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公开(公告)号：US6068699A
公开(公告)日：2000-05-30
申请号：US702840
申请日：1996-08-26
IPC分类号： C30B15/28 , C30B29/06 , H01L21/208
CPC分类号： C30B15/28 , Y10T117/1004 , Y10T117/1008 , Y10T117/1032 , Y10T117/1072
摘要： The present invention utilizes a weighing detector as well as a weighing diameter-controlling method in a crystal-pulling apparatus using a wire method for measuring the crystal weight in accuracy. A pulling wire 4 and a wire rolling means 20, having a wire rolling drum 21, suspended on a weighing detector 2 in a freely rotating way. Accordingly, in the weighing detector 2, the weights of the pulling wire 4 and the wire rolling means 20 are served to balance the loading weight. In addition, the vertical central line 6 of the weighing detector, the rotating axis of the wire rolling drum 21, the rotating axis of the wire rolling means 20, and the axis of pulling crystals are all consistent. Consequently, the whole gravity center is located on the vertical central line of the weighing detector 2. When pulling the single crystals at the same time as rolling the wire, the gravity center of the wire rolling means is shifted merely depending on the diameter variation at the pulling wire. Therefore, the deviation of the single crystal-pulling axis while rolling the wire rolling means can be decreased. Therefore, it is possible to pull single crystals as well as weigh in a stable manner.
摘要翻译： 本发明在采用线法测量晶体重量的晶体拉制装置中使用称重检测器以及称重控制方法。 牵引线4和线滚动装置20，具有以自由旋转的方式悬挂在称重检测器2上的线滚筒21。 因此，在称重检测器2中，牵引线4和线轧制装置20的重量用于平衡负载重量。 此外，称重检测器的垂直中心线6，卷材滚筒21的旋转轴线，丝网轧制装置20的旋转轴线和拉晶轴线都是一致的。 因此，整个重心位于称重检测器2的垂直中心线上。当在滚动线材的同时拉动单晶时，线滚动装置的重心仅根据直径变化 牵引线。 因此，可以减少轧制轧制装置时的单个拉伸轴的偏差。 因此，可以拉伸单晶并且以稳定的方式称重。
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公开(公告)号：US5935325A
公开(公告)日：1999-08-10
申请号：US874346
申请日：1997-06-13
IPC分类号： C30B15/28 , C30B15/30 , C30B29/06 , H01L21/208 , C34B35/00
CPC分类号： C30B15/28 , Y10T117/10 , Y10T117/1004 , Y10T117/1008 , Y10T117/1032
摘要： A weight control in diameter method by using a load cell is applied to a wire-single crystal silicon pulling mechanism, such that the weight of single crystal silicon can be correctly measured, thereby obtaining superior control in diameter and reducing the cost of manufacturing the single crystal silicon.
摘要翻译： 通过使用称重传感器将直径法的重量控制法应用于线状单晶硅拉拔机构，从而可以正确测量单晶硅的重量，从而获得优异的直径控制并降低制造单体硅的成本 晶体硅。
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公开(公告)号：US5858088A
公开(公告)日：1999-01-12
申请号：US17763
申请日：1998-02-03
IPC分类号： C30B15/30
CPC分类号： C30B15/30 , Y10T117/1004 , Y10T117/1008 , Y10T117/1072
摘要： The winding drum of the cable-winding device is kept air-tight by an air-tight container. A lower elastic sealing member 1a is interposed between the air-tight container and the rotation table. The air-tight container, the lower elastic sealing member 1a, and the chamber are communicated with one another. The air-tight container and the chamber are filled with inert gases at less than atmospheric pressure. The rotation table, the weight sensors, the drive motor, the gear are disposed in the atmosphere. An arm is vertically installed on the rotation table. An upper elastic sealing member 1b is interposed between the end portion of the arm and the air-tight container. The upper elastic sealing member is communicated the interior of the air-tight container through a through hole. The arm support the top portion of the upper elastic sealing member.
