公开(公告)号：US06184984B2

公开(公告)日：2001-02-06

申请号：US09246922

申请日：1999-02-09

申请人： Shing Lee ,  Haiming Wang ,  Adam Norton ,  Mehrdad Nikoonahad

发明人： Shing Lee ,  Haiming Wang ,  Adam Norton ,  Mehrdad Nikoonahad

IPC分类号： G01N2121

CPC分类号： G01J4/02 ,  G01J3/447 ,  G01N21/21

摘要： A polarized sample beam of broadband radiation is focused onto the surface of a sample and the radiation modified by the sample is collected by means of a mirror system in different planes of incidence. The sample beam focused to the sample has a multitude of polarization states. The modified radiation is analyzed with respect to a polarization plane to provide a polarimetric spectrum. Thickness and refractive information may then be derived from the spectrum. Preferably the polarization of the sample beam is altered only by the focusing and the sample, and the analyzing is done with respect to a fixed polarization plane. In the preferred embodiment, the focusing of the sample beam and the collection of the modified radiation are repeated employing two different apertures to detect the presence or absence of a birefringence axis in the sample. In another preferred embodiment, the above-described technique may be combined with ellipsometry for determining the thicknesses and refractive indices of thin films.

摘要翻译： 将宽带辐射的极化样品束聚焦到样品的表面上，并且通过不同入射平面的反射镜系统收集由样品改性的辐射。 聚焦到样品的样品束具有许多极化状态。 相对于偏振平面分析修改的辐射以提供偏振光谱。 然后可以从光谱导出厚度和折射信息。 优选地，样品光束的偏振仅由聚焦和样品改变，并且相对于固定的偏振平面进行分析。 在优选实施例中，使用两个不同的孔来重复样品束的聚焦和修改的辐射的收集，以检测样品中双折射轴的存在或不存在。 在另一个优选实施例中，上述技术可以与用于确定薄膜的厚度和折射率的椭偏仪组合。

公开(公告)号：US06552803B1

公开(公告)日：2003-04-22

申请号：US09375664

申请日：1999-08-17

申请人： Haiming Wang ,  Shing Lee ,  Mehrdad Nikoonahad

发明人： Haiming Wang ,  Shing Lee ,  Mehrdad Nikoonahad

IPC分类号： G01B902

CPC分类号： G01B17/025 ,  G01B11/0675 ,  G01N29/2418 ,  G01N29/348 ,  G01N2291/014 ,  G01N2291/02854 ,  G01N2291/0427

摘要： Thickness of a film in a sample may be detected by directing pump laser pulses to the surface of a sample to generate an acoustic pulse in a sample. The acoustic pulse propagates downwards until it reaches an interface between the bottom of the film and a substrate and is reflected back to the top surface of the film as a first echo. A reflection of the first echo propagates downwards and is again reflected back towards the surface as a second echo. Heterodyne interferometry is used to measure the lapse of time between the first and second echos from which the thickness of the film may be determined.

摘要翻译： 可以通过将泵浦激光脉冲引导到样品的表面以在样品中产生声脉冲来检测样品中的膜的厚度。 声脉冲向下传播直到其到达膜的底部和基底之间的界面并且作为第一回波被反射回到膜的顶表面。 第一个回波的反射向下传播并再次反射回到表面作为第二回波。 使用异步干涉测量来测量第一和第二回波之间的时间流逝，从该距离可以确定膜的厚度。

公开(公告)号：US06611330B2

公开(公告)日：2003-08-26

申请号：US09778245

申请日：2001-02-06

申请人： Shing Lee ,  Haiming Wang ,  Adam Norton ,  Mehrdad Nikoonahad

发明人： Shing Lee ,  Haiming Wang ,  Adam Norton ,  Mehrdad Nikoonahad

IPC分类号： G01N2121

CPC分类号： G01J4/02 ,  G01J3/447 ,  G01N21/21

摘要： A polarized sample beam of broadband radiation is focused onto the surface of a sample and the radiation modified by the sample is collected by means of a mirror system in different planes of incidence. The sample beam focused to the sample has a multitude of polarization states. The modified radiation is analyzed with respect to a polarization plane to provide a polarimetric spectrum. Thickness and refractive information may then be derived from the spectrum. Preferably the polarization of the sample beam is altered only by the focusing and the sample, and the analyzing is done with respect to a fixed polarization plane. In the preferred embodiment, the focusing of the sample beam and the collection of the modified radiation are repeated employing two different apertures to detect the presence or absence of a birefringence axis in the sample. In another preferred embodiment, the above-described technique may be combined with ellipsometry for determining the thicknesses and refractive indices of thin films.

