-
公开(公告)号:US20180261422A1
公开(公告)日:2018-09-13
申请号:US15914498
申请日:2018-03-07
申请人: JEOL Ltd.
IPC分类号: H01J37/09 , H01J37/28 , H01J37/244 , H01J37/14 , H01J37/30
CPC分类号: H01J37/09 , H01J37/023 , H01J37/14 , H01J37/244 , H01J37/28 , H01J37/3005 , H01J37/3056 , H01J2237/024 , H01J2237/0262 , H01J2237/14 , H01J2237/24475 , H01J2237/2448 , H01J2237/2804 , H01J2237/2806
摘要: A scanning electron microscope having a charged particle device that processes a specimen using a charged particle beam, the scanning electron microscope includes: an electron source; a secondary-electron detector that detects secondary electrons generated from the specimen; a backscattered-electron detector that is disposed closer to the electron source than a detection surface of the secondary-electron detector to detect backscattered electrons generated from the specimen; a shielding plate for shielding a detection surface of the backscattered-electron detector; and a moving mechanism that moves the shielding plate. In a state where the shielding plate is moved by the moving mechanism so as to shield the detection surface of the backscattered-electron detector, the shielding plate is located between the detection surface of the backscattered-electron detector and the detection surface of the secondary-electron detector.
-
公开(公告)号:US10361062B2
公开(公告)日:2019-07-23
申请号:US15902251
申请日:2018-02-22
申请人: JEOL Ltd.
IPC分类号: H01J37/28 , H01J37/244 , H01J37/10 , H01J37/147
摘要: A scanning electron microscope includes: a liner tube which transmits an electron beam; a scintillator having a through-hole into which the liner tube is inserted; a light guide which guides light generated by the scintillator; a conductive layer provided on a sensitive surface of the scintillator; and a conductive member provided in the scintillator, wherein the shortest distance between the liner tube and the conductive member is shorter than the shortest distance between the liner tube and the conductive layer, a voltage for accelerating electrons is applied to the conductive layer, and the conductive layer and the conductive member have a same potential.
-
公开(公告)号:US10269531B2
公开(公告)日:2019-04-23
申请号:US15914498
申请日:2018-03-07
申请人: JEOL Ltd.
IPC分类号: H01J37/09 , H01J37/02 , H01J37/244 , H01J37/28 , H01J37/305 , H01J37/14 , H01J37/30
摘要: A scanning electron microscope having a charged particle device that processes a specimen using a charged particle beam, the scanning electron microscope includes: an electron source; a secondary-electron detector that detects secondary electrons generated from the specimen; a backscattered-electron detector that is disposed closer to the electron source than a detection surface of the secondary-electron detector to detect backscattered electrons generated from the specimen; a shielding plate for shielding a detection surface of the backscattered-electron detector; and a moving mechanism that moves the shielding plate. In a state where the shielding plate is moved by the moving mechanism so as to shield the detection surface of the backscattered-electron detector, the shielding plate is located between the detection surface of the backscattered-electron detector and the detection surface of the secondary-electron detector.
-
公开(公告)号:US20180240644A1
公开(公告)日:2018-08-23
申请号:US15902251
申请日:2018-02-22
申请人: JEOL Ltd.
IPC分类号: H01J37/244 , H01J37/147 , H01J37/10
CPC分类号: H01J37/244 , H01J37/10 , H01J37/147 , H01J37/28 , H01J2237/2443
摘要: A scanning electron microscope includes: a liner tube which transmits an electron beam; a scintillator having a through-hole into which the liner tube is inserted; a light guide which guides light generated by the scintillator; a conductive layer provided on a sensitive surface of the scintillator; and a conductive member provided in the scintillator, wherein the shortest distance between the liner tube and the conductive member is shorter than the shortest distance between the liner tube and the conductive layer, a voltage for accelerating electrons is applied to the conductive layer, and the conductive layer and the conductive member have a same potential.
-
-
-