公开(公告)号：US11705303B2

公开(公告)日：2023-07-18

申请号：US17570077

申请日：2022-01-06

Applicant: JEOL Ltd.

Inventor： Tomoyuki Naganuma ,  Naoki Fujimoto ,  Takeshi Kaneko

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/2002

Abstract: Provided is a sample loading method of loading a cooled sample into a sample exchange chamber of a charged particle beam apparatus includes: attaching the sample container in which a sample and liquid nitrogen are accommodated to the sample exchange chamber via a gate valve; evacuating a space between a liquid surface of the liquid nitrogen and the gate valve in a state in which the gate valve is closed; discharging the liquid nitrogen in the sample container after the space between the liquid surface of the liquid nitrogen and the gate valve has been evacuated; evacuating a space in the sample container after the liquid nitrogen in the sample container has been discharged; and opening the gate valve after the space in the sample container has been evacuated.

公开(公告)号：US20220216030A1

公开(公告)日：2022-07-07

申请号：US17570077

申请日：2022-01-06

Applicant: JEOL Ltd.

Inventor： Tomoyuki Naganuma ,  Naoki Fujimoto ,  Takeshi Kaneko

IPC: H01J37/20

Abstract: Provided is a sample loading method of loading a cooled sample into a sample exchange chamber of a charged particle beam apparatus includes: attaching the sample container in which a sample and liquid nitrogen are accommodated to the sample exchange chamber via a gate valve; evacuating a space between a liquid surface of the liquid nitrogen and the gate valve in a state in which the gate valve is closed; discharging the liquid nitrogen in the sample container after the space between the liquid surface of the liquid nitrogen and the gate valve has been evacuated; evacuating a space in the sample container after the liquid nitrogen in the sample container has been discharged; and opening the gate valve after the space in the sample container has been evacuated.

公开(公告)号：US20210313142A1

公开(公告)日：2021-10-07

申请号：US17223322

申请日：2021-04-06

Applicant: JEOL Ltd.

Inventor： Izuru Chiyo ,  Naoki Fujimoto ,  Tomoyuki Naganuma

IPC: H01J37/26 ,  H01J37/20

Abstract: There is provided a charged particle beam system capable of determining the type of each cartridge precisely. An electron microscope that embodies the charged particle beam system includes a discriminator for determining the type of each cartridge based on the range or distance measured by a laser range finder. Plural cartridges are received in a magazine. The laser range finder measures the range to a selected one of the plural cartridges which is placed in a measurement position. A first cartridge of a first type included in the plural cartridges has a first measurement surface at a first distance to the laser range finder when placed in the measurement position. A second cartridge of a second type has a second measurement surface at a second range to the laser range finder when placed in the measurement position.

公开(公告)号：US11342158B2

公开(公告)日：2022-05-24

申请号：US17223322

申请日：2021-04-06

Applicant: JEOL Ltd.

Inventor： Izuru Chiyo ,  Naoki Fujimoto ,  Tomoyuki Naganuma

IPC: H01J37/00 ,  H01J37/26 ,  H01J37/20

Abstract: There is provided a charged particle beam system capable of determining the type of each cartridge precisely. An electron microscope that embodies the charged particle beam system includes a discriminator for determining the type of each cartridge based on the range or distance measured by a laser range finder. Plural cartridges are received in a magazine. The laser range finder measures the range to a selected one of the plural cartridges which is placed in a measurement position. A first cartridge of a first type included in the plural cartridges has a first measurement surface at a first distance to the laser range finder when placed in the measurement position. A second cartridge of a second type has a second measurement surface at a second range to the laser range finder when placed in the measurement position.