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1.发明公开公开(公告)号：US20240219175A1
公开(公告)日：2024-07-04
申请号：US18601648
申请日：2024-03-11
Inventor： Yousuke IRIE , Hirotsugu INOUE , Koutaro SAKAMOTO
CPC classification number: G01B21/085 , G01J5/0003 , G01N25/72 , G01J2005/0077 , G01K3/04 , G01K3/06
Abstract: A thickness measurement method includes: heating a surface of the measurement object in a dot shape by a heating device; generating a thermal image corresponding to a temperature of the surface of the measurement object by capturing an image of the heated surface of the measurement object at a predetermined time interval by an imaging device; acquiring temperature data indicating temporal changes in temperature at multiple positions on the surface of the measurement object based on the thermal image generated by the imaging device; fitting a solution function indicating a solution of a heat conduction equation corresponding to a point heat source and including a parameter related to the thickness of the measurement object to the temperature data; and calculating the thickness of the measurement object based on a value of the parameter in the fitted solution function.
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公开(公告)号：US20240218560A1
公开(公告)日：2024-07-04
申请号：US18397635
申请日：2023-12-27
Applicant: ASM IP Holding B.V.
Inventor： Sandeep Ghosh , Robinson James , Caleb Miskin
CPC classification number: C30B25/16 , C23C16/24 , C23C16/52 , C30B25/10 , C30B29/06 , G01B21/08 , H01L21/02532 , H01L21/02576 , H01L21/0262
Abstract: A semiconductor processing system includes a precursor delivery arrangement, a chamber arrangement, and a controller. The chamber arrangement is connected to the precursor delivery arrangement. The controller is operatively connected to the precursor delivery arrangement and the chamber arrangement, includes a processor disposed in communication with a memory, and is responsive to instructions recorded on the memory to acquire a baseline substrate thickness profile for a selected process recipe, determine a first temperature profile setting for depositing a first material layer at low pressure for the selected process recipe, determine a high-pressure thermal offset for the first temperature profile setting, apply the high-pressure thermal offset to the first temperature profile setting to determine a second temperature profile setting, seat a first substrate on the first substrate support within the chamber arrangement and flow a second material layer precursor via the precursor delivery arrangement over the first substrate at high pressure according to the selected process recipe using the second temperature profile setting.
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公开(公告)号：US20240191988A1
公开(公告)日：2024-06-13
申请号：US18406384
申请日：2024-01-08
Applicant: Proxcontrol IP B.V.
Inventor： Remy Michel SERRUIJS , Ronnie Jacobus Samuel NIEUWENBURG , Rob KEIJ
Abstract: By measuring a position of a spray gun relative to a physical surface to coat, using data on technical characteristics of the spray gun, like a spray cone the spray gun may produce and data on a coating fluid used, characteristics of a coating layer thus physically deposited may be reconstructed. With data being recording during the spray job, this is faster and more accurate than measuring layer thickness at various locations, either pre-determined or randomly. By determining flow characteristics in a spray cone and position of the spray cone relative to the surface over time and using a model of the spray cone, deposition of the layer of coating may be determined and the final layer, cured or uncured, may be reconstructed, including thickness.
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公开(公告)号：US20240175679A1
公开(公告)日：2024-05-30
申请号：US18389014
申请日：2023-11-13
Applicant: Sumitomo Rubber Industries, Ltd.
Inventor： Kazuma TOKUDA , Naoki MORITA , Yusuke MAEDA
IPC: G01B21/08
CPC classification number: G01B21/08
Abstract: An estimation apparatus for a water film thickness on a road surface includes a data acquisition unit and an estimation unit. The data acquisition unit sequentially acquires a data set including driving force data representing a driving force output from a driving source of a vehicle and acceleration data representing a longitudinal acceleration of the vehicle, while the vehicle is traveling. The estimation unit estimates a thickness of a water film on a road surface on which the vehicle travels, based on a relationship between a speed of the vehicle and a fluid resistance that the vehicle receives from the water film, the flow resistance being calculated based on the data set.
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公开(公告)号：US11965735B2
公开(公告)日：2024-04-23
申请号：US17395867
申请日：2021-08-06
Inventor： Yousuke Irie , Hirotsugu Inoue , Koutaro Sakamoto
CPC classification number: G01B21/085 , G01J5/0003 , G01N25/72 , G01J2005/0077 , G01K3/04 , G01K3/06
Abstract: A thickness measurement method includes: heating a surface of the measurement object in a dot shape by a heating device; generating a thermal image corresponding to a temperature of the surface of the measurement object by capturing an image of the heated surface of the measurement object at a predetermined time interval by an imaging device; acquiring temperature data indicating temporal changes in temperature at multiple positions on the surface of the measurement object based on the thermal image generated by the imaging device; fitting a solution function indicating a solution of a heat conduction equation corresponding to a point heat source and including a parameter related to the thickness of the measurement object to the temperature data; and calculating the thickness of the measurement object based on a value of the parameter in the fitted solution function.
