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公开(公告)号：US12261013B2
公开(公告)日：2025-03-25
申请号：US17964516
申请日：2022-10-12
Applicant: JEOL Ltd.
Inventor： Takeshi Kaneko , Isamu Ishikawa , Eiji Okunishi
Abstract: Provided is a charged particle beam system capable of preventing the data acquisition time from increasing. A control method for the system is also provided. The charged particle beam system includes: a beam blanker for blanking a charged particle beam; a sample stage on which a sample is tiltably held and thus can assume a tilt angle; a blanking controller for controlling the blanking of the charged particle beam and causing a pulsed beam having a duty ratio to be directed at the sample; and a tilt controller for controlling the tilt angle of the sample. The blanking controller sets the duty ratio of the pulsed beam based on the tilt angle of the sample.
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公开(公告)号：US20140374594A1
公开(公告)日：2014-12-25
申请号：US14307551
申请日：2014-06-18
Applicant: JEOL Ltd.
Inventor： Takeshi Kaneko
IPC: G01T1/20
CPC classification number: G01T1/2008 , H01J37/244 , H01J37/28 , H01J2237/2443
Abstract: A detector (100) is used to detect a charged particle beam (EB), and includes a first light emission portion (10) for converting the charged particle beam into light, a second light emission portion (20) for converting the charged particle beam transmitted through the first light emission portion (10) into light, and a light detector (30) for detecting the light produced by the first light emission portion (10) and the light produced by the second light emission portion (20). The first light emission portion (10) is a powdered scintillator. The second light emission portion (20) is a single crystal scintillator.
Abstract translation: 检测器（100）用于检测带电粒子束（EB），并且包括用于将带电粒子束转换成光的第一发光部分（10），用于转换带电粒子束的第二发光部分（20） 通过第一发光部分（10）透射的光;以及用于检测由第一发光部分（10）产生的光和由第二发光部分（20）产生的光的光检测器（30）。 第一光发射部分（10）是粉末闪烁体。 第二发光部（20）是单晶闪烁体。
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公开(公告)号：US12131881B2
公开(公告)日：2024-10-29
申请号：US17718976
申请日：2022-04-12
Applicant: JEOL Ltd.
Inventor： Takeshi Kaneko , Norihiro Okoshi , Yu Jimbo , Sang Tae Park
IPC: H01J37/22 , H01J37/244 , H01J37/28
CPC classification number: H01J37/22 , H01J37/244 , H01J37/28 , H01J2237/022 , H01J2237/2802
Abstract: A contamination prevention irradiation device includes a generation unit and a mirror unit. The generation unit generates a laser beam. The mirror unit has a mirror surface for reflecting a laser beam. The laser beam reflected on the mirror surface is applied to a specimen disposed inside an objective lens. The laser beam is composed of a pulse train. Once a laser beam is applied to the specimen before observation of the specimen, deposition of contaminants on the specimen can be prevented for a predetermined subsequent period.
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公开(公告)号：US20230115486A1
公开(公告)日：2023-04-13
申请号：US17964516
申请日：2022-10-12
Applicant: JEOL Ltd.
Inventor： Takeshi Kaneko , Isamu Ishikawa , Eiji Okunishi
Abstract: Provided is a charged particle beam system capable of preventing the data acquisition time from increasing. A control method for the system is also provided. The charged particle beam system includes: a beam blanker for blanking a charged particle beam; a sample stage on which a sample is tiltably held and thus can assume a tilt angle; a blanking controller for controlling the blanking of the charged particle beam and causing a pulsed beam having a duty ratio to be directed at the sample; and a tilt controller for controlling the tilt angle of the sample. The blanking controller sets the duty ratio of the pulsed beam based on the tilt angle of the sample.
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Patent Agency Ranking
公开(公告)号：US20230349839A1
公开(公告)日：2023-11-02
申请号：US18125460
申请日：2023-03-23
Applicant: JEOL Ltd.