摘要翻译： 电缆卷绕装置的卷绕鼓由气密容器保持气密。 下面的弹性密封件1a插在气密容器和转台之间。 气密容器，下弹性密封件1a和腔室彼此连通。 气密容器和室在低于大气压下填充惰性气体。 旋转台，重量传感器，驱动电机，齿轮设置在大气中。 手臂垂直安装在旋转台上。 上臂弹性密封件1b插在臂的端部和气密容器之间。 上弹性密封构件通过通孔与气密容器的内部连通。 臂支撑上弹性密封构件的顶部。
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4.发明授权
公开(公告)号：US5997641A
公开(公告)日：1999-12-07
申请号：US986415
申请日：1997-12-08
CPC分类号： C30B15/305 , C30B15/32 , Y10S117/917 , Y10T117/1072
摘要： The hold member has a small-diameter portion and a large-diameter portion. An inner cylinder and an outer cylinder are disposed around the hold member in a concentric manner. The upper end of the hold member is affixed to a wire and suspended therefrom. A clearance is formed between the small-diameter portion and the inner cylinder. Clearances are created between the outer peripheral surface of the inner cylinder and the inner peripheral surface of the outer cylinder.
摘要翻译： 保持构件具有小直径部分和大直径部分。 内筒和外筒以同心方式设置在保持构件周围。 保持构件的上端固定在线上并悬挂在其上。 在小径部和内筒之间形成有间隙。 在内筒的外周面与外筒的内周面之间产生间隙。
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公开(公告)号：US5935322A
公开(公告)日：1999-08-10
申请号：US60161
申请日：1998-04-15
CPC分类号： C30B15/26 , C30B15/22 , Y10T117/1004
摘要： In the process of forming-the shoulder in which the diameter of a crystal is gradually extended from a small seed crystal to a predetermined value, the largest width of a bright ring, which is formed in a boundary between the melt and the crystal pulled up from the melt, is measured, and an arc width of an arbitrary portion of the bright ring located before the largest width portion is measured. When the largest width of the bright ring has reached a predetermined value, a measured value of the arc width at the arbitrary position of the bright ring is used as a reference value, and after that, automatic control is conducted so that the measured value of the arc width can be close to the reference value.
摘要翻译： 在形成晶体的过程中，晶体的直径从小晶种逐渐延伸到预定值，在熔融物和晶体的边界上形成的亮环的最大宽度被拉高 测量熔融物，并且测量位于最大宽度部分之前的亮环的任意部分的电弧宽度。 当亮环的最大宽度达到预定值时，将亮环的任意位置处的电弧宽度的测量值用作参考值，然后进行自动控制，使得测量值 电弧宽度可以接近参考值。
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公开(公告)号：US5766347A
公开(公告)日：1998-06-16
申请号：US803774
申请日：1997-02-24
IPC分类号： C30B15/14 , C30B29/06 , H01L21/208 , C30B35/00
CPC分类号： C30B15/14 , Y10S117/90 , Y10T117/10 , Y10T117/1068 , Y10T117/1088
摘要： An apparatus for fabricating a semiconductor single crystal, which make it possible to reduce the oxygen concentration of a pulling single crystal, to steadily dissolve the polysilicon material received in a crucible, and to minimize the cost and installation space, is provided. The hollow cylindrical resistance heater of the apparatus, which co-axially surrounds a crucible, is provided with a ring-shaped slit excluding the location where at least two electrodes are formed, in a direction substantially perpendicular to the axial direction so as to divide the heater into an upper heating portion and a lower heating portion, and is provided with a plurality of vertical slits formed on the upper heating portion and the lower heating portion respectively, in a direction substantially parallel to the axial direction, wherein each vertical slit formed on the upper heating portion does not align with each vertical slit formed on the lower heating portion. The vertical slits formed on the upper heating portion and the slits formed on the lower heating portion have different pitches. The thickness or length of the upper heating portion is different from that of the lower heating portion.