公开(公告)号：US06108087A

公开(公告)日：2000-08-22

申请号：US28417

申请日：1998-02-24

申请人： Mehrdad Nikoonahad ,  Shing Lee ,  Haiming Wang

发明人： Mehrdad Nikoonahad ,  Shing Lee ,  Haiming Wang

IPC分类号： G01B21/08 ,  G01B17/02 ,  G01N29/00 ,  G01N29/24 ,  G01N29/34 ,  G01B9/02

CPC分类号： G01B17/025 ,  G01N29/2418 ,  G01N29/348 ,  G01N2291/014 ,  G01N2291/02854 ,  G01N2291/0427

摘要： Thickness of a film in a sample may be detected by directing pump laser pulses to the surface of a sample to generate an acoustic pulse in a sample. The acoustic pulse propagates downwards until it reaches an interface between the bottom of the film and a substrate and is reflected back to the top surface of the film as a first echo. A reflection of the first echo propagates downwards and is again reflected back towards the surface as a second echo. Interferometry is used to measure the lapse of time between the first and second echos from which the thickness of the film may be determined.

摘要翻译： 可以通过将泵浦激光脉冲引导到样品的表面以在样品中产生声脉冲来检测样品中的膜的厚度。 声脉冲向下传播直到其到达膜的底部和基底之间的界面并且作为第一回波被反射回到膜的顶表面。 第一个回波的反射向下传播并再次反射回到表面作为第二回波。 使用干涉测量来测量第一和第二回波之间的时间流逝，从该厚度可以确定膜的厚度。

公开(公告)号：US06804003B1

公开(公告)日：2004-10-12

申请号：US09405716

申请日：1999-09-24

申请人： Haiming Wang ,  Patrick M. Maxton ,  Kenneth C. Johnson ,  Mehrdad Nikoonahad

发明人： Haiming Wang ,  Patrick M. Maxton ,  Kenneth C. Johnson ,  Mehrdad Nikoonahad

IPC分类号： G01J400

CPC分类号： G01J3/447 ,  G01B11/0641 ,  G01J4/02 ,  G01N21/21 ,  G01N21/211

摘要： Two phase modulators or polarizing elements are employed to modulate the polarization of an interrogating radiation beam before and after the beam has been modified by a sample to be measured. Radiation so modulated and modified by the sample is detected and up to 25 harmonics may be derived from the detected signal. The up to 25 harmonics may be used to derive ellipsometric and system parameters, such as parameters related to the angles of fixed polarizing elements, circular deattenuation, depolarization of the polarizing elements and retardances of phase modulators. A portion of the radiation may be diverted for detecting sample tilt or a change in sample height. A cylindrical objective may be used for focusing the beam onto the sample to illuminate a circular spot on the sample. The above-described self-calibrating ellipsometer may be combined with another optical measurement instrument such as a polarimeter, a spectroreflectometer or another ellipsometer to improve the accuracy of measurement and/or to provide calibration standards for the optical measurement instrument. The self-calibrating ellipsometer as well as the combined system may be used for measuring sample characteristics such as film thickness and depolarization of radiation caused by the sample.

摘要翻译： 采用两相调制器或偏振元件来调制光束已被待测样品修改之前和之后的询问辐射束的极化。 检测由样本调制和修改的辐射，并且可以从检测到的信号导出多达25个谐波。 可以使用多达25个谐波来导出椭偏和系统参数，例如与固定偏振元件的角度相关的参数，圆形去衰减，偏振元件的去极化和相位调制器的延迟。 可以转移一部分辐射以检测样品倾斜或样品高度的变化。 可以使用圆柱形物镜将光束聚焦到样品上以照亮样品上的圆形斑点。 上述自校准椭偏仪可以与另一种光学测量仪器如偏振计，分光光度计或其他椭偏仪组合，以提高测量精度和/或为光学测量仪器提供校准标准。 自校准椭偏仪以及组合系统可用于测量样品特性，如样品的膜厚度和辐射的去极化。

公开(公告)号：US06734968B1

公开(公告)日：2004-05-11

申请号：US09298007

申请日：1999-04-22

申请人： Haiming Wang ,  Patrick M. Maxton ,  Kenneth C. Johnson ,  Mehrdad Nikoonahad

发明人： Haiming Wang ,  Patrick M. Maxton ,  Kenneth C. Johnson ,  Mehrdad Nikoonahad

IPC分类号： G01N2121

CPC分类号： G01J4/02 ,  G01J3/447 ,  G01N21/21

摘要： Two phase modulators or polarizing elements are employed to modulate the polarization of an interrogating radiation beam before and after the beam has been modified by a sample to be measured. Radiation so modulated and modified by the sample is detected and up to 25 harmonics may be derived from the detected signal. The up to 25 harmonics may be used to derive ellipsometric and system parameters, such as parameters related to the angles of fixed polarizing elements, circular deattenuation, depolarization of the polarizing elements and retardances of phase modulators. A portion of the radiation may be diverted for detecting sample tilt or a change in sample height. A cylindrical objective may be used for focusing the beam onto the sample to illuminate a circular spot on the sample. The above-described self-calibrating ellipsometer may be combined with another optical measurement instrument such as a polarimeter, a spectroreflectometer or another ellipsometer to improve the accuracy of measurement and/or to provide calibration standards for the optical measurement instrument. The self-calibrating ellipsometer as well as the combined system may be used for measuring sample characteristics such as film thickness and depolarization of radiation caused by the sample.

