公开(公告)号：US20140331173A1

公开(公告)日：2014-11-06

申请号：US14360636

申请日：2012-11-26

Applicant: Hitachi High-Technologies Corporation

Inventor： Yohei Minekawa ,  Yuji Takagi ,  Minoru Harada ,  Takehiro Hirai ,  Ryo Nakagaki

IPC: G06F3/0484 ,  G02B21/36 ,  G06T7/00

CPC classification number: G06F3/04842 ,  G02B21/365 ,  G06F9/451 ,  G06F17/30707 ,  G06F17/3071 ,  G06T7/0004 ,  H01J37/265 ,  H01J2237/2817

Abstract: Provided is a GUI including: an unadded pane region that hierarchically displays folders which are sets of images having no class information added thereto; an image pane region that displays the images displayed in the unadded pane region, the displayed images having no classification added thereto; and a class pane region that displays images having classification added thereto, wherein by externally inputting class information for one image having the class information added thereto, the input class information is displayed.

Abstract translation: 提供了一种GUI，包括：分层显示是没有添加类信息的图像集合的文件夹的未附加的窗格区域; 显示未附加窗格区域中显示的图像的图像窗格区域，显示的图像没有被添加到其中; 以及显示具有分类的图像的类窗格区域，其中通过外部输入添加了类别信息的一个图像的类信息，显示输入类信息。

公开(公告)号：US10297021B2

公开(公告)日：2019-05-21

申请号：US15329480

申请日：2015-06-26

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yohei Minekawa ,  Yuji Takagi ,  Takehiro Hirai

IPC: G06T7/00 ,  H01L21/67 ,  H01L21/68

Abstract: To quantify the degree of a defect, and provide information useful for yield management. Disclosed is a defect quantification method wherein: a defect image is classified; a measurement region and a measurement area are set to each of the defect image and a reference image on the basis of defect image classification results, said reference image corresponding to the defect image; and an evaluation value of a defect is calculated using each of the measurement values obtained from each of the measurement areas of the defect image and the reference image, and the defect is quantified.

公开(公告)号：US10074511B2

公开(公告)日：2018-09-11

申请号：US15163725

申请日：2016-05-25

Applicant: Hitachi High-Technologies Corporation

Inventor： Takehiro Hirai ,  Yohei Minekawa ,  Yutaka Tandai

IPC: H01J37/00 ,  H01J37/22 ,  H01J37/285 ,  H01J37/28

CPC classification number: H01J37/222 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/221 ,  H01J2237/24592 ,  H01J2237/28 ,  H01J2237/2817 ,  H01L22/12 ,  H01L22/20

Abstract: A defect image classification apparatus includes a control unit that selects images obtained from at least some detectors among a plurality of detectors, associated with kinds of defects to be a classification result of an automatic defect classification processing unit, as images displayed initially on a display unit. The control unit associates the kinds of the defects and the images displayed initially on the display unit, on the basis of a switching operation log when a user classifies images of defects determined previously as the same kinds as the kinds of the defects determined by the automatic defect classification processing unit.

公开(公告)号：US10436576B2

公开(公告)日：2019-10-08

申请号：US15126391

申请日：2015-03-19

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yohei Minekawa ,  Yuko Otani ,  Yuji Takagi

IPC: G01B11/14 ,  G02B21/36 ,  G02B21/10 ,  G02B21/00 ,  G01N23/2251 ,  G01N23/2204 ,  G01B11/30 ,  G01N21/956 ,  G01N21/95 ,  G02B5/30 ,  G01N21/88

Abstract: To review minute defects that were buried in roughness scattered light with an observation device provided with a dark-field microscope, a scanning electron microscope (SEM), and a control unit, the present invention configures the dark-field microscope by installing a filter for blocking a portion of the scattered light, an imaging lens for focusing the scattered light that has passed through the filter, and a detector for dividing the image of the scattered light focused by the imaging lens into the polarization directions converted by a wavelength plate and detecting the resulting images, and the control has a calculation unit for determining the position of a defect candidate detected by another inspection device using the plurality of images separated into polarization directions and detected by the detector.

公开(公告)号：US10770260B2

公开(公告)日：2020-09-08

申请号：US16260988

申请日：2019-01-29

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yuko Otani ,  Yohei Minekawa ,  Takashi Nobuhara ,  Nobuhiko Kanzaki ,  Takehiro Hirai ,  Miyuki Fukuda ,  Yuya Isomae ,  Kaori Yaeshima ,  Yuji Takagi

IPC: G02B21/18 ,  H01J37/22 ,  G06T7/13 ,  G06T7/60 ,  G02B21/00 ,  G02B21/36 ,  G06T7/00 ,  H01J37/28 ,  G06T7/73

Abstract: A defect observation device detects a defect with high accuracy regardless of a defect size. One imaging configuration for observing an observation target on a sample is selected from an optical microscope, an optical microscope, and an electron microscope, and an imaging condition of the selected imaging configuration is controlled.

公开(公告)号：US10593062B2

公开(公告)日：2020-03-17

申请号：US15386262

申请日：2016-12-21

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yuko Otani ,  Kazuo Aoki ,  Yohei Minekawa

IPC: G06T7/80 ,  H04N5/232 ,  H04N5/225 ,  G02B21/12 ,  G03F7/20 ,  G06T7/73 ,  G01N21/95 ,  G01N21/956 ,  G01N23/2251 ,  G02B21/00 ,  G02B21/06 ,  G02B21/36 ,  G06K9/62 ,  G06T7/00 ,  H04N5/235 ,  H04N7/18

Abstract: A defect observation apparatus includes a storage unit configured to store defect information about defects detected by an external inspection apparatus; a first imaging unit configured to capture an image of a defect using a first imaging condition and a second imaging condition; a control unit configured to correct positional information on the defect using the image captured with the first imaging unit; and a second imaging unit configured to capture an image of the defect based on the corrected positional information.

公开(公告)号：US10203851B2

公开(公告)日：2019-02-12

申请号：US14360636

申请日：2012-11-26

Applicant: Hitachi High-Technologies Corporation

Inventor： Yohei Minekawa ,  Yuji Takagi ,  Minoru Harada ,  Takehiro Hirai ,  Ryo Nakagaki

IPC: G06T7/00 ,  G02B21/36 ,  G06F17/30 ,  G06F9/451 ,  G06F3/0484 ,  H01J37/26

Abstract: Provided is a GUI including: an unadded pane region that hierarchically displays folders which are sets of images having no class information added thereto; an image pane region that displays the images displayed in the unadded pane region, the displayed images having no classification added thereto; and a class pane region that displays images having classification added thereto, wherein by externally inputting class information for one image having the class information added thereto, the input class information is displayed.