公开(公告)号：US11205558B2

公开(公告)日：2021-12-21

申请号：US16800419

申请日：2020-02-25

Applicant: JEOL Ltd.

Inventor： Naoki Fujimoto ,  Kimitaka Hiyama

IPC: H01J37/20 ,  H01J37/16 ,  H01J37/244

Abstract: A sample exchange device includes a first transport mechanism that includes a grip portion that grips a sample holding member and transports a sample holding member to a sample exchange chamber, a cooling unit that cools the sample exchange chamber, fiber sensors that detect whether or not the grip portion of the first transport mechanism grips the sample holding member in the sample exchange chamber, and a control unit. The control unit turns on the fiber sensors when the grip portion of the first transport mechanism enters the sample exchange chamber and turns off the fiber sensors after it is detected whether or not the grip portion of the first transport mechanism grips the sample holding member.

公开(公告)号：US20200273660A1

公开(公告)日：2020-08-27

申请号：US16800419

申请日：2020-02-25

Applicant: JEOL Ltd.

Inventor： Naoki Fujimoto ,  Kimitaka Hiyama

IPC: H01J37/20 ,  H01J37/16 ,  H01J37/244

Abstract: A sample exchange device includes a first transport mechanism that includes a grip portion that grips a sample holding member and transports a sample holding member to a sample exchange chamber, a cooling unit that cools the sample exchange chamber, fiber sensors that detect whether or not the grip portion of the first transport mechanism grips the sample holding member in the sample exchange chamber, and a control unit. The control unit turns on the fiber sensors when the grip portion of the first transport mechanism enters the sample exchange chamber and turns off the fiber sensors after it is detected whether or not the grip portion of the first transport mechanism grips the sample holding member.