Viscoelastic pad upon integrated circuit device contact for multipass electrical characterization probe testing

    公开(公告)号:US10901030B2

    公开(公告)日:2021-01-26

    申请号:US16278905

    申请日:2019-02-19

    IPC分类号: G01R31/28 G01R3/00 G01R1/073

    摘要: An integrated circuit (IC) device, such as a wafer, die, or the like, includes a viscoelastic pad upon a contact. The viscoelastic pad includes a viscoelastic material and an electrically conductive material within the viscoelastic material. The viscoelastic pad provides for a probe needle of an IC device tester to be electrically connected to the IC device contact without the probe needle directly contacting the IC device contact. The viscoelastic pad may be probed multiple instances by the probe needle and may be washed or otherwise removed from the IC device after testing is completed. The viscoelastic pad may be formed upon the IC device by forming the viscoelastic material within a mask, aligning the viscoelastic pad to the IC device contact, and ejecting the viscoelastic material from the mask upon the IC device contact.

    FILLER PARTICLE POSITION AND DENSITY MANIPULATION WITH APPLICATIONS IN THERMAL INTERFACE MATERIALS

    公开(公告)号:US20200066669A1

    公开(公告)日:2020-02-27

    申请号:US16109182

    申请日:2018-08-22

    摘要: A thermal interface material and systems and methods for forming a thermal interface material include depositing a layer of a composite material, including at least a first material and a second material, the first material including a carrier fluid and the second material including a filler particle suspended within the first material. A particle manipulator is positioned over the layer of the composite material, the particle manipulator including at least one emitter to apply a particle manipulating field to bias a movement of the filler particles. The second material is redistributed by applying the particle manipulating field to interact with the second material causing the second material to migrate from a surrounding region in the composite material into a high concentration region in the composite material to form a customized thermal interface such that the high concentration region is configured and positioned corresponding to a hotspot.

    Filler particle position and density manipulation with applications in thermal interface materials

    公开(公告)号:US10903184B2

    公开(公告)日:2021-01-26

    申请号:US16109182

    申请日:2018-08-22

    摘要: A thermal interface material and systems and methods for forming a thermal interface material include depositing a layer of a composite material, including at least a first material and a second material, the first material including a carrier fluid and the second material including a filler particle suspended within the first material. A particle manipulator is positioned over the layer of the composite material, the particle manipulator including at least one emitter to apply a particle manipulating field to bias a movement of the filler particles. The second material is redistributed by applying the particle manipulating field to interact with the second material causing the second material to migrate from a surrounding region in the composite material into a high concentration region in the composite material to form a customized thermal interface such that the high concentration region is configured and positioned corresponding to a hotspot.

    SPATIALLY LOCALIZED THERMAL INTERFACE MATERIALS

    公开(公告)号:US20200303282A1

    公开(公告)日:2020-09-24

    申请号:US16358648

    申请日:2019-03-19

    IPC分类号: H01L23/373

    摘要: A semiconductor device that includes a semiconductor substrate having a surface, the surface having several regions having different thermal and/or mechanical requirements; and a composite thermal interface material including several spatially localized thermal interface materials placed on the surface, each of the several thermal interface materials tailored to the different thermal and/or mechanical requirements of each of the regions. Also disclosed is a method of forming the composite thermal interface material.