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Patent Agency Ranking
公开(公告)号：US20240102797A1
公开(公告)日：2024-03-28
申请号：US18256246
申请日：2020-12-09
Applicant: NIPPON TELEGRAPH AND TELEPHONE CORPORATION
Inventor： Azusa Ishii , Shingo Mineta , Soichi Oka
Abstract: A coating film evaluation structure includes a laminate including a first sheet, a second sheet, and a third sheet which are laminated. The second sheet is disposed on the first sheet, and the third sheet is disposed on the second sheet. In the laminate, the area of each sheet gradually reduces in the lamination direction, and a stepped portion is provided at an end portion. The coating film to be evaluated and the plurality of sheets have different colors. The coating film evaluation structure includes a coating film layer formed on the sheet having the largest area among the plurality of sheets so as to cover the other sheets and having a flat surface.
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公开(公告)号：US20240085175A1
公开(公告)日：2024-03-14
申请号：US18272152
申请日：2022-01-11
Inventor： Haysler Apolinário Amoroso LIMA
IPC: G01B21/08
CPC classification number: G01B21/085
Abstract: The present invention relates to a system and a method for measuring the thickness of refractories comprising a heat flux measuring device (10) for measuring the flow of heat flowing from a hot face to a cold face of the refractory, a core (11) surrounded by a thermally insulating jacket (12) comprising, in which the core (11) conducts, between a first (11a) and a second (11b) face, heat from the hot face of the refractory to the cold face of the refractory; and a measuring apparatus (20) configured to: continuously measure the temperature on the first face of the core and on the second face of the core; determining the heat flux flowing through the heat flow measuring device (10) and determining the thickness of the refractory material by means of equivalent thermal conductivity of the refractory material.
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公开(公告)号：US11754956B2
公开(公告)日：2023-09-12
申请号：US17391847
申请日：2021-08-02
Applicant: Foxlink Image Technology Co., Ltd.
Inventor： Chih Yuan Yang
CPC classification number: G03G15/5029 , G01B7/06 , G01B21/08 , G03G2215/00738
Abstract: A thickness detection mechanism arranged in a scanner or printer for measuring the thickness of mediums fed through the scanner or printer, which comprising: a conveyor section; at least a idle roller set arranged above the conveyor section, which includes at least a shaft and an idle roller pivotally arranged on the shaft; at least an elastic portion arranged above the shaft; and at least a pressure sensor secured on the elastic portion; wherein the thickness detection mechanism measures the thickness of the medium by measuring the pressure applied on the pressure sensor by the idle roller set as the idle roller set being pushed upward, and thus avoids the medium too thin or too thick to enter the scanner or the printer.
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公开(公告)号：US20230119979A1
公开(公告)日：2023-04-20
申请号：US17935595
申请日：2022-09-27
Applicant: EBARA CORPORATION
Inventor： Fumiya OKAZAKI
Abstract: The present disclosure provides a product removal apparatus, a treatment system, and a product removal method that can sufficiently remove the products deposited inside a vacuum pump and also suppress corrosion of the base material of the vacuum pump. The product removal apparatus of the present disclosure includes: a sensor for measuring the temperature of the inside of a vacuum pump, the thickness of a film of a product in a flow path in the vacuum pump, or the vibration frequency of the vacuum pump; a gas supplier for supplying a gas containing hydrogen halide, fluorine, chlorine, chlorine trifluoride, or fluorine radicals to the vacuum pump; and a control device. The control device controls the gas supplier so that the supply of the gas to the vacuum pump is stopped depending on a rate of temperature increase calculated from the temperature measured by the sensor, the film thickness, or the vibration frequency.
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公开(公告)号：US20220390276A1
公开(公告)日：2022-12-08
申请号：US17831736
申请日：2022-06-03
Inventor： Paul Andrew Williams , Daniel Rahn , Anna Katariina Vaskuri
Abstract: A gravity-enforced photon momentum radiometer incudes: a magnetic array; a diamagnetic shuttle that levitates above the magnetic array; a mirror on the diamagnetic shuttle that receives laser light and moves the diamagnetic shuttle due to the optical force; a tiltable platform for the magnetic array; a photogate producing gate light that can be blocked by a photo interrupter and that produces a detector signal that provides a position of the diamagnetic shuttle relative to the tiltable platform for determining a position of the diamagnetic shuttle relative to the photogate.
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