公开(公告)号：US10665111B2

公开(公告)日：2020-05-26

申请号：US15525577

申请日：2016-08-01

申请人： Honeywell International Inc. ,  Haiming Wang ,  Yi Zhong ,  Zhenning Zhou

发明人： Haiming Wang ,  Yi Zhong ,  Zhenning Zhou

IPC分类号： G08G5/00 ,  H04B7/185 ,  H04B1/00 ,  G10L15/00

摘要： A system for overhearing data or voice communications is provided. The system comprises at least one antenna operative to receive messages comprising data messages or voice messages, or both data and voice messages. A radio unit is in communication with the at least one antenna, with the radio unit operative to receive signals corresponding to the messages from the at least one antenna. A processor unit is in communication with the radio unit, with the processor unit operative to process the signals corresponding to the messages. A display unit is in communication with the processor unit, with the display unit operatively enabled in response to the signals corresponding to the messages. The display unit is operative to show the messages in a text format or a graphics format.

公开(公告)号：US09705659B2

公开(公告)日：2017-07-11

申请号：US14008298

申请日：2011-04-11

申请人： Jing Han ,  Erlin Zeng ,  Wei Bai ,  Haiming Wang

发明人： Jing Han ,  Erlin Zeng ,  Wei Bai ,  Haiming Wang

IPC分类号： H04B7/212 ,  H04L5/00

CPC分类号： H04L5/0094 ,  H04L5/001 ,  H04L5/0055

摘要： A method for providing uplink feedback optimization may include determining a set of candidate uplink subframes and corresponding component carriers to transmit uplink feedback, and determining a selected uplink subframe and corresponding component carrier from among the set of candidate uplink subframes based on a feedback delay associated with the set of candidate uplink subframes. A corresponding apparatus and computer program product are also provided.

公开(公告)号：US09456458B2

公开(公告)日：2016-09-27

申请号：US14400277

申请日：2012-05-09

申请人： Wei Bai ,  Jing Han ,  Chunyan Gao ,  Haiming Wang ,  Asbjoern Groevlen

发明人： Wei Bai ,  Jing Han ,  Chunyan Gao ,  Haiming Wang ,  Asbjoern Groevlen

IPC分类号： H04L1/00 ,  H04W74/08 ,  H04L1/18 ,  H04L5/00 ,  H04W72/12

CPC分类号： H04W74/0833 ,  H04L1/1854 ,  H04L5/0055 ,  H04W72/1242 ,  H04W74/0875

摘要： A method, apparatus and computer program product are provided in order to allow an uplink resource request to be transmitted to the access point even in an instance in which the mobile terminal is receiving a continuous downlink transmission and repeated ACK/NACK transmissions are enabled. In this regard, a method, apparatus and computer program product are provided to prioritize a preamble transmission for a random access procedure relative to the repeated ACK/NACK transmissions. The method, apparatus and computer program also prioritize at least one message of the random access procedure.

摘要翻译： 提供了一种方法，装置和计算机程序产品，以便即使在移动终端正在接收连续下行链路传输并且重复的ACK / NACK传输被启用的情况下也允许将上行链路资源请求发送到接入点。 在这方面，提供了一种方法，装置和计算机程序产品，用于相对于重复的ACK / NACK传输来对用于随机接入过程的前同步码传输进行优先级排序。 方法，装置和计算机程序还优先考虑随机接入过程的至少一个消息。

公开(公告)号：US09408103B2

公开(公告)日：2016-08-02

申请号：US14354248

申请日：2011-10-26

申请人： Wei Bai ,  Tero Henttonen ,  Na Wei ,  Jing Han ,  Haiming Wang

发明人： Wei Bai ,  Tero Henttonen ,  Na Wei ,  Jing Han ,  Haiming Wang

IPC分类号： H04W24/10 ,  H04W72/04 ,  H04W16/14

CPC分类号： H04W24/10 ,  H04W16/14 ,  H04W72/0413 ,  H04W72/042

摘要： The specification and drawings present a new method, apparatus and software related product (e.g., a computer readable memory) for implementing enhanced and flexible radio aperiodic measurements, e.g., on an unlicensed band in LTE wireless systems and providing effective and timely reporting. A UE may receive from a wireless network an aperiodic measurement request to measure a special measurement object (e.g., a neighbor cell) specified in the aperiodic measurement request, e.g., in an unlicensed band. In response to the aperiodic measurement request, the UE may perform the measurement of the special management object until a further instruction from the wireless network or for a determined period of time. Inter-frequency measurements may be performed during the measurement gap determined from the aperiodic measurement request.

摘要翻译： 说明书和附图提出了用于实现增强和灵活的无线电非周期测量的新方法，装置和软件相关产品（例如，计算机可读存储器），例如在LTE无线系统中的未许可频带上并且提供有效和及时的报告。 UE可以从无线网络接收非周期测量请求，以测量在非周期性测量请求中指定的特殊测量对象（例如，相邻小区），例如在非许可频带中。 响应于非周期测量请求，UE可以执行特殊管理对象的测量，直到来自无线网络的进一步指令或在确定的时间段内。 在从非周期测量请求确定的测量间隙期间可以执行频率间测量。