公开(公告)号：US20250037960A1

公开(公告)日：2025-01-30

申请号：US18914392

申请日：2024-10-14

Applicant: NuFlare Technology, Inc.

Inventor： Kei HASEGAWA ,  Hayato KIMURA

IPC: H01J37/04 ,  H01J37/302 ,  H01J37/317

Abstract: A controller supplies, during beam irradiation, a shift register with control data which causes flip-flops to hold a “1” value and has a first voltage, and supplies, during a period except for the beam irradiation, the shift register with the control data which causes the flip-flops to hold a “1” value and has a second voltage lower than the first voltage to determine whether the flip-flops are operating normally by determining whether the control data supplied to the shift register coincides with control data output from one flip-flop or by determining whether a state to be obtained by blanking by a first electrode coupled to a first flip-flop in accordance with the control data supplied to the shift register coincides with a state by blanking by the first electrode in accordance with the control data supplied to the shift register.

公开(公告)号：US20180005799A1

公开(公告)日：2018-01-04

申请号：US15637527

申请日：2017-06-29

Applicant: NuFlare Technology, Inc.

Inventor： Kei HASEGAWA ,  Hayato KIMURA ,  Ryoh KAWANA

IPC: H01J37/317 ,  H01J37/04 ,  H01J37/302 ,  H01J37/09 ,  H01J37/20

Abstract: In one embodiment, a multi charged particle beam writing apparatus includes a blanking plate including a plurality of blankers, bitmap generation processing circuitry generating bitmap data for each writing pass of multi-pass writing, the bitmap data specifying irradiation time periods for a plurality of irradiation positions, a plurality of dose correction units configured to receive bitmap subdata items obtained by dividing the bitmap data from the bitmap generation processing circuitry, and correct the irradiation time periods to generate a plurality of dose data items corresponding to respective processing ranges, and data transfer processing circuitry transferring the plurality of dose data items to the blanking plate through a plurality of signal line groups. Each of the signal line groups corresponds to the blankers located in a predetermined region of the blanking plate. The data transfer processing circuitry changes the signal line groups, used to transfer the plurality of dose data items generated by the respective dose correction units, for each writing pass.

公开(公告)号：US20180350560A1

公开(公告)日：2018-12-06

申请号：US15991520

申请日：2018-05-29

Applicant: NUFLARE TECHNOLOGY, INC.

Inventor： Kei HASEGAWA ,  Hayato Kimura ,  Hideo Inoue ,  Yoshiaki Onimaru

IPC: H01J37/317 ,  G03F7/20

Abstract: A drawing device according to an embodiment includes: a stage configured to be capable of having a processing target mounted thereon; an aperture member including a plurality of apertures corresponding to a plurality of beams irradiated to the processing target; a data generator configured to generate gradation data indicating irradiation time data with n bits (n is a positive integer) with respect to positions of respective coordinates of the beams; a calculator configured to perform a logical addition operation of the gradation data of the respective positions of the coordinates; and a controller configured to control the aperture member based on the gradation data and a result of the logical addition operation.

公开(公告)号：US20240282550A1

公开(公告)日：2024-08-22

申请号：US18635723

申请日：2024-04-15

Applicant: NuFlare Technology, Inc.

Inventor： Kei HASEGAWA ,  Hayato KIMURA

IPC: H01J37/30 ,  H01J37/304 ,  H01J37/317

CPC classification number: H01J37/3007 ,  H01J37/304 ,  H01J37/3177 ,  H01J2237/0435

Abstract: A blanking aperture array system includes a data output circuit that outputs first data and a first error detection code generated from the first data. A shift register transfers the first data and first error detection code that are input from the data output circuit. A buffer receives the first data from a first register. An electrode receives a voltage based on the first data output from the buffer. An error detection circuit receives the first data and first error detection code from a register of a last stage, generates a second error detection code from the first data received from the register of the last stage, and generate a detection signal indicating a match if the first error detection code from the register of the last stage and the second error detection code match and indicating a mismatch if they do not match.

公开(公告)号：US20170243714A1

公开(公告)日：2017-08-24

申请号：US15437514

申请日：2017-02-21

Applicant: NuFlare Technology, Inc.

Inventor： Kei HASEGAWA ,  Hayato KIMURA

IPC: H01J37/22 ,  H01J37/302 ,  H01J37/317

CPC classification number: H01J37/222 ,  H01J37/302 ,  H01J37/3023 ,  H01J37/3177 ,  H01J2237/0437 ,  H01J2237/30416 ,  H01J2237/31762 ,  H01J2237/31774

Abstract: Disclosed is a method of diagnosing a conversion process for converting a format of image data including unit data corresponding to charged particle beams into a format suitable for an aperture array, the aperture array having a plurality of controllers provided to match a plurality of the charged particle beams to control the charged particle beams, and a driver configured to drive the controllers. The method includes: extracting the unit data having an identical first rank based on an arrangement of the unit data in the image data from the unit data of each block including a predetermined number of the unit data and calculating a first checksum of each of the first rank; extracting the unit data having an identical second rank after the conversion process from the unit data of each block and calculating a second checksum of each of the second rank; and comparing the first and second checksums.

公开(公告)号：US20160322196A1

公开(公告)日：2016-11-03

申请号：US15137290

申请日：2016-04-25

Applicant: NuFlare Technology, Inc.

Inventor： Kei HASEGAWA ,  Hayato KIMURA ,  Hideo INOUE ,  Yoshiaki ONIMARU

IPC: H01J37/304 ,  H01J37/20 ,  H01J37/04 ,  H01J37/244 ,  H01J37/317 ,  H01J37/30

CPC classification number: H01J37/045 ,  H01J37/3177 ,  H01J2237/2485 ,  H01J2237/31762

Abstract: According to one embodiment, in a multi-charged particle beam writing apparatus, a blanking plate includes a plurality of first buffers connected in series, second buffers in a plurality of stages connected in series between the first buffer and a blanker, and an error detection processing circuitry performing error detection on data stored in the first buffer and the second buffers. The blanking control data transfers to the corresponding blanker via the first buffer and the second buffers. In a case where the error detection processing circuitry detects an error, the control processing circuitry retransmits the blanking control data to the blanking plate with regard to a shot having the error detected therein and a shot which comes, in a shot order, after the shot having the error detected therein.

Abstract translation: 根据一个实施例，在多电荷粒子束写入装置中，消隐板包括串联连接的多个第一缓冲器，在第一缓冲器和消隐器之间串联连接的多级中的第二缓冲器，以及错误检测 处理电路对存储在第一缓冲器和第二缓冲器中的数据执行错误检测。 消隐控制数据经由第一缓冲器和第二缓冲器传送到相应的消隐器。 在错误检测处理电路检测到错误的情况下，控制处理电路相对于其中检测到的错误的镜头和拍摄顺序在拍摄之后重新发送到消隐板的消隐控制数据 其中检测到错误。