摘要翻译： 提供一种用于制造半导体单晶的装置，其可以降低拉制单晶的氧浓度，以稳定地溶解容纳在坩埚中的多晶硅材料，并且最小化成本和安装空间。 同轴地围绕坩埚的装置的中空圆柱形电阻加热器在基本上垂直于轴向方向的方向上设置有除了至少两个电极形成的位置之外的环形狭缝，以便将 加热器加热到上加热部分和下加热部分中，并且在基本上平行于轴向的方向上分别形成有在上加热部分和下加热部分上的多个垂直狭缝，其中每个垂直狭缝形成在 上加热部分不与形成在下加热部分上的每个垂直狭缝对准。 形成在上加热部分上的垂直狭缝和形成在下加热部分上的狭缝具有不同的间距。 上部加热部的厚度或长度与下部加热部的厚度或长度不同。
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公开(公告)号：US5938843A
公开(公告)日：1999-08-17
申请号：US48789
申请日：1998-03-27
CPC分类号： C30B15/30 , Y10S117/911 , Y10T117/1072
摘要： This invention provides a apparatus for pulling up crystal bodies, which is capable of firmly clamping and safely pulling up large-diameter crystal bodies regardless of the location of the necked portions formed on the top of the crystal bodies. A large-diameter portion 52 and a necked portion 51 are formed on the top of the crystal body 5. The swaying members 12 of the necked-portion clamp 1 are capable of swaying upward and downward without restraint. The stopper 14 restrains the swaying members 12 to sway below the horizontal plane on which the swaying members 12a are located. The large-diameter portion 52 can pass through the clamp body 11 by lowering the necked-portion clamp 1 to sway the swaying members 12 upward. The swaying members 12 close to clamp the necked portion 51 when the necked-portion clamp 1 reaches a location near the necked portion 51. The distance between the necked-portion clamp 1 and the seed-crystal 3 is adjustable.
摘要翻译： 本发明提供一种用于提取晶体的装置，其能够牢固地夹紧和安全地拉大直径的晶体，而不管形成在晶体的顶部上的颈部的位置如何。 大直径部分52和颈缩部分51形成在晶体5的顶部上。颈缩夹具1的摆动部件12能够在不受约束的情况下向上和向下摆动。 止动件14限制摆动构件12摆动在摆动构件12a所在的水平面的下方。 大直径部分52可以通过下降颈部夹紧件1使摇动构件12向上摆动而穿过夹具本体11。 当颈缩部分夹具1到达颈缩部分51附近的位置时，摇动构件12靠近夹紧颈缩部分51.颈缩部分夹子1和籽晶3之间的距离是可调节的。
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8.发明授权Vacuum pump with a centrifugal dust collector and a metal mesh dust collector mounted in parallel 失效真空泵带有离心除尘器和金属网集尘器并联安装
公开(公告)号：US5857840A
公开(公告)日：1999-01-12
申请号：US706492
申请日：1996-09-04
申请人： Ayumi Suda , Yoshinobu Hiraishi
发明人： Ayumi Suda , Yoshinobu Hiraishi
IPC分类号： B01D45/12 , B01D46/10 , B01D50/00 , B01J3/02 , B04C9/00 , C30B15/00 , C30B35/00 , F04B39/16 , F04B49/00
摘要： The objects of the present invention are to remove the dust in a closed container, to keep the pressure in the closed container within a predetermined range, and to shorten the maintenance time of a vacuum pump system.The present invention provides a centrifugal dust collector 2 on main pipes which connects a furnace body 1, a mechanical press 9 and a dry pump 10, and a metal mesh dust collector 15 on a bifurcated pipe in a single-crystal semiconductor pulling apparatus. When the vacuum pump process begins, the metal mesh dust collector 15 collects amorphous silicon generated in the furnace 1. As the pressure in the furnace is reduced, the centrifugal dust collector 2 collects the dust particles instead. Since the gas flow rate increases as the vacuum state become higher, the critical diameter of collectable particles decreases, thereby improving the dust collection efficiency. The collected amorphous silicon accumulates on the bottom of the centrifugal dust collector and can be easily removed so as to facilitate maintenance. Moreover, there will be very little pressure variance in the furnace since no dust filter is blocked.
