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公开(公告)号：US11705303B2
公开(公告)日：2023-07-18
申请号：US17570077
申请日：2022-01-06
Applicant: JEOL Ltd.
Inventor： Tomoyuki Naganuma , Naoki Fujimoto , Takeshi Kaneko
CPC classification number: H01J37/20 , H01J37/26 , H01J2237/2002
Abstract: Provided is a sample loading method of loading a cooled sample into a sample exchange chamber of a charged particle beam apparatus includes: attaching the sample container in which a sample and liquid nitrogen are accommodated to the sample exchange chamber via a gate valve; evacuating a space between a liquid surface of the liquid nitrogen and the gate valve in a state in which the gate valve is closed; discharging the liquid nitrogen in the sample container after the space between the liquid surface of the liquid nitrogen and the gate valve has been evacuated; evacuating a space in the sample container after the liquid nitrogen in the sample container has been discharged; and opening the gate valve after the space in the sample container has been evacuated.
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公开(公告)号：US20220189731A1
公开(公告)日：2022-06-16
申请号：US17551384
申请日：2021-12-15
Applicant: JEOL Ltd.
Inventor： Naoki Fujimoto , Izuru Chiyo
IPC: H01J37/244 , H01J37/20
Abstract: A charged particle beam apparatus includes: a specimen chamber; a specimen holder that is disposed in the specimen chamber; a specimen exchange chamber that is connected to the specimen chamber; a transporting mechanism that transports a specimen between the specimen chamber and the specimen exchange chamber; a first temperature sensor that measures a temperature of the specimen holder; a second temperature sensor that measures a temperature of the transporting mechanism; and a control unit. The control unit: calculates a temperature difference between the specimen holder and the transporting mechanism based on the temperature of the specimen holder and the temperature of the transporting mechanism when the control unit has received an instruction to transport a specimen; determining whether the temperature difference is a threshold or more; and stopping transportation of a specimen when the control unit has determined that the temperature difference is the threshold or more.
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公开(公告)号：US20210313142A1
公开(公告)日：2021-10-07
申请号：US17223322
申请日：2021-04-06
Applicant: JEOL Ltd.
Inventor： Izuru Chiyo , Naoki Fujimoto , Tomoyuki Naganuma
Abstract: There is provided a charged particle beam system capable of determining the type of each cartridge precisely. An electron microscope that embodies the charged particle beam system includes a discriminator for determining the type of each cartridge based on the range or distance measured by a laser range finder. Plural cartridges are received in a magazine. The laser range finder measures the range to a selected one of the plural cartridges which is placed in a measurement position. A first cartridge of a first type included in the plural cartridges has a first measurement surface at a first distance to the laser range finder when placed in the measurement position. A second cartridge of a second type has a second measurement surface at a second range to the laser range finder when placed in the measurement position.
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Patent Agency Ranking
公开(公告)号：US11342158B2
公开(公告)日：2022-05-24
申请号：US17223322
申请日：2021-04-06
Applicant: JEOL Ltd.
Inventor： Izuru Chiyo , Naoki Fujimoto , Tomoyuki Naganuma
Abstract: There is provided a charged particle beam system capable of determining the type of each cartridge precisely. An electron microscope that embodies the charged particle beam system includes a discriminator for determining the type of each cartridge based on the range or distance measured by a laser range finder. Plural cartridges are received in a magazine. The laser range finder measures the range to a selected one of the plural cartridges which is placed in a measurement position. A first cartridge of a first type included in the plural cartridges has a first measurement surface at a first distance to the laser range finder when placed in the measurement position. A second cartridge of a second type has a second measurement surface at a second range to the laser range finder when placed in the measurement position.
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公开(公告)号：US11651936B2
公开(公告)日：2023-05-16
申请号：US17551384
申请日：2021-12-15
Applicant: JEOL Ltd.
Inventor： Naoki Fujimoto , Izuru Chiyo
IPC: H01J37/244 , H01J37/20
CPC classification number: H01J37/244 , H01J37/20 , H01J2237/2001 , H01J2237/2007
Abstract: A charged particle beam apparatus includes: a specimen chamber; a specimen holder that is disposed in the specimen chamber; a specimen exchange chamber that is connected to the specimen chamber; a transporting mechanism that transports a specimen between the specimen chamber and the specimen exchange chamber; a first temperature sensor that measures a temperature of the specimen holder; a second temperature sensor that measures a temperature of the transporting mechanism; and a control unit. The control unit: calculates a temperature difference between the specimen holder and the transporting mechanism based on the temperature of the specimen holder and the temperature of the transporting mechanism when the control unit has received an instruction to transport a specimen; determining whether the temperature difference is a threshold or more; and stopping transportation of a specimen when the control unit has determined that the temperature difference is the threshold or more.
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公开(公告)号：US20220216030A1
公开(公告)日：2022-07-07
申请号：US17570077
申请日：2022-01-06
Applicant: JEOL Ltd.
Inventor： Tomoyuki Naganuma , Naoki Fujimoto , Takeshi Kaneko
IPC: H01J37/20
Abstract: Provided is a sample loading method of loading a cooled sample into a sample exchange chamber of a charged particle beam apparatus includes: attaching the sample container in which a sample and liquid nitrogen are accommodated to the sample exchange chamber via a gate valve; evacuating a space between a liquid surface of the liquid nitrogen and the gate valve in a state in which the gate valve is closed; discharging the liquid nitrogen in the sample container after the space between the liquid surface of the liquid nitrogen and the gate valve has been evacuated; evacuating a space in the sample container after the liquid nitrogen in the sample container has been discharged; and opening the gate valve after the space in the sample container has been evacuated.
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公开(公告)号：US11205558B2
公开(公告)日：2021-12-21
申请号：US16800419
申请日：2020-02-25
Applicant: JEOL Ltd.
Inventor： Naoki Fujimoto , Kimitaka Hiyama
IPC: H01J37/20 , H01J37/16 , H01J37/244
Abstract: A sample exchange device includes a first transport mechanism that includes a grip portion that grips a sample holding member and transports a sample holding member to a sample exchange chamber, a cooling unit that cools the sample exchange chamber, fiber sensors that detect whether or not the grip portion of the first transport mechanism grips the sample holding member in the sample exchange chamber, and a control unit. The control unit turns on the fiber sensors when the grip portion of the first transport mechanism enters the sample exchange chamber and turns off the fiber sensors after it is detected whether or not the grip portion of the first transport mechanism grips the sample holding member.
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公开(公告)号：US20200273660A1
公开(公告)日：2020-08-27
申请号：US16800419
申请日：2020-02-25
Applicant: JEOL Ltd.
Inventor： Naoki Fujimoto , Kimitaka Hiyama
IPC: H01J37/20 , H01J37/16 , H01J37/244
Abstract: A sample exchange device includes a first transport mechanism that includes a grip portion that grips a sample holding member and transports a sample holding member to a sample exchange chamber, a cooling unit that cools the sample exchange chamber, fiber sensors that detect whether or not the grip portion of the first transport mechanism grips the sample holding member in the sample exchange chamber, and a control unit. The control unit turns on the fiber sensors when the grip portion of the first transport mechanism enters the sample exchange chamber and turns off the fiber sensors after it is detected whether or not the grip portion of the first transport mechanism grips the sample holding member.
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