料被施加到每个棱镜的斜边面,从而提供有效的抗反射涂层。 在一个优选实施例中,四个棱镜的入射角分别为约68.2度。 优选实施例的激光器具有与具有3棱镜,理想的多层抗反射涂层光束扩展器的激光器相似的线窄化效率和带宽。 新的四棱镜布置的主要优点是棱镜涂层应该便宜得多,并且耐久性大大提高。 申请人已经在空气中测试了新的棱镜3000万,10 mJ脉冲,没有明显的退化。 没有现在的电介质多层堆叠涂层可以经受这样的曝光。

    Optical absorption measurement system
    7.
    发明授权
    Optical absorption measurement system 失效
    光吸收测量系统

    公开(公告)号:US4868768A

    公开(公告)日:1989-09-19

    申请号:US908482

    申请日:1986-09-17

    IPC分类号: G01N21/17 G01N25/72

    摘要: The system of the present invention contemplates a non-intrusive method for measuring the temperature rise of optical elements under high laser power optical loading to determine the absorption coefficient. The method comprises irradiating the optical element with a high average power laser beam, viewing the optical element with an infrared camera to determine the temperature across the optical element and calculating the absorption of the optical element from the temperature.

    摘要翻译: 本发明的系统考虑了用于测量高激光功率光学负载下的光学元件的温度升高以确定吸收系数的非侵入性方法。 该方法包括用高平均功率激光束照射光学元件,用红外相机观察光学元件以确定光学元件两端的温度并计算光学元件从该温度的吸收。

    Cathodes for fluorine gas discharge lasers
    9.
    发明授权
    Cathodes for fluorine gas discharge lasers 有权
    氟气放电激光器的阴极

    公开(公告)号:US07535948B2

    公开(公告)日:2009-05-19

    申请号:US11488205

    申请日:2006-07-18

    IPC分类号: H01S3/22 H01S3/097

    摘要: A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint for the cathode comprising copper and a lower portion comprising a copper alloy, with the facing portion of the electrode if formed in a arcuate shape extending into straight line portions on either side of the arcuate portion, the straight line portions terminating in vertical straight sides, with the boundary between the copper including at least the arcuate portion, the electrode may comprise a bonded element machined from two pieces of material the first made of copper and the second made of a copper alloy bonded together before machining. The electrode may also comprise a first and a second elongated lopsided V-shaped groove formed along substantially all of the elongated electrode body forming a discharge receiving ridge between the first and second lopsided V-shaped grooves, with a differentially faster eroding material filling the first and second lopsided V-shaped grooves. also disclosed is an electrode system in which the one electrode, e.g., the cathode bows during operation and may comprise at least one of a first and second elongated gas discharge electrode being machined to form a crown to receive the gas discharge that compensates for the bowing of at least one of the gas discharge electrodes during operation of the fluorine gas discharge laser.

    摘要翻译: 公开了一种用于具有含氟激光气体的气体放电激光器的氟气放电激光电极,其可包括铜和铜合金阴极体,该铜和铜合金阴极体具有包含铜的阴极的放电足迹的上部弯曲区域,以及包含铜 合金,如果电极的对置部分形成为延伸到弓形部分两侧的直线部分的弓形形状,则直线部分终止于垂直的直边,铜线之间的边界至少包括弧形部分 电极可以包括由铜制成的两片材料加工的接合元件,以及在加工之前由铜合金制成的第二种材料。 电极还可以包括沿着基本上所有的细长电极体形成的第一和第二细长的非平面V形槽,该细长电极体在第一和第二偏斜V形槽之间形成放电接收脊,其中填充有第一 和第二个不对称的V形槽。 还公开了一种电极系统,其中一个电极,例如,阴极在操作期间弯曲并且可以包括被加工成形成冠部的第一和第二细长气体放电电极中的至少一个,以接收补偿弯曲的气体放电 的至少一个气体放电电极在氟气放电激光器的操作期间。

    Discharge laser with porous insulating layer covering anode discharge surface
    10.
    发明授权
    Discharge laser with porous insulating layer covering anode discharge surface 有权
    放电激光器具有覆盖阳极放电表面的多孔绝缘层

    公开(公告)号:US06711202B2

    公开(公告)日:2004-03-23

    申请号:US09953026

    申请日:2001-09-13

    申请人: Richard G. Morton

    发明人: Richard G. Morton

    IPC分类号: H01S3097

    摘要: A gas discharge laser having an elongated cathode and an elongated anode with a porous insulating layer covering the anode discharge surface. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges. In preferred embodiments at least a portion of the anode is comprised of lead, and fluorine ion sputtering of the anode surface creates the insulating layer (over the discharge surface of the anode) comprised in large part of lead fluoride. In a particular preferred embodiment the anode is fabricated in two parts, a first part having the general shape of a prior art anode with a trench shaped cavity at the top and a second part comprised of lead rich brass and disposed in the trench shape cavity.

    摘要翻译: 一种气体放电激光器,其具有细长阴极和具有覆盖阳极放电表面的多孔绝缘层的细长阳极。 脉冲功率系统以至少1KHz的速率提供电脉冲。 鼓风机以至少5m / s的速度在电极之间循环激光气体,并且提供热交换器以去除由鼓风机和排出物产生的热量。 在优选实施例中,阳极的至少一部分由铅构成,并且阳极表面的氟离子溅射产生大部分氟化铅所包含的绝缘层(在阳极的排放表面上)。 在特别优选的实施例中,阳极制造成两部分,第一部分具有现有技术阳极的一般形状,在顶部具有沟槽形空腔,第二部分由富含铅的黄铜组成并设置在沟槽形腔中。