Inventor： Hidetaka Sawada , Takeshi Kaneko , Shigeyuki Morishita , Yuji Kohno
CPC classification number: G01N23/04 , G01N23/18 , G01N2223/3301 , G01N2223/418
Abstract: An electron microscope includes an irradiation optical system that focuses electron beams and scans a specimen with the focused electron beams; a deflector that deflects the electron beams transmitted through the specimen; a detector that detects the electron beams transmitted through the specimen; and a control unit that controls the irradiation optical system and the deflector The control unit causes the irradiation optical system to scan the specimen with the electron beams so that the electron beams have a plurality of irradiation positions on the specimen. The control unit causes the deflector to repeatedly deflect the electron beams transmitted through each of the irradiation positions, so that a plurality of electron beams which have the same irradiation position and different incident angle ranges with respect to the specimen are caused to sequentially enter the detector.
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公开(公告)号：US11705303B2
公开(公告)日：2023-07-18
申请号：US17570077
申请日：2022-01-06
Applicant: JEOL Ltd.
Inventor： Tomoyuki Naganuma , Naoki Fujimoto , Takeshi Kaneko
CPC classification number: H01J37/20 , H01J37/26 , H01J2237/2002
Abstract: Provided is a sample loading method of loading a cooled sample into a sample exchange chamber of a charged particle beam apparatus includes: attaching the sample container in which a sample and liquid nitrogen are accommodated to the sample exchange chamber via a gate valve; evacuating a space between a liquid surface of the liquid nitrogen and the gate valve in a state in which the gate valve is closed; discharging the liquid nitrogen in the sample container after the space between the liquid surface of the liquid nitrogen and the gate valve has been evacuated; evacuating a space in the sample container after the liquid nitrogen in the sample container has been discharged; and opening the gate valve after the space in the sample container has been evacuated.
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公开(公告)号：US20220328280A1
公开(公告)日：2022-10-13
申请号：US17718976
申请日：2022-04-12
Applicant: JEOL Ltd.
Inventor： Takeshi Kaneko , Norihiro Okoshi , Yu Jimbo , Sang Tae Park
IPC: H01J37/22 , H01J37/28 , H01J37/244
Abstract: A contamination prevention irradiation device includes a generation unit and a mirror unit. The generation unit generates a laser beam. The mirror unit has a mirror surface for reflecting a laser beam. The laser beam reflected on the mirror surface is applied to a specimen disposed inside an objective lens. The laser beam is composed of a pulse train. Once a laser beam is applied to the specimen before observation of the specimen, deposition of contaminants on the specimen can be prevented for a predetermined subsequent period.
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公开(公告)号：US09029768B2
公开(公告)日：2015-05-12
申请号：US14307551
申请日：2014-06-18
Applicant: JEOL Ltd.
Inventor： Takeshi Kaneko
CPC classification number: G01T1/2008 , H01J37/244 , H01J37/28 , H01J2237/2443
Abstract: A detector (100) is used to detect a charged particle beam (EB), and includes a first light emission portion (10) for converting the charged particle beam into light, a second light emission portion (20) for converting the charged particle beam transmitted through the first light emission portion (10) into light, and a light detector (30) for detecting the light produced by the first light emission portion (10) and the light produced by the second light emission portion (20). The first light emission portion (10) is a powdered scintillator. The second light emission portion (20) is a single crystal scintillator.
Abstract translation: 检测器（100）用于检测带电粒子束（EB），并且包括用于将带电粒子束转换成光的第一发光部分（10），用于转换带电粒子束的第二发光部分（20） 通过第一发光部分（10）透射的光;以及用于检测由第一发光部分（10）产生的光和由第二发光部分（20）产生的光的光检测器（30）。 第一光发射部分（10）是粉末闪烁体。 第二发光部（20）是单晶闪烁体。
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公开(公告)号：US20220216030A1
公开(公告)日：2022-07-07
申请号：US17570077
申请日：2022-01-06
Applicant: JEOL Ltd.
Inventor： Tomoyuki Naganuma , Naoki Fujimoto , Takeshi Kaneko
IPC: H01J37/20
Abstract: Provided is a sample loading method of loading a cooled sample into a sample exchange chamber of a charged particle beam apparatus includes: attaching the sample container in which a sample and liquid nitrogen are accommodated to the sample exchange chamber via a gate valve; evacuating a space between a liquid surface of the liquid nitrogen and the gate valve in a state in which the gate valve is closed; discharging the liquid nitrogen in the sample container after the space between the liquid surface of the liquid nitrogen and the gate valve has been evacuated; evacuating a space in the sample container after the liquid nitrogen in the sample container has been discharged; and opening the gate valve after the space in the sample container has been evacuated.
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