摘要翻译： 本发明的目的是去除密闭容器中的灰尘，以将密封容器中的压力保持在预定范围内，并缩短真空泵系统的维护时间。 本发明在单体半导体拉制装置中，在分支管上连接炉体1，机械压力机9和干式泵10以及金属网状集尘器15的主管上设置有离心除尘器2。 当真空泵工艺开始时，金属网集尘器15收集在炉子1中产生的非晶硅。随着炉中的压力降低，离心式集尘器2代替收集灰尘颗粒。 由于气体流量随着真空状态变高而增加，所以可收集颗粒的临界直径减小，从而提高集尘效率。 收集的非晶硅积聚在离心式集尘器的底部，可以方便地取出，以方便维护。 此外，由于没有防尘过滤器被堵塞，所以炉子的压力变化很小。
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公开(公告)号：US5725660A
公开(公告)日：1998-03-10
申请号：US758475
申请日：1996-11-29
申请人： Yoshinobu Hiraishi
发明人： Yoshinobu Hiraishi
CPC分类号： C30B15/32 , C30B15/20 , C30B15/30 , Y10T117/1004 , Y10T117/1072
摘要： A semiconductor single crystal growing apparatus is vertically and telescopically provided with a seed holder. The seed holder comprises a seed-holding member for holding a seed and a suspending bolt for bolting the seed-holding member. The front end of the seed coincides with a datum point when the seed holder is moved to a top dead point.
摘要翻译： 半导体单晶生长装置是垂直和可伸缩地设置有种子保持器。 种子保持器包括用于保持种子的种子保持构件和用于螺栓固定种子保持构件的悬挂螺栓。 当种子保持器移动到上死点时，种子的前端与基准点重合。
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公开(公告)号：US20080311021A1
公开(公告)日：2008-12-18
申请号：US11981477
申请日：2007-10-31
申请人： Hiroshi Inagaki , Shigeki Kawashima , Makoto Kamogawa , Toshirou Kotooka , Toshiaki Saishoji , Daisuke Ebi , Kentaro Nakamura , Kengo Hayashi , Yoshinobu Hiraishi , Shigeo Morimoto , Hiroshi Monden , Tadayuki Hanamoto , Tadashi Hata
发明人： Hiroshi Inagaki , Shigeki Kawashima , Makoto Kamogawa , Toshirou Kotooka , Toshiaki Saishoji , Daisuke Ebi , Kentaro Nakamura , Kengo Hayashi , Yoshinobu Hiraishi , Shigeo Morimoto , Hiroshi Monden , Tadayuki Hanamoto , Tadashi Hata
CPC分类号： C30B15/206 , C30B15/14 , C30B15/30 , C30B29/06 , Y10S117/911 , Y10T117/10 , Y10T117/1004 , Y10T117/1008 , Y10T117/1032 , Y10T117/1052 , Y10T117/1068 , Y10T117/1072 , Y10T117/1088
摘要： In a Czochralski (CZ) single crystal puller equipped with a cooler and a thermal insulation member, which are to be disposed in a CZ furnace, smooth recharge and additional charge of material are made possible. Further, elimination of dislocations from a silicon seed crystal by use of the Dash's neck method can be performed smoothly. To these ends, there is provided a CZ single crystal puller, wherein a cooler and a thermal insulation member are immediately moved upward away from a melt surface during recharge or additional charge of material or during elimination of dislocations from a silicon seed crystal by use of the Dash's neck method.
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