公开(公告)号：US09953800B2

公开(公告)日：2018-04-24

申请号：US15137290

申请日：2016-04-25

Applicant: NuFlare Technology, Inc.

Inventor： Kei Hasegawa ,  Hayato Kimura ,  Hideo Inoue ,  Yoshiaki Onimaru

IPC: H01J37/304 ,  H01J37/04 ,  H01J37/317

CPC classification number: H01J37/045 ,  H01J37/3177 ,  H01J2237/2485 ,  H01J2237/31762

Abstract: According to one embodiment, in a multi-charged particle beam writing apparatus, a blanking plate includes a plurality of first buffers connected in series, second buffers in a plurality of stages connected in series between the first buffer and a blanker, and an error detection processing circuitry performing error detection on data stored in the first buffer and the second buffers. The blanking control data transfers to the corresponding blanker via the first buffer and the second buffers. In a case where the error detection processing circuitry detects an error, the control processing circuitry retransmits the blanking control data to the blanking plate with regard to a shot having the error detected therein and a shot which comes, in a shot order, after the shot having the error detected therein.

公开(公告)号：US20180350560A1

公开(公告)日：2018-12-06

申请号：US15991520

申请日：2018-05-29

Applicant: NUFLARE TECHNOLOGY, INC.

Inventor： Kei HASEGAWA ,  Hayato Kimura ,  Hideo Inoue ,  Yoshiaki Onimaru

IPC: H01J37/317 ,  G03F7/20

Abstract: A drawing device according to an embodiment includes: a stage configured to be capable of having a processing target mounted thereon; an aperture member including a plurality of apertures corresponding to a plurality of beams irradiated to the processing target; a data generator configured to generate gradation data indicating irradiation time data with n bits (n is a positive integer) with respect to positions of respective coordinates of the beams; a calculator configured to perform a logical addition operation of the gradation data of the respective positions of the coordinates; and a controller configured to control the aperture member based on the gradation data and a result of the logical addition operation.

公开(公告)号：US10886103B2

公开(公告)日：2021-01-05

申请号：US16432009

申请日：2019-06-05

Applicant: NuFlare Technology, Inc.

Inventor： Kei Hasegawa ,  Yoshiaki Onimaru ,  Hayato Kimura

IPC: H01J37/30 ,  H01J37/317 ,  H01J37/20 ,  H01J37/302 ,  H01J37/04 ,  H01J37/09

Abstract: In one embodiment, a data processing method is for processing data in a writing apparatus performing multiple writing by using multiple beams. The data is for controlling an irradiation amount for each beam. The method includes generating irradiation amount data for each of a plurality of layers, the irradiation amount data defining an irradiation amount for each of a plurality of irradiation position, and the plurality of layers corresponding to writing paths in multiple writing, performing a correction process on the irradiation amounts defined in the irradiation amount data provided for each layer, calculating a sum of the irradiation amounts for the respective irradiation positions defined in the corrected irradiation amount data, comparing the sums between the plurality of layers, and determining whether or not an error has occurred in the correction process based on the comparison result.

公开(公告)号：US10475621B2

公开(公告)日：2019-11-12

申请号：US15991520

申请日：2018-05-29

Applicant: NUFLARE TECHNOLOGY, INC.

Inventor： Kei Hasegawa ,  Hayato Kimura ,  Hideo Inoue ,  Yoshiaki Onimaru

IPC: H01J37/317 ,  G03F7/20

Abstract: A drawing device according to an embodiment includes: a stage configured to be capable of having a processing target mounted thereon; an aperture member including a plurality of apertures corresponding to a plurality of beams irradiated to the processing target; a data generator configured to generate gradation data indicating irradiation time data with n bits (n is a positive integer) with respect to positions of respective coordinates of the beams; a calculator configured to perform a logical addition operation of the gradation data of the respective positions of the coordinates; and a controller configured to control the aperture member based on the gradation data and a result of the logical addition operation.