Charged particle beam system and control method therefor

    公开(公告)号:US12261013B2

    公开(公告)日:2025-03-25

    申请号:US17964516

    申请日:2022-10-12

    Applicant: JEOL Ltd.

    Abstract: Provided is a charged particle beam system capable of preventing the data acquisition time from increasing. A control method for the system is also provided. The charged particle beam system includes: a beam blanker for blanking a charged particle beam; a sample stage on which a sample is tiltably held and thus can assume a tilt angle; a blanking controller for controlling the blanking of the charged particle beam and causing a pulsed beam having a duty ratio to be directed at the sample; and a tilt controller for controlling the tilt angle of the sample. The blanking controller sets the duty ratio of the pulsed beam based on the tilt angle of the sample.

    Charged Particle Beam System and Control Method Therefor

    公开(公告)号:US20230115486A1

    公开(公告)日:2023-04-13

    申请号:US17964516

    申请日:2022-10-12

    Applicant: JEOL Ltd.

    Abstract: Provided is a charged particle beam system capable of preventing the data acquisition time from increasing. A control method for the system is also provided. The charged particle beam system includes: a beam blanker for blanking a charged particle beam; a sample stage on which a sample is tiltably held and thus can assume a tilt angle; a blanking controller for controlling the blanking of the charged particle beam and causing a pulsed beam having a duty ratio to be directed at the sample; and a tilt controller for controlling the tilt angle of the sample. The blanking controller sets the duty ratio of the pulsed beam based on the tilt angle of the sample.

    Three-Dimensional Image Reconstruction Method, Image Processor, and Electron Microscope

    公开(公告)号:US20170278669A1

    公开(公告)日:2017-09-28

    申请号:US15505462

    申请日:2015-08-21

    Abstract: A three-dimensional image reconstruction method associated with the present invention comprises the steps of: obtaining a first transmission electron microscope image of a sample containing the membrane proteins present within a lipid membrane, the image having been taken by illuminating an electron beam on the sample from a direction tilted relative to a line normal to the membrane surface of the lipid membrane (step S10); obtaining a second transmission electron microscope image of the sample taken by illuminating the electron beam on the sample perpendicularly to the membrane surface of the lipid membrane (step S12); identifying orientations of the membrane proteins of the first transmission electron microscope image on a basis of the second transmission electron microscope image (step S14); and analyzing a three-dimensional structure of the membrane proteins from the first transmission electron microscope image on a basis of information about the identified orientations of the membrane proteins (step S18).

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